title: Highly polarized single-c-domain single-crystal Pb(Mn,Nb)O(3)-PZT thin films.
abstract: In-plane unstrained single-c-domain/single-crystal thin films of PZT-based ternary ferroelectric perovskite, ξPb(Mn,Nb)O3-(1 - ξ)PZT, were grown on SrRuO(3)/Pt/MgO substrates using magnetron sputtering followed by quenching. The sputtered unstrained thin films exhibit unique ferroelectric properties: high coercive field, Ec > 180 kV/cm, large remanent polarization, P(r) = 100 μC/cm(2), small relative dielectric constants, ε* = 100 to 150, high Curie temperature, Tc = ~600 °C, and bulk-like large transverse piezoelectric constants, e31,f = -12.0 C/m(2) for PZT(48/52) at ξ = 0.06. The unstrained thin films are an ideal structure to extract the bulk ferroelectric properties. Their micro-structures and ferroelectric properties are discussed in relation to the potential applications for piezoelectric MEMS.
authors.affiliation: Department of Microengineering, Kyoto University, Kyoto, Japan. kiyotaka.wasa@gmail.com
authors.forename: Kiyotaka
authors.initials: K
authors.lastname: Wasa
authors.forename: Hideaki
authors.initials: H
authors.lastname: Adachi
authors.forename: Ken
authors.initials: K
authors.lastname: Nishida
authors.forename: Takashi
authors.initials: T
authors.lastname: Yamamoto
authors.forename: Tomoaki
authors.initials: T
authors.lastname: Matsushima
authors.forename: Isaku
authors.initials: I
authors.lastname: Kanno
authors.forename: Hidetoshi
authors.initials: H
authors.lastname: Kotera