title: Toward two-dimensional nanometer resolution hard X-ray differential-interference-contrast imaging using modified photon sieves.
abstract: In this Letter, we report a significant step forward in the design of single-optical-element optics for two-dimensional (2D) hard X-ray differential-interference-contrast (DIC) imaging based on modified photon sieves (MPSs). MPSs were obtained by a modified optic, i.e., combining two overlaid binary gratings and a photon sieve through two logical XOR operations. The superior performance of MPSs was demonstrated. Compared to Fresnel zone plates-based DIC diffractive optical elements (DOEs), which help to improve contrast only in one direction, MPSs can provide better resolution and 2D DIC imaging. Compared to normal photon sieves, MPSs are capable of imaging at a significantly higher image contrast. We anticipate that MPSs can provide a complementary and versatile high-resolution nondestructive imaging tool for ultra-large-scale integrated circuits at 45 nm node and below.
authors.affiliation: Key Laboratory of Laboratory of Nano-Fabrication and Novel Devices Integrated Technology, Institute of Microelectronics, Chinese Academy of Sciences, Beijing, China. xiechangqing@ime.ac.cn
authors.forename: Changqing
authors.initials: C
authors.lastname: Xie
authors.forename: Xiaoli
authors.initials: X
authors.lastname: Zhu
authors.forename: Hailiang
authors.initials: H
authors.lastname: Li
authors.forename: Lina
authors.initials: L
authors.lastname: Shi
authors.forename: Yilei
authors.initials: Y
authors.lastname: Hua
authors.forename: Ming
authors.initials: M
authors.lastname: Liu
mesh_terms: D000465:Algorithms; D008858:Microscopy, Phase-Contrast / Q000379:methods*; D055620:Optical Phenomena; D017785:Photons; D053838:Scattering, Small Angle; D014961:X-Ray Diffraction / Q000379:methods*; D014965:X-Rays