title: High-yield transfer printing of metal-insulator-metal nanodiodes.
abstract: Nanoscale metal-insulator-metal (MIM) diodes represent important devices in the fields of electronic circuits, detectors, communication, and energy, as their cutoff frequencies may extend into the "gap" between the electronic microwave range and the optical long-wave infrared regime. In this paper, we present a nanotransfer printing method, which allows the efficient and simultaneous fabrication of large-scale arrays of MIM nanodiode stacks, thus offering the possibility of low-cost mass production. In previous work, we have demonstrated the successful transfer and electrical characterization of macroscopic structures. Here, we demonstrate for the first time the fabrication of several millions of nanoscale diodes with a single transfer-printing step using a temperature-enhanced process. The electrical characterization of individual MIM nanodiodes was performed using a conductive atomic force microscope (AFM) setup. Our analysis shows that the tunneling current is the dominant conduction mechanism, and the electrical measurement data agree well with experimental data on previously fabricated microscale diodes and numerical simulations.
authors.affiliation: Institute for Nanoelectronics, Technische Universität München, Arcisstrasse 21, 80333 Munich, Germany. Bareiss@nano.ei.tum.de
authors.forename: Mario
authors.initials: M
authors.lastname: Bareiss
authors.forename: Frederik
authors.initials: F
authors.lastname: Ante
authors.forename: Daniel
authors.initials: D
authors.lastname: Kälblein
authors.forename: Gunther
authors.initials: G
authors.lastname: Jegert
authors.forename: Christian
authors.initials: C
authors.lastname: Jirauschek
authors.forename: Giuseppe
authors.initials: G
authors.lastname: Scarpa
authors.forename: Bernhard
authors.initials: B
authors.lastname: Fabel
authors.forename: Edward M
authors.initials: EM
authors.lastname: Nelson
authors.forename: Gregory
authors.initials: G
authors.lastname: Timp
authors.forename: Ute
authors.initials: U
authors.lastname: Zschieschang
authors.forename: Hagen
authors.initials: H
authors.lastname: Klauk
authors.forename: Wolfgang
authors.initials: W
authors.lastname: Porod
authors.forename: Paolo
authors.initials: P
authors.lastname: Lugli