title: Fabrication of two-dimensional superposed microstructure by interference lithography.
abstract: In this paper, we report the basic theory and method of single exposure interference lithography (IL) to fabricate two-dimensional (2D) superposed microstructures. Distribution of six-beam interference intensities with different azimuth angle is discussed, and 2D superposed microstructures with different periodic constants are obtained by computer simulations. The experiment results using CHP-C positive photoresist show a 2D superposed photonic crystal composed of a periodically repeated hexagonal pattern of hexagonal lattice cells, which is in close agreement with the computer simulation. Fabrication of a superposed structure by single exposure IL paves the way for studying 2D photonic crystal fabrication, surface lasing, optical waveguides, and so on.
authors.affiliation: Institute of Photonic Information Technology, School of Mathematics and Physics Department, Qingdao University of Science and Technology, Qingdao 266061, China.
authors.forename: Hao
authors.initials: H
authors.lastname: Lü
authors.forename: Qiu-Ling
authors.initials: QL
authors.lastname: Zhao
authors.forename: Qing-Yue
authors.initials: QY
authors.lastname: Zhang
authors.forename: Dong-Jie
authors.initials: DJ
authors.lastname: Niu
authors.forename: Xia
authors.initials: X
authors.lastname: Wang