title: Fast and controllable fabrication of suspended graphene nanopore devices.
abstract: A poly(methyl methacrylate) assisted dry transfer method was developed to transfer graphene microflake onto a suspended SiN chip in an effective and efficient way for further graphene nanopore drilling for DNA analysis. Graphene microflakes can be patterned by e-beam lithography to a designed shape and size on a large scale of a few thousands simultaneously. Subsequently, individual graphene microflakes can be picked up and transferred to a target hole on a suspended SiN membrane with 1 µm precision via a site-specific transfer-printing method. Nanopores with different diameters from 3 to 20 nm were drilled on the as-transferred graphene membrane in a transmission electron microscope. This method offers a fast and controllable way to fabricate graphene nanopores for DNA analyses.
authors.affiliation: State Key Laboratory for Mesoscopic Physics, and Electron Microscopy Laboratory, School of Physics, Peking University, Beijing, People's Republic of China.
authors.forename: Song
authors.initials: S
authors.lastname: Liu
authors.forename: Qing
authors.initials: Q
authors.lastname: Zhao
authors.forename: Jun
authors.initials: J
authors.lastname: Xu
authors.forename: Kai
authors.initials: K
authors.lastname: Yan
authors.forename: Hailin
authors.initials: H
authors.lastname: Peng
authors.forename: Fuhua
authors.initials: F
authors.lastname: Yang
authors.forename: Liping
authors.initials: L
authors.lastname: You
authors.forename: Dapeng
authors.initials: D
authors.lastname: Yu
mesh_terms: D003460:Crystallization / Q000379:methods*; D006108:Graphite / Q000737:chemistry*; D046911:Macromolecular Substances / Q000737:chemistry; D008422:Materials Testing; D008968:Molecular Conformation; D049329:Nanostructures / Q000737:chemistry* / Q000648:ultrastructure*; D010316:Particle Size; D016062:Porosity; D013499:Surface Properties
chemical_list: D046911:Macromolecular Substances; D006108:Graphite