title: Large-scale integration of nanoelectromechanical systems for gas sensing applications.
abstract: We have developed arrays of nanomechanical systems (NEMS) by large-scale integration, comprising thousands of individual nanoresonators with densities of up to 6 million NEMS per square centimeter. The individual NEMS devices are electrically coupled using a combined series-parallel configuration that is extremely robust with respect to lithographical defects and mechanical or electrostatic-discharge damage. Given the large number of connected nanoresonators, the arrays are able to handle extremely high input powers (>1 W per array, corresponding to <1 mW per nanoresonator) without excessive heating or deterioration of resonance response. We demonstrate the utility of integrated NEMS arrays as high-performance chemical vapor sensors, detecting a part-per-billion concentration of a chemical warfare simulant within only a 2 s exposure period.
authors.affiliation: Kavli Nanoscience Institute and Department of Physics, Caltech, Pasadena, CA, USA.
authors.forename: I
authors.initials: I
authors.lastname: Bargatin
authors.forename: E B
authors.initials: EB
authors.lastname: Myers
authors.forename: J S
authors.initials: JS
authors.lastname: Aldridge
authors.forename: C
authors.initials: C
authors.lastname: Marcoux
authors.forename: P
authors.initials: P
authors.lastname: Brianceau
authors.forename: L
authors.initials: L
authors.lastname: Duraffourg
authors.forename: E
authors.initials: E
authors.lastname: Colinet
authors.forename: S
authors.initials: S
authors.lastname: Hentz
authors.forename: P
authors.initials: P
authors.lastname: Andreucci
authors.forename: M L
authors.initials: ML
authors.lastname: Roukes
mesh_terms: D004867:Equipment Design; D019544:Equipment Failure Analysis; D005740:Gases / Q000032:analysis*; D055617:Micro-Electrical-Mechanical Systems / Q000295:instrumentation*; D036103:Nanotechnology / Q000295:instrumentation*; D018511:Systems Integration; D014159:Transducers
chemical_list: D005740:Gases