Humidity-induced charge leakage and field attenuation in electric field microsensors.
The steady-state zero output of static electric field measuring systems often fluctuates, which is caused mainly by the finite leakage resistance of the water film on the surface of the electric field microsensor package. The water adsorption has been calculated using the Boltzmann distribution equation at various relative humidities for borosilicate glass and polytetrafluoroethylene surfaces. At various humidities, water film thickness has been calculated, and the induced charge leakage and field attenuation have been theoretically investigated. Experiments have been performed with microsensors to verify the theoretical predictions and the results are in good agreement.
State Key Laboratory of Transducer Technology, Institute of Electronics, Chinese Academy of Sciences, Beijing 100190, China. zhanghyie@yahoo.com.cn
Haiyan
H
Zhang
Dongming
D
Fang
Pengfei
P
Yang
Chunrong
C
Peng
Xiaolong
X
Wen
Shanhong
S
Xia