title: Shunting arc plasma source for pure carbon ion beam.
abstract: A plasma source is developed using a coaxial shunting arc plasma gun to extract a pure carbon ion beam. The pure carbon ion beam is a new type of deposition system for diamond and other carbon materials. Our plasma device generates pure carbon plasma from solid-state carbon material without using a hydrocarbon gas such as methane gas, and the plasma does not contain any hydrogen. The ion saturation current of the discharge measured by a double probe is about 0.2 mA∕mm(2) at the peak of the pulse.
authors.affiliation: National Institute of Advanced Industrial Science and Technology (AIST), 1-1-1 Umezono, Tsukuba, Ibaraki 305-8568, Japan. h-koguchi@aist.go.jp
authors.forename: H
authors.initials: H
authors.lastname: Koguchi
authors.forename: H
authors.initials: H
authors.lastname: Sakakita
authors.forename: S
authors.initials: S
authors.lastname: Kiyama
authors.forename: T
authors.initials: T
authors.lastname: Shimada
authors.forename: Y
authors.initials: Y
authors.lastname: Sato
authors.forename: Y
authors.initials: Y
authors.lastname: Hirano