title: Stroboscopic supercontinuum white-light interferometer for MEMS characterization.
abstract: We used a supercontinuum-based scanning white-light interferometer to characterize the oscillation of a MEMS device. The output of a commercially available supercontinuum light source (FiberWare Ilum II USB) was modulated to achieve stroboscopic operation. By synchronizing the modulation frequency of the source to the sample oscillation, dynamic 3-D profile measurements were recorded. These results were validated against those obtained with a white light LED setup. The measured maximum deflection of a 400×25×4 μm(3) microbridge driven with 0-6.8 V sinusoidal voltage at 10 Hz was 1.42±0.03 μm (supercontinuum), which agreed with the LED measurement. The method shows promise for characterization of high-frequency MEMS devices.
authors.affiliation: Department of Physics, University of Helsinki, Helsinki, Finland. kalle.hanhijarvi@helsinki.fi
authors.forename: K
authors.initials: K
authors.lastname: Hanhijärvi
authors.forename: I
authors.initials: I
authors.lastname: Kassamakov
authors.forename: V
authors.initials: V
authors.lastname: Heikkinen
authors.forename: J
authors.initials: J
authors.lastname: Aaltonen
authors.forename: L
authors.initials: L
authors.lastname: Sainiemi
authors.forename: K
authors.initials: K
authors.lastname: Grigoras
authors.forename: S
authors.initials: S
authors.lastname: Franssila
authors.forename: E
authors.initials: E
authors.lastname: Hæggström