title: Rapid in-process measurement of surface roughness using adaptive optics.
abstract: We present an in-process measurement of surface roughness by combining an optical probe of laser-scattering phenomena and adaptive optics for aberration correction. Measurement results of five steel samples with a roughness ranging from 0.2 to 3.125 μm demonstrate excellent correlation between the peak power and average roughness with a correlation coefficient (R(2)) of 0.9967. The proposed adaptive-optics-assisted system is in good agreement with the stylus method, and error values of less than 8.7% are obtained for average sample roughness in the range of 0.265 to 1.119 μm. The proposed system can be used as a rapid in-process roughness monitor/estimator to further increase the precision and stability of manufacturing processes in situ.
authors.affiliation: Institute of Opto-Mechatronics Engineering, National Central University, No. 300, Jhongda Road, Jhongli City, Taoyuan County 32001, Taiwan. mikefuh@ncu.edu.tw
authors.forename: Yiin Kuen
authors.initials: YK
authors.lastname: Fuh
authors.forename: Kuo Chan
authors.initials: KC
authors.lastname: Hsu
authors.forename: Jia Ren
authors.initials: JR
authors.lastname: Fan