title: Dependence of ion beam current on position of mobile plate tuner in multi-frequencies microwaves electron cyclotron resonance ion source.
abstract: We are constructing a tandem-type electron cyclotron resonance ion source (ECRIS). The first stage of this can supply 2.45 GHz and 11-13 GHz microwaves to plasma chamber individually and simultaneously. We optimize the beam current I(FC) by the mobile plate tuner. The I(FC) is affected by the position of the mobile plate tuner in the chamber as like a circular cavity resonator. We aim to clarify the relation between the I(FC) and the ion saturation current in the ECRIS against the position of the mobile plate tuner. We obtained the result that the variation of the plasma density contributes largely to the variation of the I(FC) when we change the position of the mobile plate tuner.
authors.affiliation: Division of Electrical, Electronic and Information Engineering, Graduate School of Engineering, Osaka University, 2-1 Yamadaoka, Suita, Osaka 565-0871, Japan. kurisu@i-beam.jp
authors.forename: Yosuke
authors.initials: Y
authors.lastname: Kurisu
authors.forename: Ryutaro
authors.initials: R
authors.lastname: Kiriyama
authors.forename: Tomoya
authors.initials: T
authors.lastname: Takenaka
authors.forename: Dai
authors.initials: D
authors.lastname: Nozaki
authors.forename: Fuminobu
authors.initials: F
authors.lastname: Sato
authors.forename: Yushi
authors.initials: Y
authors.lastname: Kato
authors.forename: Toshiyuki
authors.initials: T
authors.lastname: Iida
mesh_terms: D017357:Cyclotrons; D004583:Electrons; D008872:Microwaves; D058626:Plasma Gases / Q000737:chemistry
chemical_list: D058626:Plasma Gases