title: In-situ comprehensive calibration of a tri-port nano-electro-mechanical device.
abstract: We report on experiments performed in vacuum and at cryogenic temperatures on a tri-port nano-electro-mechanical (NEMS) device. One port is a very nonlinear capacitive actuation, while the two others implement the magnetomotive scheme with a linear input force port and a (quasi-linear) output velocity port. We present an experimental method enabling a full characterization of the nanomechanical device harmonic response: the nonlinear capacitance function C(x) is derived, and the normal parameters k and m (spring constant and mass) of the mode under study are measured through a careful definition of the motion (in meters) and of the applied forces (in Newtons). These results are obtained with a series of purely electric measurements performed without disconnecting/reconnecting the device, and rely only on known dc properties of the circuit, making use of a thermometric property of the oscillator itself: we use the Young modulus of the coating metal as a thermometer, and the resistivity for Joule heating. The setup requires only three connecting lines without any particular matching, enabling the preservation of a high impedance NEMS environment even at MHz frequencies. The experimental data are fit to a detailed electrical and thermal model of the NEMS device, demonstrating a complete understanding of its dynamics. These methods are quite general and can be adapted (as a whole, or in parts) to a large variety of electromechanical devices.
authors.affiliation: Institut Néel CNRS et Université Joseph Fourier, BP 166, 38042 Grenoble Cedex 9, France. eddy.collin@grenoble.cnrs.fr
authors.forename: E
authors.initials: E
authors.lastname: Collin
authors.forename: M
authors.initials: M
authors.lastname: Defoort
authors.forename: K
authors.initials: K
authors.lastname: Lulla
authors.forename: T
authors.initials: T
authors.lastname: Moutonet
authors.forename: J-S
authors.initials: JS
authors.lastname: Heron
authors.forename: O
authors.initials: O
authors.lastname: Bourgeois
authors.forename: Yu M
authors.initials: YM
authors.lastname: Bunkov
authors.forename: H
authors.initials: H
authors.lastname: Godfrin
mesh_terms: D002138:Calibration; D025802:Electric Capacitance; D055615:Electrical Equipment and Supplies; D055595:Mechanical Phenomena; D008962:Models, Theoretical; D036103:Nanotechnology / Q000295:instrumentation*; D013696:Temperature