title: A convenient method for electron tomography sample preparation using a focused ion beam.
abstract: Here we report a new sample preparation method for three-dimensional electron tomography. The method uses the standard film deposition and focused ion beam (FIB) methods to significantly reduce the problems arising from the projected sample thickness at high tilt angles. The method can be used to prepare tomography samples that can be imaged up to a ±75° tilt range which is sufficient for many practical applications. The method can minimize the problem of Ga⁺ contamination, as compared to the case of FIB preparation of rod-shaped samples, and provides extended thin regions for standard 2D projection analyses.
authors.affiliation: National Institute for Nanotechnology, Edmonton, 11421 Saskatchewan Drive, Canada.
authors.forename: Xiongyao
authors.initials: X
authors.lastname: Wang
authors.forename: Ross
authors.initials: R
authors.lastname: Lockwood
authors.forename: Doug
authors.initials: D
authors.lastname: Vick
authors.forename: Peng
authors.initials: P
authors.lastname: Li
authors.forename: Al
authors.initials: A
authors.lastname: Meldrum
authors.forename: Marek
authors.initials: M
authors.lastname: Malac