title: Optical characterization and reverse engineering based on multiangle spectroscopy.
abstract: We perform characterization of thin films and reverse engineering of multilayer coatings on the basis of multiangle spectral photometric data provided by a new advanced spectrophotometer accessory. Experimental samples of single thin films and multilayer coatings are produced by magnetron sputtering and electron-beam evaporation. Reflectance and transmittance data at two polarization states are measured at incidence angles from 7 to 40 deg. We demonstrate that multiangle reflectance and transmittance data provide reliable characterization and reverse-engineering results.
authors.affiliation: Research Computing Center, Moscow State University, Leninskie Gory, 119992, Moscow, Russia. tikh@srcc.msu.ru
authors.forename: Alexander V
authors.initials: AV
authors.lastname: Tikhonravov
authors.forename: Tatiana V
authors.initials: TV
authors.lastname: Amotchkina
authors.forename: Michael K
authors.initials: MK
authors.lastname: Trubetskov
authors.forename: Robert J
authors.initials: RJ
authors.lastname: Francis
authors.forename: Vesna
authors.initials: V
authors.lastname: Janicki
authors.forename: Jordi
authors.initials: J
authors.lastname: Sancho-Parramon
authors.forename: Hrvoje
authors.initials: H
authors.lastname: Zorc
authors.forename: Vladimir
authors.initials: V
authors.lastname: Pervak