A nanopore structured high performance toluene gas sensor made by nanoimprinting method.
Toluene gas was successfully measured at room temperature using a device microfabricated by a nanoimprinting method. A highly uniform nanoporous thin film was produced with a dense array of titania (TiO(2)) pores with a diameter of 70 ≈ 80 nm using this method. This thin film had a Pd/TiO(2) nanoporous/SiO(2)/Si MIS layered structure with Pd-TiO(2) as the catalytic sensing layer. The nanoimprinting method was useful in expanding the TiO(2) surface area by about 30%, as confirmed using AFM and SEM imaging. The measured toluene concentrations ranged from 50 ppm to 200 ppm. The toluene was easily detected by changing the Pd/TiO(2) interface work function, resulting in a change in the I-V characteristics.
Department of Nano Science and Engineering, Myongji University, Gyeonggi 449-728, Korea. 9515king@mju.ac.kr
Kwang-Su
KS
Kim
Woon-Hyuk
WH
Baek
Jung-Min
JM
Kim
Tae-Sik
TS
Yoon
Hyun Ho
HH
Lee
Chi Jung
CJ
Kang
Yong-Sang
YS
Kim
D004867:Equipment Design; D019544:Equipment Failure Analysis; D005740:Gases / Q000032:analysis*; D054802:Molecular Imprinting / Q000379:methods*; D049329:Nanostructures / Q000737:chemistry* / Q000648:ultrastructure; D016062:Porosity; D014050:Toluene / Q000032:analysis*; D014159:Transducers
D005740:Gases; D014050:Toluene