title: Fabrication of metallic nanostructures of sub-20 nm with an optimized process of E-beam lithography and lift-off.
abstract: A process consisting of e-beam lithography and lift-off was optimized to fabricate metallic nanostructures. This optimized process successfully produced gold and aluminum nanostructures with features size less than 20 nm. These structures range from simple parallel lines to complex photonic structures. Optical properties of gold split ring resonators (SRRs) were characterized with Raman spectroscopy. Surface-Enhanced Raman Scattering (SERS) on SRRs was observed with 4-mercaptopyridine (4-MPy) as molecular probe and greatly enhanced Raman scattering was observed.
authors.affiliation: Advanced Nanofabrication and Imaging Core Lab, King Abdullah University of Science and Technology (KAUST), Thuwal 23955-6900, Saudi Arabia.
authors.forename: Weisheng
authors.initials: W
authors.lastname: Yue
authors.forename: Zhihong
authors.initials: Z
authors.lastname: Wang
authors.forename: Xianbin
authors.initials: X
authors.lastname: Wang
authors.forename: Longqing
authors.initials: L
authors.lastname: Chen
authors.forename: Yang
authors.initials: Y
authors.lastname: Yang
authors.forename: Basil
authors.initials: B
authors.lastname: Chew
authors.forename: Ahad
authors.initials: A
authors.lastname: Syed
authors.forename: Kim Chong
authors.initials: KC
authors.lastname: Wong
authors.forename: Xixiang
authors.initials: X
authors.lastname: Zhang
mesh_terms: D004583:Electrons; D004595:Electroplating / Q000379:methods*; D006046:Gold / Q000737:chemistry*; D008027:Light; D008422:Materials Testing; D049329:Nanostructures / Q000737:chemistry* / Q000648:ultrastructure*; D010316:Particle Size; D012542:Scattering, Radiation; D013499:Surface Properties; D014732:Vibration
chemical_list: D006046:Gold