title: An in-vacuum x-ray diffraction microscope for use in the 0.7-2.9 keV range.
abstract: A dedicated in-vacuum coherent x-ray diffraction microscope was installed at the 2-ID-B beamline of the Advanced Photon Source for use with 0.7-2.9 keV x-rays. The instrument can accommodate three common implementations of diffractive imaging; plane wave illumination; defocused-probe (Fresnel diffractive imaging) and scanning (ptychography) using either a pinhole, focused or defocused probe. The microscope design includes active feedback to limit motion of the optics with respect to the sample. Upper bounds on the relative optics-to-sample displacement have been measured to be 5.8 nm(v) and 4.4 nm(h) rms/h using capacitance micrometry and 27 nm/h using x-ray point projection imaging. The stability of the measurement platform and in-vacuum operation allows for long exposure times, high signal-to-noise and large dynamic range two-dimensional intensity measurements to be acquired. Finally, we illustrate the microscope's stability with a recent experimental result.
authors.affiliation: Australian Research Council Centre of Excellence for Coherent X-ray Science, Australia. dvine@aps.anl.gov
authors.forename: D J
authors.initials: DJ
authors.lastname: Vine
authors.forename: G J
authors.initials: GJ
authors.lastname: Williams
authors.forename: J N
authors.initials: JN
authors.lastname: Clark
authors.forename: C T
authors.initials: CT
authors.lastname: Putkunz
authors.forename: M A
authors.initials: MA
authors.lastname: Pfeifer
authors.forename: D
authors.initials: D
authors.lastname: Legnini
authors.forename: C
authors.initials: C
authors.lastname: Roehrig
authors.forename: E
authors.initials: E
authors.lastname: Wrobel
authors.forename: E
authors.initials: E
authors.lastname: Huwald
authors.forename: G
authors.initials: G
authors.lastname: van Riessen
authors.forename: B
authors.initials: B
authors.lastname: Abbey
authors.forename: T
authors.initials: T
authors.lastname: Beetz
authors.forename: J
authors.initials: J
authors.lastname: Irwin
authors.forename: M
authors.initials: M
authors.lastname: Feser
authors.forename: B
authors.initials: B
authors.lastname: Hornberger
authors.forename: I
authors.initials: I
authors.lastname: McNulty
authors.forename: K A
authors.initials: KA
authors.lastname: Nugent
authors.forename: A G
authors.initials: AG
authors.lastname: Peele