title: Solution-based synthesis of crystalline silicon from liquid silane through laser and chemical annealing.
abstract: We report a solution process for the synthesis of crystalline silicon from the liquid silane precursor cyclohexasilane (Si(6)H(12)). Polysilane films were crystallized through thermal and laser annealing, with plasma hydrogenation at atmospheric pressure generating further structural changes in the films. The evolution from amorphous to microcrystalline is characterized using scanning electron microscopy (SEM), atomic force microscopy (AFM), Raman spectroscopy and impedance spectroscopy. A four-decade enhancement in the electrical conductivity is attributed to a disorder-order transition in a bonded Si network. Our results demonstrate a potentially attractive approach that employs a solution process coupled with ambient postprocessing to produce crystalline silicon thin films.
authors.affiliation: Department of Physics and Department of Coatings and Polymeric Materials, North Dakota State University, Fargo, North Dakota 58102, USA.
authors.forename: Ganjigunte R S
authors.initials: GR
authors.lastname: Iyer
authors.forename: Erik K
authors.initials: EK
authors.lastname: Hobbie
authors.forename: Srinivasan
authors.initials: S
authors.lastname: Guruvenket
authors.forename: Justin M
authors.initials: JM
authors.lastname: Hoey
authors.forename: Kenneth J
authors.initials: KJ
authors.lastname: Anderson
authors.forename: John
authors.initials: J
authors.lastname: Lovaasen
authors.forename: Cody
authors.initials: C
authors.lastname: Gette
authors.forename: Douglas L
authors.initials: DL
authors.lastname: Schulz
authors.forename: Orven F
authors.initials: OF
authors.lastname: Swenson
authors.forename: Arumugasamy
authors.initials: A
authors.lastname: Elangovan
authors.forename: P
authors.initials: P
authors.lastname: Boudjouk