title: High-damping carbon nanotube hinged micromirrors.
abstract: New developments in digital mirror devices (DMDs) require suspension hinges with a good damping and high temperature stability. Carbon nanotubes (CNTs) offer these unique properties. Herein it is shown how CNT hinges can be integrated in micromirrors. The image illustrates a micromirror with a CNT suspension, and a typical overdamped stepresponse (Q-factor < 0.5).
authors.affiliation: IMEC, Kapeldreef 75, Heverlee, Belgium. michael.devolder@imec.be
authors.forename: Michaël F L
authors.initials: MF
authors.lastname: De Volder
authors.forename: Jeroen
authors.initials: J
authors.lastname: De Coster
authors.forename: Dominiek
authors.initials: D
authors.lastname: Reynaerts
authors.forename: Chris
authors.initials: C
authors.lastname: Van Hoof
authors.forename: Sang-Gook
authors.initials: SG
authors.lastname: Kim
mesh_terms: D036103:Nanotechnology / Q000379:methods*; D037742:Nanotubes, Carbon / Q000737:chemistry*
chemical_list: D037742:Nanotubes, Carbon