Broadband light source shearing interferometer using Savart plate and angular scanning technique.
A shearing interferometer based on using broadband light source, Savart plate, and angular scanning technique is proposed for slope contour measurements in this Letter. Of which, the Savart plate divides the wavefront reflected from the detected surface into two laterally displaced ones, the interference pattern generated by the interference of the divided wavefronts is modulated by an envelope function, and the slope contour of the detected surface is determined by examining the shifting of the darkest fringe as the shear plate is angularly scanned. A setup for realizing the interferometer is constructed. The experimental results of using this setup agree the validity and feasibility of the proposed interferometer.
Department of Electro-optical Engineering, National Taipei University of Technology, 1, Sec.3, Chung-Hsiao East Road, Taipei 10608, Taiwan. f10402@ntut.edu.tw
Shyh-Tsong
ST
Lin
Sheng-Lih
SL
Yeh
Minh-Han
MH
Hxieh