title: Delta-doped electron-multiplied CCD with absolute quantum efficiency over 50% in the near to far ultraviolet range for single photon counting applications.
abstract: We have used molecular beam epitaxy (MBE) based delta-doping technology to demonstrate nearly 100% internal quantum efficiency (QE) on silicon electron-multiplied charge-coupled devices (EMCCDs) for single photon counting detection applications. We used atomic layer deposition (ALD) for antireflection (AR) coatings and achieved atomic-scale control over the interfaces and thin film materials parameters. By combining the precision control of MBE and ALD, we have demonstrated more than 50% external QE in the far and near ultraviolet in megapixel arrays. We have demonstrated that other important device performance parameters such as dark current are unchanged after these processes. In this paper, we briefly review ultraviolet detection, report on these results, and briefly discuss the techniques and processes employed.
authors.affiliation: Jet Propulsion Laboratory, California Institute of Technology, Pasadena, California 91109, USA. Shouleh.Nikzad@jpl.nasa.gov
authors.forename: Shouleh
authors.initials: S
authors.lastname: Nikzad
authors.forename: Michael E
authors.initials: ME
authors.lastname: Hoenk
authors.forename: Frank
authors.initials: F
authors.lastname: Greer
authors.forename: Blake
authors.initials: B
authors.lastname: Jacquot
authors.forename: Steve
authors.initials: S
authors.lastname: Monacos
authors.forename: Todd J
authors.initials: TJ
authors.lastname: Jones
authors.forename: Jordana
authors.initials: J
authors.lastname: Blacksberg
authors.forename: Erika
authors.initials: E
authors.lastname: Hamden
authors.forename: David
authors.initials: D
authors.lastname: Schiminovich
authors.forename: Chris
authors.initials: C
authors.lastname: Martin
authors.forename: Patrick
authors.initials: P
authors.lastname: Morrissey
mesh_terms: D004583:Electrons; D004867:Equipment Design; D055096:Optical Devices; D017785:Photons; D011789:Quantum Theory; D011874:Radiometry / Q000295:instrumentation*; D012825:Silicon / Q000737:chemistry; D014466:Ultraviolet Rays
chemical_list: D012825:Silicon