title: Performance of a diaphragmed microlens for a packaged microspectrometer.
abstract: This paper describes the design, fabrication, packaging and testing of a microlens integrated in a multi-layered MEMS microspectrometer. The microlens was fabricated using modified PDMS molding to form a suspended lens diaphragm. Gaussian beam propagation model was used to measure the focal length and quantify M(2) value of the microlens. A tunable calibration source was set up to measure the response of the packaged device. Dual wavelength separation by the packaged device was demonstrated by CCD imaging and beam profiling of the spectroscopic output. We demonstrated specific techniques to measure critical parameters of microoptics systems for future optimization of spectroscopic devices.
authors.affiliation: Biomedical Engineering, University of Southern California, Los Angeles, CA, USA; E-Mail:  jlo@nano.com.
authors.forename: Joe
authors.initials: J
authors.lastname: Lo
authors.forename: Shih-Jui
authors.initials: SJ
authors.lastname: Chen
authors.forename: Qiyin
authors.initials: Q
authors.lastname: Fang
authors.forename: Thanassis
authors.initials: T
authors.lastname: Papaioannou
authors.forename: Eun-Sok
authors.initials: ES
authors.lastname: Kim
authors.forename: Martin
authors.initials: M
authors.lastname: Gundersen
authors.forename: Laura
authors.initials: L
authors.lastname: Marcu