title: Development of 3D Force Sensors for Nanopositioning and Nanomeasuring Machine.
abstract: In this contribution, we report on different miniaturized bulk micro machined three-axes piezoresistive force sensors for nanopositioning and nanomeasuring machine (NPMM). Various boss membrane structures, such as one boss full/cross, five boss full/cross and swastika membranes, were used as a basic structure for the force sensors. All designs have 16 p-type diffused piezoresistors on the surface of the membrane. Sensitivities in x, y and z directions are measured. Simulated and measured stiffness ratio in horizontal to vertical direction is measured for each design. Effect of the length of the stylus on H:V stiffness ratio is studied. Minimum and maximum deflection and resonance frequency are measured for all designs. The sensors were placed in a nanopositioning and nanomeasuring machine and one point measurements were performed for all the designs. Lastly the application of the sensor is shown, where dimension of a cube is measured using the sensor.
authors.affiliation: Institute for Microtechnology, TU Braunschweig, Alte Salzdahlumer Str 203, 38124 Braunschweig, Germany; E-Mails:  a.phataralaoha@tu-bs.de ;  s.buettgenbach@tu-bs.de.
authors.forename: Arti
authors.initials: A
authors.lastname: Tibrewala
authors.forename: Norbert
authors.initials: N
authors.lastname: Hofmann
authors.forename: Anurak
authors.initials: A
authors.lastname: Phataralaoha
authors.forename: Gerd
authors.initials: G
authors.lastname: Jäger
authors.forename: Stephanus
authors.initials: S
authors.lastname: Büttgenbach