title: Homoepitaxial growth of single crystal diamond membranes for quantum information processing.
abstract: Homoepitaxial growth of single crystal diamond membranes is demonstrated employing a microwave plasma chemical vapor deposition technique. The membranes possess excellent structural, optical, and spin properties, which make them suitable for fabrication of optical microcavities for applications in quantum information processing, photonics, spintronics, and sensing.
authors.affiliation: School of Engineering and Applied Sciences, Harvard University, MA 02138, USA. igor@seas.harvard.edu
authors.forename: Igor
authors.initials: I
authors.lastname: Aharonovich
authors.forename: Jonathan C
authors.initials: JC
authors.lastname: Lee
authors.forename: Andrew P
authors.initials: AP
authors.lastname: Magyar
authors.forename: Bob B
authors.initials: BB
authors.lastname: Buckley
authors.forename: Christopher G
authors.initials: CG
authors.lastname: Yale
authors.forename: David D
authors.initials: DD
authors.lastname: Awschalom
authors.forename: Evelyn L
authors.initials: EL
authors.lastname: Hu
mesh_terms: D018130:Diamond / Q000737:chemistry*; D055615:Electrical Equipment and Supplies; D008567:Membranes, Artificial; D058626:Plasma Gases / Q000737:chemistry; D011789:Quantum Theory; D014835:Volatilization
chemical_list: D008567:Membranes, Artificial; D058626:Plasma Gases; D018130:Diamond