title: Grazing incidence synchrotron X-ray topography as a tool for denuded zone studies of silicon wafers.
abstract: Reflection topographs of annealed Czochralski-grown silicon wafers are made with synchrotron white beam radiation at grazing angles of 0.2 degree to 3 degree. Information on the uniformity of the denuded zone is obtained from a number of grazing incidence topographs, which according to calculations turn out to be almost completely monochromatic having a negligible harmonic content. The calculated penetration depth ranges from 1 to 100 µm depending on the grazing angle and reflection used. The grazing incidence topographs are compared with section topographs of the same samples.
authors.affiliation: Optoelectronics Laboratory, Helsinki University of Technology, P.O. Box 3000, FIN-02015 HUT, Finland.
authors.forename: R
authors.initials: R
authors.lastname: Rantamäki
authors.forename: T
authors.initials: T
authors.lastname: Tuomi
authors.forename: P J
authors.initials: PJ
authors.lastname: McNally
authors.forename: J
authors.initials: J
authors.lastname: Curley
authors.forename: A
authors.initials: A
authors.lastname: Danilewsky