title: CMOS-integrated film bulk acoustic resonators for label-free biosensing.
abstract: The throughput is an important parameter for label-free biosensors. Acoustic resonators like the quartz crystal microbalance have a low throughput because the number of sensors which can be used at the same time is limited. Here we present an array of 64 CMOS-integrated film bulk acoustic resonators. We compare the performance with surface plasmon resonance and the quartz crystal microbalance and demonstrate the performance of the sensor for multiplexed detection of DNA.
authors.affiliation: Siemens AG Munich, Corporate Technology, Otto-Hahn-Ring 6, 81739 Munich, Germany. martin.nirschl.ext@siemens.com
authors.forename: Martin
authors.initials: M
authors.lastname: Nirschl
authors.forename: Arto
authors.initials: A
authors.lastname: Rantala
authors.forename: Kari
authors.initials: K
authors.lastname: Tukkiniemi
authors.forename: Sanna
authors.initials: S
authors.lastname: Auer
authors.forename: Ann-Charlotte
authors.initials: AC
authors.lastname: Hellgren
authors.forename: Dana
authors.initials: D
authors.lastname: Pitzer
authors.forename: Matthias
authors.initials: M
authors.lastname: Schreiter
authors.forename: Inger
authors.initials: I
authors.lastname: Vikholm-Lundin
mesh_terms: D000162:Acoustics / Q000295:instrumentation*; D000818:Animals; D015374:Biosensing Techniques / Q000295:instrumentation*; D002021:Buffers; D002116:Calcitonin / Q000235:genetics; D002417:Cattle; D051546:Cyclooxygenase 2 / Q000235:genetics; D004247:DNA / Q000032:analysis; D057230:Limit of Detection; D008670:Metals / Q000737:chemistry*; D008855:Microscopy, Electron, Scanning; D010087:Oxides / Q000737:chemistry*; D016133:Polymerase Chain Reaction; D011498:Protein Precursors / Q000235:genetics; D058525:Quartz Crystal Microbalance Techniques; D012666:Semiconductors; D044967:Serum; D012710:Serum Albumin, Bovine / Q000032:analysis; D013194:Staining and Labeling; D020349:Surface Plasmon Resonance
chemical_list: D002021:Buffers; D008670:Metals; D010087:Oxides; D011498:Protein Precursors; D012710:Serum Albumin, Bovine; D002116:Calcitonin; D004247:DNA; D051546:Cyclooxygenase 2