title: The fabrication of vertically aligned and periodically distributed carbon nanotube bundles and periodically porous carbon nanotube films through a combination of laser interference ablation and metal-catalyzed chemical vapor deposition.
abstract: Scalable fabrication of carbon nanotube (CNT) bundles is essential to future advances in several applications. Here, we report on the development of a simple, two-step method for fabricating vertically aligned and periodically distributed CNT bundles and periodically porous CNT films at the sub-micron scale. The method involves laser interference ablation (LIA) of an iron film followed by CNT growth via iron-catalyzed chemical vapor deposition. CNT bundles with square widths ranging from 0.5 to 1.5 µm in width, and 50-200 µm in length, are grown atop the patterned catalyst over areas spanning 8 cm(2). The CNT bundles exhibit a high degree of control over square width, orientation, uniformity, and periodicity. This simple scalable method of producing well-placed and oriented CNT bundles demonstrates a high application potential for wafer-scale integration of CNT structures into various device applications, including IC interconnects, field emitters, sensors, batteries, and optoelectronics, etc.
authors.affiliation: Woodruff School of Mechanical Engineering, Georgia Institute of Technology, Atlanta, GA 30332, USA.
authors.forename: Dajun
authors.initials: D
authors.lastname: Yuan
authors.forename: Wei
authors.initials: W
authors.lastname: Lin
authors.forename: Rui
authors.initials: R
authors.lastname: Guo
authors.forename: C P
authors.initials: CP
authors.lastname: Wong
authors.forename: Suman
authors.initials: S
authors.lastname: Das
mesh_terms: D003460:Crystallization / Q000379:methods*; D005740:Gases / Q000737:chemistry; D007834:Lasers; D008422:Materials Testing; D008567:Membranes, Artificial; D037742:Nanotubes, Carbon / Q000737:chemistry* / Q000528:radiation effects / Q000648:ultrastructure*; D010316:Particle Size; D016062:Porosity
chemical_list: D005740:Gases; D008567:Membranes, Artificial; D037742:Nanotubes, Carbon