title: Position-controlled marker formation by helium ion microscope for aligning a TEM tomographic tilt series.
abstract: We formed nano-dots using a helium ion microscope (HIM) equipped with a gas injection system. Because of position controllability, the nano-dot markers could be placed efficiently on a specimen using the HIM. The sizes of the dots were controlled by changing the beam radiation time. We tried for the first time to form dots on a rod-shaped specimen to use them as markers for aligning a transmission electron microscope tomographic tilt series before reconstructing 3D images.
authors.affiliation: National Metrology Institute of Japan, National Institute of Advanced Industrial Science and Technology-AIST, 1-1-1 Higashi, Tsukuba, Ibaraki 305-8565, Japan. misa-hayashida@aist.go.jp
authors.forename: Misa
authors.initials: M
authors.lastname: Hayashida
authors.forename: Tomohiko
authors.initials: T
authors.lastname: Iijima
authors.forename: Toshiyuki
authors.initials: T
authors.lastname: Fujimoto
authors.forename: Shinichi
authors.initials: S
authors.lastname: Ogawa