title: 3D nanofluidic channels shaped by electron-beam-induced etching.
abstract: In-plane nanofluidic channels with 3D topography are fabricated. Nanochannel masters are written by electron beam lithography in SU-8 resist and shaped by electron-beam-induced etching (EBIE) with water as the precursor gas. Nanofunnel replicas cast from unmodified and EBIE-modified masters show that the funnel tip dimensions decrease from a 150-nm depth and 80-nm width to a 70-nm depth and 40-nm width.
authors.affiliation: Department of Chemistry, Indiana University, 800 E. Kirkwood Ave., Bloomington, IN 47405-7102, USA.
authors.forename: John M
authors.initials: JM
authors.lastname: Perry
authors.forename: Zachary D
authors.initials: ZD
authors.lastname: Harms
authors.forename: Stephen C
authors.initials: SC
authors.lastname: Jacobson