Simple electronics for inertial and Pan-type piezoelectric positioners used in scanning probe microscopes.
We describe a new type of circuit designed for driving piezoelectric positioners that rely on the stick-slip phenomenon. The circuit can be used for inertial positioners that have only one piezoelectric element (or multiple elements that are moved simultaneously) or for designs using a sequential movement of independent piezoelectric elements. A relay switches the piezoelectric elements between a high voltage source and ground, thus creating a fast voltage step followed by a slow ramp produced by the exponential discharging of the piezoelectric elements through a series resistor. A timing cascade is generated by having each relay power the next relay in the sequence. This design is simple and inexpensive. While it was developed for scanning probe microscopes, it may be useful for any piezoelectric motor based on a fast jump followed by a slow relaxation.
Department of Physics, University of Texas, Austin, Texas 78712, USA.
LeuJen
L
Chen
Seong Heon
SH
Kim
Alfred K H
AK
Lee
Alex
A
de Lozanne