title: AlN/3C-SiC composite plate enabling high-frequency and high-Q micromechanical resonators.
abstract: An AlN/3C-SiC composite layer enables the third-order quasi-symmetric (QS(3)) Lamb wave mode with a high quality factor (Q) characteristic and an ultra-high phase velocity up to 32395 ms(-1). A Lamb wave resonator utilizing the QS(3) mode exhibits a low motional impedance of 91 Ω and a high Q of 5510 at a series resonance frequency (f(s)) of 2.92 GHz, resulting in the highest f(s)·Q product of 1.61 × 10(13) Hz among the suspended piezoelectric thin film resonators reported to date.
authors.affiliation: Department of Mechanical Engineering, Berkeley Sensor and Actuator Center, University of California at Berkeley, 94720, USA. gimmylin@berkeley.edu
authors.forename: Chih-Ming
authors.initials: CM
authors.lastname: Lin
authors.forename: Yung-Yu
authors.initials: YY
authors.lastname: Chen
authors.forename: Valery V
authors.initials: VV
authors.lastname: Felmetsger
authors.forename: Debbie G
authors.initials: DG
authors.lastname: Senesky
authors.forename: Albert P
authors.initials: AP
authors.lastname: Pisano
mesh_terms: D017607:Aluminum Compounds / Q000737:chemistry*; D017554:Carbon Compounds, Inorganic / Q000737:chemistry*; D017655:Silicon Compounds / Q000737:chemistry*; D055672:Static Electricity; D015034:Zinc Oxide / Q000737:chemistry
chemical_list: D017607:Aluminum Compounds; D017554:Carbon Compounds, Inorganic; D017655:Silicon Compounds; C052045:aluminum nitride; D015034:Zinc Oxide; C022088:silicon carbide