Micro-reactors for characterization of nanostructure-based sensors.
Fabrication and testing of micro-reactors for the characterization of nanosensors is presented in this work. The reactors have a small volume (100 μl) and are equipped with gas input/output channels. They were machined from a single piece of kovar in order to avoid leaks in the system due to additional welding. The contact pins were electrically insulated from the body of the reactor using a borosilicate sealing glass and the reactor was hermetically sealed using a lid and an elastomeric o-ring. One of the advantages of the reactor lies in its simple assembly and ease of use with any vacuum/gas system, allowing the connection of more than one device. Moreover, the lid can be modified in order to fit a window for in situ optical characterization. In order to prove its versatility, carbon nanotube-based sensors were tested using this micro-reactor. The devices were fabricated by depositing carbon nanotubes over 1 μm thick gold electrodes patterned onto Si/SiO(2) substrates. The sensors were tested using oxygen and nitrogen atmospheres, in the pressure range between 10(-5) and 10(-1) mbar. The small chamber volume allowed the measurement of fast sensor characteristic times, with the sensors showing good sensitivity towards gas and pressure as well as high reproducibility.
Centro de Componentes Semicondutores - CCS, Universidade Estadual de Campinas - UNICAMP, C.P. 6061, Rua João Pandia Calógeras, 90, 13083-870, Campinas, SP, Brazil. raluca.savu@ccs.unicamp.br
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R
Savu
J V
JV
Silveira
A
A
Flacker
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AR
Vaz
E
E
Joanni
A C
AC
Pinto
A L
AL
Gobbi
T E A
TE
Santos
A L P
AL
Rotondaro
S A
SA
Moshkalev