title: A small-displacement sensor using total internal reflection theory and surface plasmon resonance technology for heterodyne interferometry.
abstract: A small-displacement sensor based on total-internal reflection theory and surface plasmon resonance technology is proposed for use in heterodyne interferometry. A small displacement can be obtained simply by measuring the variation in phase difference between s- and p-polarization states with the small-displacement sensor. The theoretical displacement resolution of the small-displacement sensor can reach 0.45 nm. The sensor has some additional advantages, e.g., a simple optical setup, high resolution, high sensitivity and rapid measurement. Its feasibility is also demonstrated.
authors.affiliation: Department of Electronic Engineering, Ching Yun University, No.229, Chien-Hsin Rd., Jhongli City, Taoyuan, 320, Taiwan, ROC; E-Mail:  sfwang@cyu.edu.tw ; Tel.: +886-3-4581196, ext. 5113;
authors.forename: Shinn-Fwu
authors.initials: SF
authors.lastname: Wang