title: A high-accuracy and convenient figure measurement system for large convex lens.
abstract: We present a novel optical configuration of a phase-shifting interferometer for high-accuracy figure metrology of large dioptric convex spherical surfaces. The conformation and design considerations according to measurement accuracy, practicability, and system errors analysis are described. More in detail, we show the design principle and methods for the crucial parts. Some are expounded upon with examples for thorough understanding. The measurement procedures and the alignment approaches are also described. Finally, a verification experiment is further presented to verify our theoretical design. This system gives full-aperture and high-precision surface testing while maintaining relatively low cost and convenient operation.
authors.affiliation: State Key Laboratory of Applied Optics, Changchun Institute of Optics, Fine Mechanics and Physics, Chinese Academy of Sciences, Changchun, Jilin 130033, China. tian-zhi-hui@163.com
authors.forename: Zhihui
authors.initials: Z
authors.lastname: Tian
authors.forename: Wang
authors.initials: W
authors.lastname: Yang
authors.forename: Yongxin
authors.initials: Y
authors.lastname: Sui
authors.forename: Yusi
authors.initials: Y
authors.lastname: Kang
authors.forename: Weiqi
authors.initials: W
authors.lastname: Liu
authors.forename: Huaijiang
authors.initials: H
authors.lastname: Yang
mesh_terms: D004867:Equipment Design; D007368:Interferometry; D007834:Lasers; D007909:Lenses; D015233:Models, Statistical; D055095:Optics and Photonics / Q000295:instrumentation* / Q000379:methods*; D015203:Reproducibility of Results; D013499:Surface Properties