title: Effect of plasma treatment on the gas sensor with single-walled carbon nanotube paste.
abstract: The effect of plasma treatment on the gas sensing properties of screen-printed single-walled carbon nanotube (SWCNT) pastes is reported. The gas sensors, using SWCNT pastes as a sensing material, were fabricated by photolithography and screen printing. The SWCNT pastes were deposited between interdigitated electrodes on heater membrane by screen printing. In order to functionalize the pastes, they were plasma treated using several gases which produce defects caused by reactive ion etching. The Ar and O(2) plasma-treated SWCNT pastes exhibited a large response to NO(2) exposure and the fluorinated gas, such as CF(4) and SF(6), plasma-treated SWCNT pastes exhibited a large response to NH(3) exposure.
authors.affiliation: Display and Nanosystem Lab., College of Engineering, Korea University, Seoul 136-713, Republic of Korea.
authors.forename: Ki-Young
authors.initials: KY
authors.lastname: Dong
authors.forename: Dae-Jin
authors.initials: DJ
authors.lastname: Ham
authors.forename: Byung Hyun
authors.initials: BH
authors.lastname: Kang
authors.forename: Keunsoo
authors.initials: K
authors.lastname: Lee
authors.forename: Jinnil
authors.initials: J
authors.lastname: Choi
authors.forename: Jin-Woo
authors.initials: JW
authors.lastname: Lee
authors.forename: Hyang Hee
authors.initials: HH
authors.lastname: Choi
authors.forename: Byeong-Kwon
authors.initials: BK
authors.lastname: Ju
mesh_terms: D000641:Ammonia / Q000737:chemistry; D004563:Electrochemistry; D004566:Electrodes; D004867:Equipment Design; D005466:Fluorocarbons / Q000737:chemistry; D005740:Gases / Q000032:analysis*; D054020:Lasers, Gas; D036103:Nanotechnology; D037742:Nanotubes, Carbon / Q000737:chemistry*; D009585:Nitrogen Dioxide / Q000737:chemistry; D010100:Oxygen / Q000737:chemistry; D058626:Plasma Gases
chemical_list: D005466:Fluorocarbons; D005740:Gases; D037742:Nanotubes, Carbon; D058626:Plasma Gases; C035066:carbon tetrafluoride; D000641:Ammonia; D009585:Nitrogen Dioxide; D010100:Oxygen