Fast and highly accurate boundary element method for scattering calculation of defective gratings.
A numerical scattering calculation method for defective gratings is proposed. This method is based on an integral equation method that computes a difference-field distribution, which is the difference between the scattering fields with and without the defect, and it is possible to simulate the arbitrary (finite) size and shape of a defect in the grating without any limitation. A calculation example is also presented to demonstrate the fast convergence and high accuracy of this method.
Center for Optical Research and Education (CORE), Utsunomiya University, Yoto 7-1-2, Utsunomiya, Tochigi 321-8585, Japan. sugisaka@cc.utsunomiya‑u.ac.jp
Jun-ichiro
J
Sugisaka
Toyohiko
T
Yatagai