Polyimide/SU-8 catheter-tip MEMS gauge pressure sensor.
This paper describes the development of a polyimide/SU-8 catheter-tip MEMS gauge pressure sensor. Finite element analysis was used to investigate critical parameters, impacting on the device design and sensing characteristics. The sensing element of the device was fabricated by polyimide-based micromachining on a flexible membrane, using embedded thin-film metallic wires as piezoresistive elements. A chamber containing this flexible membrane was sealed using an adapted SU-8 bonding technique. The device was evaluated experimentally and its overall performance compared with a commercial silicon-based pressure sensor. Furthermore, the device use was demonstrated by measuring blood pressure and heart rate in vivo.
École Polytechnique Fédérale de Lausanne, Lausanne, Switzerland. hasenkamp@gmail.com
Willyan
W
Hasenkamp
David
D
Forchelet
Kristopher
K
Pataky
Jimmy
J
Villard
Harald
H
Van Lintel
Arnaud
A
Bertsch
Qing
Q
Wang
Philippe
P
Renaud
D000818:Animals; D015374:Biosensing Techniques / Q000295:instrumentation* / Q000379:methods; D001794:Blood Pressure; D004867:Equipment Design; D020342:Finite Element Analysis; D006339:Heart Rate; D008297:Male; D051379:Mice; D008810:Mice, Inbred C57BL; D055617:Micro-Electrical-Mechanical Systems / Q000295:instrumentation* / Q000379:methods*; D055616:Microtechnology; D011312:Pressure; D012117:Resins, Synthetic / Q000737:chemistry*; D012825:Silicon
D012117:Resins, Synthetic; C029945:polyimide resin; D012825:Silicon