title: Design and implementation of a sub-nm resolution microspectrometer based on a Linear-Variable Optical Filter.
abstract: In this paper the concept of a microspectrometer based on a Linear Variable Optical Filter (LVOF) for operation in the visible spectrum is presented and used in two different designs: the first is for the narrow spectral band between 610 nm and 680 nm, whereas the other is for the wider spectral band between 570 nm and 740 nm. Design considerations, fabrication and measurement results of the LVOF are presented. An iterative signal processing algorithm based on an initial calibration has been implemented to enhance the spectral resolution. Experimental validation is based on the spectrum of a Neon lamp. The results of measurements have been used to analyze the operating limits of the concept and to explain the sources of error in the algorithm. It is shown that the main benefits of a LVOF-based microspectrometer are in case of implementation in a narrowband application. The realized LVOF microspectrometers show a spectral resolution of 2.2 nm in the wideband design and 0.7 nm in the narrowband design.
authors.affiliation: Faculty EEMCS, Department ME/EI, Delft University of Technology, Mekelweg 4, 2628 CD, Delft, The Netherlands. a.emadi@tudelft.nl
authors.forename: Arvin
authors.initials: A
authors.lastname: Emadi
authors.forename: Huaiwen
authors.initials: H
authors.lastname: Wu
authors.forename: Ger
authors.initials: G
authors.lastname: de Graaf
authors.forename: Reinoud
authors.initials: R
authors.lastname: Wolffenbuttel
mesh_terms: D003198:Computer Simulation; D017076:Computer-Aided Design; D004867:Equipment Design; D019544:Equipment Failure Analysis; D005374:Filtration / Q000295:instrumentation*; D008027:Light; D008904:Miniaturization; D008962:Models, Theoretical; D055096:Optical Devices; D012542:Scattering, Radiation; D013057:Spectrum Analysis / Q000295:instrumentation*