title: A novel method of temperature compensation for piezoresistive microcantilever-based sensors.
abstract: Microcantilever with integrated piezoresistor has been applied to in situ surface stress measurement in the field of biochemical sensors. It is well known that piezoresistive cantilever-based sensors are sensitive to ambient temperature changing due to highly temperature-dependent piezoresistive effect and mismatch in thermal expansion of composite materials. This paper proposes a novel method of temperature drift compensation for microcantilever-based sensors with a piezoresistive full Wheatstone bridge integrated at the clamped ends by subtracting the amplified output voltage of the reference cantilever from the output voltage of the sensing cantilever through a simple temperature compensating circuit. Experiments show that the temperature drift of microcantilever sensors can be significantly reduced by the method.
authors.affiliation: College of Mechanical and Electrical Engineering, China Jiliang University, 258 Xueyuan Road, Xiasha High-Edu Park, Hangzhou 310018, China. hjqsmx@sina.com
authors.forename: Jianqiang
authors.initials: J
authors.lastname: Han
authors.forename: Xiaofei
authors.initials: X
authors.lastname: Wang
authors.forename: Tianhong
authors.initials: T
authors.lastname: Yan
authors.forename: Yan
authors.initials: Y
authors.lastname: Li
authors.forename: Meixuan
authors.initials: M
authors.lastname: Song
mesh_terms: D002623:Chemistry Techniques, Analytical / Q000295:instrumentation / Q000379:methods; D004560:Electricity; D005780:Gelatin / Q000737:chemistry; D006813:Humidity; D055616:Microtechnology / Q000295:instrumentation / Q000379:methods*; D013696:Temperature
chemical_list: D005780:Gelatin