Design and fabrication of a novel prism for micro-optical system.
This study presents a special k-type (45°, 135°) microprism structure design for the lateral-type semiconductor laser of optical systems. This study combines front- and back-side inclined exposure technology to develop a k-type microprism structure and replaces the optical prism manufactured through traditional machine processing or injection molding with a new polymer (thick-film negative photoresists) micro-optical prism structure. To obtain the optimal structural surface roughness (12-15 nm at 400  μm×400  μm area), the percentage of polymer material loss caused by the solvent was controlled. This roughness level meets Blu-ray specifications (λ/10, λ=405  nm).
Institute of Mechanical and Electrical Engineering, Ming Chi University of Technology, Taiwan, 84 Gungjuan Road, Taishan District, New Taipei City 24301, Taiwan, China. kuoyung@mail.mcut.edu.tw
Kuo-Yung
KY
Hung
Chun-Fu
CF
Lee
Yi-Wei
YW
Tsai