title: Step-index optical waveguide produced by multi-step ion implantation in LiNbO3.
abstract: The refractive indexes, material attenuation and damage fractions of a multi-step ion implanted Lithium Niobate (LiNbO3) waveguide were analyzed as functions of the annealing temperatures. An almost flat damage depth profile was designed to reduce the uncertainties related to the indexes profile shape, thus providing a better test-case for the characterizations. The measurements performed on the fabricated optical waveguides confirmed the predicted step-index profiles showing that the light is confined inside the damaged layer. The low measured attenuation (less than 0.8 dB/cm @ 632.8 nm) makes the obtained waveguide attractive for device fabrication.
authors.affiliation: Laboratorio di Micro e Submicro Tecnologie abilitanti dell’Emilia-Romagna, Via P. Gobetti 101, I-40129 Bologna, Italy. montanari@bo.imm.cnr.it
authors.forename: G B
authors.initials: GB
authors.lastname: Montanari
authors.forename: P
authors.initials: P
authors.lastname: De Nicola
authors.forename: S
authors.initials: S
authors.lastname: Sugliani
authors.forename: A
authors.initials: A
authors.lastname: Menin
authors.forename: A
authors.initials: A
authors.lastname: Parini
authors.forename: A
authors.initials: A
authors.lastname: Nubile
authors.forename: G
authors.initials: G
authors.lastname: Bellanca
authors.forename: M
authors.initials: M
authors.lastname: Chiarini
authors.forename: M
authors.initials: M
authors.lastname: Bianconi
authors.forename: G G
authors.initials: GG
authors.lastname: Bentini