title: Large-area 2D periodic crystalline silicon  nanodome arrays on nanoimprinted glass  exhibiting photonic band structure effects.
abstract: Two-dimensional silicon nanodome arrays are prepared on large areas up to 50 cm² exhibiting photonic band structure effects in the near-infrared and visible wavelength region by downscaling a recently developed fabrication method based on nanoimprint-patterned glass, high-rate electron-beam evaporation of silicon, self-organized solid phase crystallization and wet-chemical etching. The silicon nanodomes, arranged in square lattice geometry with 300 nm lattice constant, are optically characterized by angular resolved reflection measurements, allowing the partial determination of the photonic band structure. This experimentally determined band structure agrees well with the outcome of three-dimensional optical finite-element simulations. A 16% photonic bandgap is predicted for an optimized geometry of the silicon nanodome arrays. By variation of the duration of the selective etching step, the geometry as well as the optical properties of the periodic silicon nanodome arrays can be controlled systematically.
authors.affiliation: Helmholtz-Zentrum Berlin für Materialien und Energie, Institut Silizium-Photovoltaik, Kekuléstraße 5, 12489 Berlin, Germany. christiane.becker@helmholtz-berlin.de
authors.forename: C
authors.initials: C
authors.lastname: Becker
authors.forename: D
authors.initials: D
authors.lastname: Lockau
authors.forename: T
authors.initials: T
authors.lastname: Sontheimer
authors.forename: P
authors.initials: P
authors.lastname: Schubert-Bischoff
authors.forename: E
authors.initials: E
authors.lastname: Rudigier-Voigt
authors.forename: M
authors.initials: M
authors.lastname: Bockmeyer
authors.forename: F
authors.initials: F
authors.lastname: Schmidt
authors.forename: B
authors.initials: B
authors.lastname: Rech