title: K-band single-chip electron spin resonance detector.
abstract: We report on the design, fabrication, and characterization of an integrated detector for electron spin resonance spectroscopy operating at 27 GHz. The microsystem, consisting of an LC-oscillator and a frequency division module, is integrated onto a single silicon chip using a conventional complementary metal-oxide-semiconductor technology. The achieved room temperature spin sensitivity is about 10(8)spins/G Hz(1/2), with a sensitive volume of about (100 μm)(3). Operation at 77K is also demonstrated.
authors.affiliation: Ecole Polytechninque Federale de Lausanne (EPFL), CH-1015 Lausanne, Switzerland.
authors.forename: Jens
authors.initials: J
authors.lastname: Anders
authors.forename: Alexander
authors.initials: A
authors.lastname: Angerhofer
authors.forename: Giovanni
authors.initials: G
authors.lastname: Boero
mesh_terms: D004581:Electronics / Q000295:instrumentation*; D004583:Electrons; D004867:Equipment Design; D019544:Equipment Failure Analysis; D009682:Magnetic Resonance Spectroscopy / Q000295:instrumentation*; D008280:Magnetics / Q000295:instrumentation*; D012399:Rotation; D014159:Transducers