title: Monte Carlo simulation of the field back-scattered from rough surfaces.
abstract: A novel approach for the simulation of the field back-scattered from a rough surface is presented. It takes into account polarization and multiple scattering events on the surface, as well as diffraction effects. The validity and usefulness of this simulation is demonstrated in the case of surface topology measurement.
authors.affiliation: Ecole Polytechnique Fédérale de Lausanne (EPFL), Lausanne, Switzerland. y.delacretaz@a3.epfl.ch
authors.forename: Yves
authors.initials: Y
authors.lastname: Delacrétaz
authors.forename: Olivier
authors.initials: O
authors.lastname: Seydoux
authors.forename: Stéphane
authors.initials: S
authors.lastname: Chamot
authors.forename: Andreas
authors.initials: A
authors.lastname: Ettemeyer
authors.forename: Christian
authors.initials: C
authors.lastname: Depeursinge