Note: how to design Gaussian filter with eccentricity and probe offset taken into account for roundness measurement of small radius.
A Gaussian filter is designed using circular convolution with eccentricity and probe offset taken into account for roundness measurement. It is found through analyses and experiments that the newly designed filter can perform as well as a fast Fourier Gaussian filter for high precision calibration in laboratory, and it can be better used for roundness measurement of small radius with high eccentricity and probe offset as well.
Center of Ultra-precision Optoelectronic Instrument Engineering, Harbin Institute of Technology, Harbin 150001, China.
Lei
L
Wang
Pei
P
Liu
Jiubin
J
Tan
Long
L
Wang
Xiaohui
X
Ding