title: Fabrication of three-dimensional microfluidic channels inside glass using nanosecond laser direct writing.
abstract: We show that fabrication of three-dimensional microfluidic channels embedded in glass can be achieved by using a Q-switched, frequency-doubled Nd:YAG laser. The processing mainly consists of two steps: (1) formation of hollow microfluidic channels in porous glass immersed in Rhodamine 6G dissolved in water by nanosecond laser ablation; and (2) postannealing of the fabricated porous glass sample at 1120 °C for consolidation of the sample. In particular, a bilayer microfluidic structure is created in glass substrate using this technique for showcasing its capability of three-dimensional structuring.
authors.affiliation: State Key Laboratory of High Field Laser Physics, Shanghai Institute of Optics and Fine Mechanics, Chinese Academy of Sciences, P.O. Box 800-211, Shanghai 201800, China.
authors.forename: Changning
authors.initials: C
authors.lastname: Liu
authors.forename: Yang
authors.initials: Y
authors.lastname: Liao
authors.forename: Fei
authors.initials: F
authors.lastname: He
authors.forename: Yinglong
authors.initials: Y
authors.lastname: Shen
authors.forename: Danping
authors.initials: D
authors.lastname: Chen
authors.forename: Ya
authors.initials: Y
authors.lastname: Cheng
authors.forename: Zhizhan
authors.initials: Z
authors.lastname: Xu
authors.forename: Koji
authors.initials: K
authors.lastname: Sugioka
authors.forename: Katsumi
authors.initials: K
authors.lastname: Midorikawa