title: Nano-fabrication with a flexible array of nano-apertures.
abstract: We report fabrication and use of a flexible array of nano-apertures for photolithography on curved surfaces. The batch-fabricated apertures are formed of metal-coated silicone tips. The apertures are formed at the end of the silicone tips by either electrochemical etching of the metal or plasma etching of a protective mask followed by wet chemical etching. The apertures are as small as 250 nm on substrates larger than several millimeters. We demonstrate how the nano-aperture array can be used for nano-fabrication on flat and curved substrates, and show the subsequent fabrication steps to form large arrays of sub-micron aluminum dots or vertical silicon wires.
authors.affiliation: Department of Electrical and Computer Engineering, University of Illinois at Urbana-Champaign, Urbana, IL 61801, USA.
authors.forename: Huan
authors.initials: H
authors.lastname: Hu
authors.forename: Junghoon
authors.initials: J
authors.lastname: Yeom
authors.forename: Glennys
authors.initials: G
authors.lastname: Mensing
authors.forename: Yaofeng
authors.initials: Y
authors.lastname: Chen
authors.forename: Mark A
authors.initials: MA
authors.lastname: Shannon
authors.forename: William P
authors.initials: WP
authors.lastname: King