title: Profiles of ion beams and plasma parameters on a multi-frequencies microwaves large bore electron cyclotron resonance ion source with permanent magnets.
abstract: In order to contribute to various applications of plasma and beams based on an electron cyclotron resonance, a new concept on magnetic field with all magnets on plasma production and confinement has been proposed with enhanced efficiency for broad and dense ion beam. The magnetic field configuration consists of a pair of comb-shaped magnet surrounding plasma chamber cylindrically. Resonance zones corresponding for 2.45 GHz and 11-13 GHz frequencies are positioned at spatially different positions. We launch simultaneously multiplex frequencies microwaves operated individually, try to control profiles of the plasma parameters and the extracted ion beams, and to measure them in detail.
authors.affiliation: Division of Electrical, Electronic and Information Engineering, Graduate School of Engineering, Osaka University, 2-1 Yamada-oka, Suita-shi, Osaka 565-0871, Japan. kato@eei.eng.osaka-u.ac.jp
authors.forename: Yushi
authors.initials: Y
authors.lastname: Kato
authors.forename: Naoki
authors.initials: N
authors.lastname: Sakamoto
authors.forename: Ryutaro
authors.initials: R
authors.lastname: Kiriyama
authors.forename: Tomoya
authors.initials: T
authors.lastname: Takenaka
authors.forename: Yosuke
authors.initials: Y
authors.lastname: Kurisu
authors.forename: Dai
authors.initials: D
authors.lastname: Nozaki
authors.forename: Fuminobu
authors.initials: F
authors.lastname: Sato
authors.forename: Toshiyuki
authors.initials: T
authors.lastname: Iida