title: Compact MEMS-driven pyramidal polygon reflector for circumferential scanned endoscopic imaging probe.
abstract: A novel prototype of an electrothermal chevron-beam actuator based microelectromechanical systems (MEMS) platform has been successfully developed for circumferential scan. Microassembly technology is utilized to construct this platform, which consists of a MEMS chevron-beam type microactuator and a micro-reflector. The proposed electrothermal microactuators with a two-stage electrothermal cascaded chevron-beam driving mechanism provide displacement amplification, thus enabling a highly reflective micro-pyramidal polygon reflector to rotate a large angle for light beam scanning. This MEMS platform is ultra-compact, supports circumferential imaging capability and is suitable for endoscopic optical coherence tomography (EOCT) applications, for example, for intravascular cancer detection.
authors.affiliation: Department of Mechanical Engineering, Micro and Nano System Initiative Lab, National University of Singapore, 9 Engineering Drive 1, Singapore 117576, Singapore.
authors.forename: Xiaojing
authors.initials: X
authors.lastname: Mu
authors.forename: Guangya
authors.initials: G
authors.lastname: Zhou
authors.forename: Hongbin
authors.initials: H
authors.lastname: Yu
authors.forename: Yu
authors.initials: Y
authors.lastname: Du
authors.forename: Hanhua
authors.initials: H
authors.lastname: Feng
authors.forename: Julius Ming Lin
authors.initials: JM
authors.lastname: Tsai
authors.forename: Fook Siong
authors.initials: FS
authors.lastname: Chau
mesh_terms: D019723:Endoscopes; D004867:Equipment Design; D019544:Equipment Failure Analysis; D007089:Image Enhancement / Q000295:instrumentation*; D007909:Lenses; D055617:Micro-Electrical-Mechanical Systems / Q000295:instrumentation*; D010865:Pilot Projects; D015203:Reproducibility of Results; D012680:Sensitivity and Specificity; D014159:Transducers