title: Development of low-energy and high-current-density ion beam system.
abstract: A low-energy ion beam system operating at a dc voltage of less than 300 V was developed using an ion source with a multicusp magnetic field. A high-current-density ion beam of 6.9 mA∕cm(2) was successfully extracted at the electrode. The beam extraction characteristics for flat and concave electrodes were compared. In the case of a concave electrode with a designed focal length of 350 mm, it was observed that the beam profile was sharper than that obtained using a flat electrode.
authors.affiliation: Innovative Plasma Technologies Group, National Institute of Advanced Industrial Science and Technology (AIST), Tsukuba 305-8568, Japan. h.sakakita@aist.go.jp
authors.forename: H
authors.initials: H
authors.lastname: Sakakita
authors.forename: S
authors.initials: S
authors.lastname: Kiyama
authors.forename: Y
authors.initials: Y
authors.lastname: Hirano
authors.forename: H
authors.initials: H
authors.lastname: Koguchi
authors.forename: T
authors.initials: T
authors.lastname: Shimada
authors.forename: Y
authors.initials: Y
authors.lastname: Sato