Theoretical error analysis of the sampling moiré method and phase compensation methodology for single-shot phase analysis.
Recently, a rapid and accurate single-shot phase measurement technique called the sampling moiré method has been developed for small-displacement distribution measurements. In this study, the theoretical phase error of the sampling moiré method caused by linear intensity interpolation in the case of a mismatch between the sampling pitch and the original grating pitch is analyzed. The periodic phase error is proportional to the square of the spatial angular frequency of the moiré fringe. Moreover, an effective phase compensation methodology is developed to reduce the periodic phase error. Single-shot phase analysis can perform accurately even when the sampling pitch is not matched to the original grating pitch exactly. The primary simulation results demonstrate the effectiveness of the proposed phase compensation methodology.
National Institute of Advanced Industrial Science and Technology (AIST), AIST Tsukuba Central 2, Tsukuba 305-8568, Japan. ri‐shien@aist.go.jp
Shien
S
Ri
Takashi
T
Muramatsu