title: Vertically aligned multiwalled carbon nanotubes for pressure, tactile and vibration sensing.
abstract: We report a simple method for the micro-nano integration of flexible, vertically aligned multiwalled CNT arrays sandwiched between a top and bottom carbon layer via a porous alumina (Al(2)O(3)) template approach. The electromechanical properties of the flexible CNT arrays have been investigated under mechanical stress conditions. First experiments show highly sensitive piezoresistive sensors with a resistance decrease of up to ∼35% and a spatial resolution of <1 mm. The results indicate that these CNT structures can be utilized for tactile sensing components. They also confirm the feasibility of accessing and utilizing nanoscopic CNT bundles via lithographic processing. The method involves room-temperature processing steps and standard microfabrication techniques.
authors.affiliation: Department of High Frequency Electronics, Technische Universität Darmstadt, Darmstadt, Germany. yilmazoglu@hfe.tu-darmstadt.de
authors.forename: O
authors.initials: O
authors.lastname: Yilmazoglu
authors.forename: A
authors.initials: A
authors.lastname: Popp
authors.forename: D
authors.initials: D
authors.lastname: Pavlidis
authors.forename: J J
authors.initials: JJ
authors.lastname: Schneider
authors.forename: D
authors.initials: D
authors.lastname: Garth
authors.forename: F
authors.initials: F
authors.lastname: Schüttler
authors.forename: G
authors.initials: G
authors.lastname: Battenberg
mesh_terms: D003217:Conductometry / Q000295:instrumentation*; D004867:Equipment Design; D019544:Equipment Failure Analysis; D008422:Materials Testing; D036103:Nanotechnology / Q000295:instrumentation*; D037742:Nanotubes, Carbon / Q000737:chemistry* / Q000648:ultrastructure; D014110:Touch; D014160:Transducers, Pressure; D014732:Vibration
chemical_list: D037742:Nanotubes, Carbon