title: Wafer scale interdigitated nanoelectrode devices functionalized using a MEMS-based deposition system.
abstract: This paper reports on a methodology to elaborate interdigitated nanoelectrode devices (INDs) at the wafer scale, relying on a mix-and-match process which combines proximity optical lithography and electron beam lithography. An optimum exposure dose allowed fabricating nanodevices, at the wafer level, with a successful yield of 97%. The final devices are bonded onto conventional TO-8 packages. Electrical characterization in a short-circuited nanoelectrode is performed, revealing a 230 µΩ cm resistivity value at 23 °C. A MEMS-based spotter made of cantilevers (called Bioplume) has been used to obtain precise functionalization of the INDs with sub-picoliter volume solutions. These INDs are the basis of multiple tunnel junction nanodevices, intended to serve as novel highly sensitive nanobiosensors.
authors.affiliation: LAAS-CNRS, Université de Toulouse, 7 avenue du Colonel Roche, Toulouse, France. nanobiomex@hotmail.com
authors.forename: A
authors.initials: A
authors.lastname: Martinez-Rivas
authors.forename: F
authors.initials: F
authors.lastname: Carcenac
authors.forename: D
authors.initials: D
authors.lastname: Saya
authors.forename: C
authors.initials: C
authors.lastname: Séverac
authors.forename: L
authors.initials: L
authors.lastname: Nicu
authors.forename: C
authors.initials: C
authors.lastname: Vieu
mesh_terms: D015374:Biosensing Techniques / Q000295:instrumentation; D004867:Equipment Design; D055617:Micro-Electrical-Mechanical Systems / Q000295:instrumentation*; D008839:Microelectrodes; D036103:Nanotechnology / Q000295:instrumentation* / Q000379:methods*; D019904:Polymethyl Methacrylate
chemical_list: D019904:Polymethyl Methacrylate