title: Self-calibrated humidity sensor in CMOS without post-processing.
abstract: A 1.1 μW power dissipation, voltage-output humidity sensor with 10% relative humidity accuracy was developed in the LFoundry 0.15 μm CMOS technology without post-processing. The sensor consists of a woven lateral array of electrodes implemented in CMOS top metal, a humidity-sensitive layer of Intervia Photodielectric 8023D-10, a CMOS capacitance to voltage converter, and the self-calibration circuitry.
authors.affiliation: Maenaka Human-sensing Fusion Project, 8111, Shosha 2167, Himeji-shi, Hyogo-ken, Japan. oleg@eratokm.jp
authors.forename: Oleg
authors.initials: O
authors.lastname: Nizhnik
authors.forename: Kohei
authors.initials: K
authors.lastname: Higuchi
authors.forename: Kazusuke
authors.initials: K
authors.lastname: Maenaka
mesh_terms: D002138:Calibration; D003198:Computer Simulation; D004560:Electricity; D004581:Electronics; D006813:Humidity; D008670:Metals / Q000737:chemistry*; D010087:Oxides / Q000737:chemistry*; D012666:Semiconductors / Q000295:instrumentation*; D013696:Temperature
chemical_list: D008670:Metals; D010087:Oxides