Experimental and simulation study of undesirable short-period deformation in piezoelectric deformable x-ray mirrors.
To construct adaptive x-ray focusing optics whose optical parameters can be varied while performing wavefront correction, ultraprecise piezoelectric deformable mirrors have been developed. We computationally and experimentally investigated undesirable short-period deformation caused by piezoelectric actuators adhered to the substrate during mirror deformation. Based on the results of finite element method analysis, shape measurements, and the observation of x-ray reflection images, a guideline is developed for designing deformable mirrors that do not have short-period deformation errors.
Department of Precision Science and Technology, Graduate School of Engineering, Osaka University, 2-1 Yamada-oka, Suita, Osaka 565-0871, Japan.
Hiroki
H
Nakamori
Satoshi
S
Matsuyama
Shota
S
Imai
Takashi
T
Kimura
Yasuhisa
Y
Sano
Yoshiki
Y
Kohmura
Kenji
K
Tamasaku
Makina
M
Yabashi
Tetsuya
T
Ishikawa
Kazuto
K
Yamauchi