Circular multilayer zone plate for high-energy x-ray nano-imaging.
A circular multilayer zone plate (MZP) was fabricated and its focusing performance was evaluated using 20-keV x-rays. MoSi(2) and Si layers were alternately deposited by DC magnetron sputtering on a wire core; all the interfaces satisfied the Fresnel zone condition. The measured line spread function was converted to a point spread function by tomographic reconstruction. The results suggest that the MZP has the potential to realize the diffraction-limited resolving power, which is calculated to be 35 nm using the diffraction integral. Furthermore, scanning transmission microscopy using the MZP could resolve a 50-nm line-and-space pattern.
Graduate School of Material Science, University of Hyogo, Ako, Hyogo, Japan.
Takahisa
T
Koyama
Hidekazu
H
Takano
Shigeki
S
Konishi
Takuya
T
Tsuji
Hisataka
H
Takenaka
Satoshi
S
Ichimaru
Tadayuki
T
Ohchi
Yasushi
Y
Kagoshima