title: SOI-based trapezoidal waveguide with 45° microreflector for noncoplanar optical interconnect.
abstract: A silicon on insulator (SOI)-based trapezoidal waveguide with a 45° reflector for noncoplanar optical interconnect is demonstrated. The proposed waveguide is fabricated on an orientation-defined (100) SOI substrate by using a single-step anisotropic wet-etching process. The optical performances of proposed waveguides are numerically and experimentally studied. Transmittance of -4.51 dB, alignment tolerance of ±20 μm, cross talk of -53 dB, and propagation loss of -0.404 dB/cm are achieved The proposed waveguide would be a basic element and suitable for the future intrachip optical interconnects.
authors.affiliation: Department of Optics and Photonics, National Central University, Jhongli 32001, Taiwan.
authors.forename: Chia-Chi
authors.initials: CC
authors.lastname: Chang
authors.forename: Po-Kuan
authors.initials: PK
authors.lastname: Shen
authors.forename: Chin-Ta
authors.initials: CT
authors.lastname: Chen
authors.forename: Hsu-Liang
authors.initials: HL
authors.lastname: Hsiao
authors.forename: Hsiao-Chin
authors.initials: HC
authors.lastname: Lan
authors.forename: Yun-Chih
authors.initials: YC
authors.lastname: Lee
authors.forename: Mount-Learn
authors.initials: ML
authors.lastname: Wu