title: Laser conditioning on HfO2 film monitored by calorimeter.
abstract: Conditioning effect on HfO2 single-layer film by quasi-cw laser was investigated. The conditioning process was monitored with laser calorimeter. Experimental results revealed that the HfO2 film absorption decreased as a function of the irradiation dose. Higher laser power accelerated the conditioning process. The conditioning effect could not be explained by water annihilation. AFM pictures of the film surface showed that the structural information in the conditioned region was different from the unconditioned region. Monitoring the in situ absorption, laser calorimeter is a promising tool to investigate the laser conditioning process.
authors.affiliation: Chengdu Fine Optical Engineering Research Center, 3# Keyuan 1st road, Chengdu, Sichuan, 610041, China.
authors.forename: Liu
authors.initials: L
authors.lastname: Hao
authors.forename: Chen
authors.initials: C
authors.lastname: Songlin
authors.forename: Wei
authors.initials: W
authors.lastname: Yaowei
authors.forename: Zhang
authors.initials: Z
authors.lastname: Zhe
authors.forename: Luo
authors.initials: L
authors.lastname: Jin
authors.forename: Zheng
authors.initials: Z
authors.lastname: Nan
authors.forename: Ma
authors.initials: M
authors.lastname: Ping
mesh_terms: D002151:Calorimetry / Q000379:methods*; D006195:Hafnium / Q000032:analysis* / Q000737:chemistry*; D007834:Lasers; D008420:Manufactured Materials / Q000032:analysis*; D008422:Materials Testing / Q000379:methods*; D010087:Oxides / Q000032:analysis* / Q000737:chemistry*
chemical_list: D010087:Oxides; C545179:hafnium oxide; D006195:Hafnium