title: Beam current enhancement of microwave plasma ion source utilizing double-port rectangular cavity resonator.
abstract: Microwave plasma ion source with rectangular cavity resonator has been examined to improve ion beam current by changing wave launcher type from single-port to double-port. The cavity resonators with double-port and single-port wave launchers are designed to get resonance effect at TE-103 mode and TE-102 mode, respectively. In order to confirm that the cavities are acting as resonator, the microwave power for breakdown is measured and compared with the E-field strength estimated from the HFSS (High Frequency Structure Simulator) simulation. Langmuir probe measurements show that double-port cavity enhances central density of plasma ion source by modifying non-uniform plasma density profile of the single-port cavity. Correspondingly, beam current from the plasma ion source utilizing the double-port resonator is measured to be higher than that utilizing single-port resonator. Moreover, the enhancement in plasma density and ion beam current utilizing the double-port resonator is more pronounced as higher microwave power applied to the plasma ion source. Therefore, the rectangular cavity resonator utilizing the double-port is expected to enhance the performance of plasma ion source in terms of ion beam extraction.
authors.affiliation: Department of Nuclear Engineering, Seoul National University, Seoul 151-744, South Korea.
authors.forename: Yuna
authors.initials: Y
authors.lastname: Lee
authors.forename: Yeong-Shin
authors.initials: YS
authors.lastname: Park
authors.forename: Jong-Gab
authors.initials: JG
authors.lastname: Jo
authors.forename: J J
authors.initials: JJ
authors.lastname: Yang
authors.forename: Y S
authors.initials: YS
authors.lastname: Hwang