title: Hard-X-ray imaging optics based on four aspherical mirrors with 50 nm resolution.
abstract: Ultraprecise imaging optics, which consists of two sets of elliptical mirrors and hyperbolic mirrors aligned perpendicular to each other (i.e., advanced Kirkpatrick-Baez mirrrors), is developed to realize high-resolution and achromatic full-field hard-X-ray microscopy. Experiments to form a demagnified image (with horizontal and vertical demagnification factors of 385 and 210, respectively) are conducted to evaluate the optical system at an X-ray energy of 11.5 keV at SPring-8. Results show that the imaging system can form a demagnified image with nearly diffraction-limited resolutions of ~50 nm in the horizontal and vertical directions. The field of view is also experimentally estimated to be ~12 × ~14 μm(2) when used as a magnification imaging system.
authors.affiliation: Department of Precision Science and Technology, Graduate School of Engineering, Osaka University, 2-1 Yamadaoka, Suita, Osaka 565-0871, Japan. matsuyama@prec.eng.osaka-u.ac.jp
authors.forename: Satoshi
authors.initials: S
authors.lastname: Matsuyama
authors.forename: Naotaka
authors.initials: N
authors.lastname: Kidani
authors.forename: Hidekazu
authors.initials: H
authors.lastname: Mimura
authors.forename: Yasuhisa
authors.initials: Y
authors.lastname: Sano
authors.forename: Yoshiki
authors.initials: Y
authors.lastname: Kohmura
authors.forename: Kenji
authors.initials: K
authors.lastname: Tamasaku
authors.forename: Makina
authors.initials: M
authors.lastname: Yabashi
authors.forename: Tetsuya
authors.initials: T
authors.lastname: Ishikawa
authors.forename: Kazuto
authors.initials: K
authors.lastname: Yamauchi
mesh_terms: D004867:Equipment Design; D019544:Equipment Failure Analysis; D007089:Image Enhancement / Q000295:instrumentation*; D007909:Lenses; D008853:Microscopy / Q000295:instrumentation*; D011859:Radiography / Q000295:instrumentation*