title: The second generation Singapore high resolution proton beam writing facility.
abstract: A new proton beam focusing facility, designed for proton beam writing (PBW) applications has been tested. PBW allows for proximity free structuring of high aspect ratio, high-density 3D nanostructures. The new facility is designed around OM52 compact quadrupole lenses capable of operating in a variety of high demagnification configurations. Performance tests show that proton beams can be focused down to 19.0 × 29.9 nm(2) and single line scans show a beam width of 12.6 nm. The ultimate goal of sub 10 nm structuring with MeV protons will be discussed.
authors.affiliation: Centre for Ion Beam Applications, Department of Physics, National University of Singapore, Singapore 117542, Singapore. phyjavk@nus.edu.sg
authors.forename: J A
authors.initials: JA
authors.lastname: van Kan
authors.forename: P
authors.initials: P
authors.lastname: Malar
authors.forename: Armin Baysic
authors.initials: AB
authors.lastname: de Vera