title: Silicon nano-membrane based photonic crystal microcavities for high sensitivity bio-sensing.
abstract: We experimentally demonstrated photonic crystal microcavity based resonant sensors coupled to photonic crystal waveguides in silicon nano-membrane on insulator for chemical and bio-sensing. Linear L-type microcavities are considered. In contrast to cavities with small mode volumes, but low quality factors for bio-sensing, we showed increasing the length of the microcavity enhances the quality factor of the resonance by an order of magnitude and increases the resonance wavelength shift while retaining compact device characteristics. Q~26760 and sensitivity down to 15 ng/ml and ~110 pg/mm2 in bio-sensing was experimentally demonstrated on silicon-on-insulator devices.
authors.affiliation: Department of Electrical and Computer Engineering, University of Texas at Austin, Austin, Texas 78712, USA.
authors.forename: Wei-Cheng
authors.initials: WC
authors.lastname: Lai
authors.forename: Swapnajit
authors.initials: S
authors.lastname: Chakravarty
authors.forename: Yi
authors.initials: Y
authors.lastname: Zou
authors.forename: Ray T
authors.initials: RT
authors.lastname: Chen
mesh_terms: D000818:Animals; D000911:Antibodies, Monoclonal / Q000032:analysis; D015374:Biosensing Techniques / Q000295:instrumentation*; D004867:Equipment Design; D006041:Goats; D006801:Humans; D049329:Nanostructures; D055096:Optical Devices; D055620:Optical Phenomena; D017785:Photons; D011817:Rabbits; D051381:Rats; D012825:Silicon / Q000737:chemistry
chemical_list: D000911:Antibodies, Monoclonal; D012825:Silicon