title: Scan speed control for tapping mode SPM.
abstract: In order to increase the imaging speed of a scanning probe microscope in tapping mode, we propose to use a dynamic controller on 'parachuting' regions. Furthermore, we propose to use variable scan speed on 'upward step' regions, with the speed determined by the error signal of the closed-loop control. We offer line traces obtained on a calibration grating with 25-nm step height, using both standard scanning and our scanning method, as experimental evidence.
authors.affiliation: Faculty of Automation and Electronics of the National Nuclear Research University (MEPhI), Moscow, 115409, Russia. maleksey@bk.ru.
authors.forename: Aleksey V
authors.initials: AV
authors.lastname: Meshtcheryakov
authors.forename: Vjacheslav V
authors.initials: VV
authors.lastname: Meshtcheryakov