title: Integrated TiO2 resonators for visible photonics.
abstract: We demonstrate waveguide-coupled titanium dioxide (TiO(2) racetrack resonators with loaded quality factors of 2.2×10(4) for the visible wavelengths. The structures were fabricated in sputtered TiO(2) thin films on oxidized silicon substrates using standard top-down nanofabrication techniques, and passively probed in transmission measurements using a tunable red laser.
authors.affiliation: School of Engineering and Applied Sciences, Harvard University, Cambridge, Massachusetts 02138, USA. jchoy@fas.harvard.edu
authors.forename: Jennifer T
authors.initials: JT
authors.lastname: Choy
authors.forename: Jonathan D B
authors.initials: JD
authors.lastname: Bradley
authors.forename: Parag B
authors.initials: PB
authors.lastname: Deotare
authors.forename: Ian B
authors.initials: IB
authors.lastname: Burgess
authors.forename: Christopher C
authors.initials: CC
authors.lastname: Evans
authors.forename: Eric
authors.initials: E
authors.lastname: Mazur
authors.forename: Marko
authors.initials: M
authors.lastname: Lončar