title: On-chip three-dimensional high-Q microcavities fabricated by femtosecond laser direct writing.
abstract: We report on the fabrication of three-dimensional (3D) high-Q whispering gallery microcavities on a fused silica chip by femtosecond laser microfabriction, enabled by the 3D nature of femtosecond laser direct writing. The processing mainly consists of formation of freestanding microdisks by femtosecond laser direct writing and subsequent wet chemical etching. CO(2) laser annealing is followed to smooth the microcavity surface. Microcavities with arbitrary tilting angle, lateral and vertical positioning are demonstrated, and the quality (Q)-factor of a typical microcavity is measured to be up to 1.07 × 10(6), which is currently limited by the low spatial resolution of the motion stage used during the laser patterning and can be improved with motion stages of higher resolutions.
authors.affiliation: State Key Laboratory of High Field Laser Physics, Shanghai Institute of Optics and Fine Mechanics, Chinese Academy of Sciences, P.O. Box 800-211, Shanghai 201800, China.
authors.forename: Jintian
authors.initials: J
authors.lastname: Lin
authors.forename: Shangjie
authors.initials: S
authors.lastname: Yu
authors.forename: Yaoguang
authors.initials: Y
authors.lastname: Ma
authors.forename: Wei
authors.initials: W
authors.lastname: Fang
authors.forename: Fei
authors.initials: F
authors.lastname: He
authors.forename: Lingling
authors.initials: L
authors.lastname: Qiao
authors.forename: Limin
authors.initials: L
authors.lastname: Tong
authors.forename: Ya
authors.initials: Y
authors.lastname: Cheng
authors.forename: Zhizhan
authors.initials: Z
authors.lastname: Xu
mesh_terms: D004867:Equipment Design; D019544:Equipment Failure Analysis; D007834:Lasers; D020349:Surface Plasmon Resonance / Q000295:instrumentation*