title: Laminar and blazed type holographic gratings for a versatile soft x-ray spectrograph attached to an electron microscope and their evaluation in the 50-200 eV range.
abstract: Laminar and blazed type holographic varied-line-spacing spherical gratings for use in a versatile soft x-ray flat-field spectrograph attached to an electron microscope are designed, fabricated, and evaluated. The absolute diffraction efficiencies of laminar (or blazed) master and replica gratings at 86.00° incidence evaluated by synchrotron radiation show over 5% (or 8%) in the 50-200 eV range with the maxima of 22% (or 26%-27%). Also the resolving power evaluated by a laser produced plasma source is in excess of 700 at the energy near the K emission spectrum of lithium (~55 eV) for all gratings. Moreover, the K emission spectrum of metallic Li with high spectral resolution is successfully observed with the spectrograph attached to a transmission electron microscope.
authors.affiliation: Quantum Beam Science Directorate, Japan Atomic Energy Agency, Kizugawa, Kyoto, Japan. imazono.takashi@jaea.go.jp
authors.forename: Takashi
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authors.lastname: Imazono
authors.forename: Masato
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authors.lastname: Koike
authors.forename: Tetsuya
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authors.lastname: Kawachi
authors.forename: Noboru
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authors.lastname: Hasegawa
authors.forename: Masaru
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authors.lastname: Koeda
authors.forename: Tetsuya
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authors.lastname: Nagano
authors.forename: Hiroyuki
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authors.lastname: Sasai
authors.forename: Yuki
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authors.lastname: Oue
authors.forename: Zeno
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authors.lastname: Yonezawa
authors.forename: Satoshi
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authors.lastname: Kuramoto
authors.forename: Masami
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authors.lastname: Terauchi
authors.forename: Hideyuki
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authors.lastname: Takahashi
authors.forename: Nobuo
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authors.lastname: Handa
authors.forename: Takanori
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authors.lastname: Murano
authors.forename: Kazuo
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authors.lastname: Sano