title: Fabrication and Structural Design of Micro Pressure Sensors for Tire Pressure Measurement Systems (TPMS).
abstract: In this paper we describe the design and testing of a micro piezoresistive pressure sensor for a Tire Pressure Measurement System (TPMS) which has the advantages of a minimized structure, high sensitivity, linearity and accuracy. Through analysis of the stress distribution of the diaphragm using the ANSYS software, a model of the structure was established. The fabrication on a single silicon substrate utilizes the technologies of anisotropic chemical etching and packaging through glass anodic bonding. The performance of this type of piezoresistive sensor, including size, sensitivity, and long-term stability, were investigated. The results indicate that the accuracy is 0.5% FS, therefore this design meets the requirements for a TPMS, and not only has a smaller size and simplicity of preparation, but also has high sensitivity and accuracy.
authors.affiliation: State Key Laboratory for Mechanical Manufacturing System, Institute of Precision Engineering, Xi'an Jiaotong University, Xi'an 710049, P.R. China.
authors.forename: Bian
authors.initials: B
authors.lastname: Tian
authors.forename: Yulong
authors.initials: Y
authors.lastname: Zhao
authors.forename: Zhuangde
authors.initials: Z
authors.lastname: Jiang
authors.forename: Ling
authors.initials: L
authors.lastname: Zhang
authors.forename: Nansheng
authors.initials: N
authors.lastname: Liao
authors.forename: Yuanhao
authors.initials: Y
authors.lastname: Liu
authors.forename: Chao
authors.initials: C
authors.lastname: Meng