title: Hollow target magnetron-sputter-type solid material ion source.
abstract: A thin-walled aluminum (Al) hollow electrode has been inserted into an ion source to serve as an electrode for a radio frequency magnetron discharge. The produced plasma stabilized by argon (Ar) gas sputters the Al electrode to form a beam of Al(+) and Ar(+) ions. The total beam current extracted through a 3 mm diameter extraction hole has been 50 μA, with the Al(+) ion beam occupying 30% of the total beam current.
authors.affiliation: Graduate School of Engineering, Doshisha University, Kyoto 610-0321, Japan.
authors.forename: D
authors.initials: D
authors.lastname: Sasaki
authors.forename: S
authors.initials: S
authors.lastname: Ieki
authors.forename: T
authors.initials: T
authors.lastname: Kasuya
authors.forename: M
authors.initials: M
authors.lastname: Wada
mesh_terms: D000535:Aluminum / Q000737:chemistry; D004566:Electrodes; D004583:Electrons; D060526:Magnetic Fields; D008872:Microwaves; D011874:Radiometry / Q000295:instrumentation*; D012666:Semiconductors
chemical_list: D000535:Aluminum