title: Standard CMOS Fabrication of a Sensitive Fully Depleted Electrolyte-Insulator-Semiconductor Field Effect Transistor for Biosensor Applications.
abstract: Microfabricated semiconductor devices are becoming increasingly relevant for detection of biological and chemical components. The integration of active biological materials together with sensitive transducers offers the possibility of generating highly sensitive, specific, selective and reliable biosensors. This paper presents the fabrication of a sensitive, fully depleted (FD), electrolyte-insulator-semiconductor field-effect transistor (EISFET) made with a silicon-on-insulator (SOI) wafer of a thin 10-30 nm active SOI layer. Initial results are presented for device operation in solutions and for bio-sensing. Here we report the first step towards a high volume manufacturing of a CMOS-based biosensor that will enable various types of applications including medical and environmental sensing.
authors.affiliation: Intel Research Israel, Intel Electronics, Jerusalem 91031, Israel; E-Mails:  gil.shalev@intel.com  (G.S.);  ariel.cohen@intel.com  (A.C.);  amihood.doron@intel.com  (A.D.);  andrew.machauf@intel.com  (A.M.);  moran.horesh@intel.com  (M.H.);  udi.virobnik@intel.com  (U.V.); daniela.ullien@intel.com  (D.U).
authors.forename: Gil
authors.initials: G
authors.lastname: Shalev
authors.forename: Ariel
authors.initials: A
authors.lastname: Cohen
authors.forename: Amihood
authors.initials: A
authors.lastname: Doron
authors.forename: Andrew
authors.initials: A
authors.lastname: Machauf
authors.forename: Moran
authors.initials: M
authors.lastname: Horesh
authors.forename: Udi
authors.initials: U
authors.lastname: Virobnik
authors.forename: Daniela
authors.initials: D
authors.lastname: Ullien
authors.forename: Ilan
authors.initials: I
authors.lastname: Levy