title: High aspect subdiffraction-limit photolithography via a silver superlens.
abstract: Photolithography is the technology of choice for mass patterning in semiconductor and data storage industries. Superlenses have demonstrated the capability of subdiffraction-limit imaging and been envisioned as a promising technology for potential nanophotolithography. Unfortunately, subdiffraction-limit patterns generated by current superlenses exhibited poor profile depth far below the requirement for photolithography. Here, we report an experimental demonstration of sub-50 nm resolution nanophotolithography via a smooth silver superlens with a high aspect profile of ~45 nm, as well as grayscale subdiffraction-limit three-dimensional nanopatterning. Theoretical analysis and simulation show that smooth interfaces play a critical role. Superlens-based lithography can be integrated with conventional UV photolithography systems to endow them with the capability of nanophotolithography, which could provide a cost-effective approach for large scale and rapid nanopatterning.
authors.affiliation: Institute of Materials Research and Engineering, Agency for Science, Technology and Research (A*STAR), 3 Research Link, Singapore 117602.
authors.forename: Hong
authors.initials: H
authors.lastname: Liu
authors.forename: Bing
authors.initials: B
authors.lastname: Wang
authors.forename: Lin
authors.initials: L
authors.lastname: Ke
authors.forename: Jie
authors.initials: J
authors.lastname: Deng
authors.forename: Chan Choy
authors.initials: CC
authors.lastname: Chum
authors.forename: Siew Lang
authors.initials: SL
authors.lastname: Teo
authors.forename: Lu
authors.initials: L
authors.lastname: Shen
authors.forename: Stefan A
authors.initials: SA
authors.lastname: Maier
authors.forename: Jinghua
authors.initials: J
authors.lastname: Teng
mesh_terms: D004867:Equipment Design; D019544:Equipment Failure Analysis; D007909:Lenses; D049329:Nanostructures / Q000737:chemistry* / Q000648:ultrastructure*; D036103:Nanotechnology / Q000295:instrumentation*; D010316:Particle Size; D010781:Photography / Q000295:instrumentation*; D012834:Silver / Q000737:chemistry*; D014025:Titanium / Q000737:chemistry*
chemical_list: C009495:titanium dioxide; D012834:Silver; D014025:Titanium