title: Improved method for hot embossing As2S3 waveguides employing a thermally stable chalcogenide coating.
abstract: We demonstrate the fabrication of As2S3 rib waveguides using hot embossing. Because of the high temperature required, a thin (50nm) Ge(11.5)As(24)Se(64.5) was thermally evaporated on top of an 870nm As(2)S(3) layer to protect against surface degradation during embossing. The waveguides propagation loss was 0.52dB/cm for the TE and 0.41dB/cm for the TM polarizations at 1550nm for a waveguide cross-section dimension of 3.8 × 1μm. The nonlinearity of a 2.2μm wide waveguide was shown to be 13500W(-1)km(-1) using four-wave mixing demonstrating that these embossed waveguides were capable of being used for all-optical processing.
authors.affiliation: The Australian National University, Canberra, ACT 2600, Australia. tih111@rsphysse.anu.edu.au
authors.forename: Ting
authors.initials: T
authors.lastname: Han
authors.forename: Steve
authors.initials: S
authors.lastname: Madden
authors.forename: Sukhanta
authors.initials: S
authors.lastname: Debbarma
authors.forename: Barry
authors.initials: B
authors.lastname: Luther-Davies
mesh_terms: D001152:Arsenicals / Q000737:chemistry*; D018011:Chalcogens / Q000737:chemistry*; D004867:Equipment Design; D019544:Equipment Failure Analysis; D006358:Hot Temperature; D007909:Lenses; D012031:Refractometry / Q000295:instrumentation*; D013440:Sulfides / Q000737:chemistry*; D020349:Surface Plasmon Resonance / Q000295:instrumentation*
chemical_list: D001152:Arsenicals; D018011:Chalcogens; D013440:Sulfides; C045816:arsenic trisulfide