title: Real space soft x-ray imaging at 10 nm spatial resolution.
abstract: Using Fresnel zone plates made with our robust nanofabrication processes, we have successfully achieved 10 nm spatial resolution with soft x-ray microscopy. The result, obtained with both a conventional full-field and scanning soft x-ray microscope, marks a significant step forward in extending the microscopy to truly nanoscale studies.
authors.affiliation: Center for X-ray Optics, Lawrence Berkeley National Laboratory, Berkeley, California 94720, USA. wlchao@lbl.gov
authors.forename: W
authors.initials: W
authors.lastname: Chao
authors.forename: P
authors.initials: P
authors.lastname: Fischer
authors.forename: T
authors.initials: T
authors.lastname: Tyliszczak
authors.forename: S
authors.initials: S
authors.lastname: Rekawa
authors.forename: E
authors.initials: E
authors.lastname: Anderson
authors.forename: P
authors.initials: P
authors.lastname: Naulleau
mesh_terms: D004867:Equipment Design; D019544:Equipment Failure Analysis; D007089:Image Enhancement / Q000295:instrumentation*; D008853:Microscopy / Q000295:instrumentation*; D011859:Radiography / Q000295:instrumentation*; D012031:Refractometry / Q000295:instrumentation*