title: Estimation of the electron beam-induced specimen heating and the emitted X-rays spatial resolution by Kossel microdiffraction in a scanning electron microscope.
abstract: A Kossel microdiffraction experimental setup has been developed inside a Scanning Electron Microscope for crystallographic orientation, strain and stress determination at a micrometer scale. This paper reports an estimation of copper and germanium specimens heating due to the electron beam bombardment. The temperature rise is calculated from precise lattice parameters measurement considering different currents induced in the specimens. The spatial resolution of the technique is then deduced.
authors.affiliation: LEM3, CNRS UMR 7239, Arts et Métiers ParisTech, 4 rue Augustin Fresnel, 57078 Metz, France. denis.bouscaud@ensam.eu
authors.forename: Denis
authors.initials: D
authors.lastname: Bouscaud
authors.forename: Raphaël
authors.initials: R
authors.lastname: Pesci
authors.forename: Sophie
authors.initials: S
authors.lastname: Berveiller
authors.forename: Etienne
authors.initials: E
authors.lastname: Patoor