Optimal design and fabrication of three-dimensional calibration specimens for scanning probe microscopy.
Micro-/nano-scale roughness specimens are highly demanded to synthetically calibrate the scanning probe microscopy (SPM) instrument. In this study, three-dimensional (3D) specimens with controllable main surface evaluation parameters were designed. In order to improve the design accuracy, the genetic algorithm was introduced into the conventional digital filter method. A primary 3D calibration specimen with the dimension of 10 μm × 10 μm was fabricated by electron beam lithography. Atomic force microscopy characterizations demonstrated that the statistical and spectral parameters of the fabricated specimen match well with the designed values. Such a kind of 3D specimens has the potential to calibrate the SPM for applications in quantitative surface evaluations.
Department of Precision Machinery and Instrumentation, University of Science and Technology of China, 230026 Hefei, China.
Xiaoning
X
Liu
Tingting
T
Luo
Yuhang
Y
Chen
Wenhao
W
Huang
Guido
G
Piaszenski