Rectangular symmetry morphologies in a topographically templated block copolymer.
Using an array of majority-block-functionalized posts makes it possible to locally control the self-assembly of a block copolymer and achieve several morphologies on a single substrate. A template consisting of a square symmetry array of posts produces a square-symmetry lattice of microdomains, which doubles the areal density of features.
Department of Electrical Engineering and Computer Science, Massachusetts Institute of Technology, Cambridge, MA 02139, USA.
Amir
A
Tavakkoli K G
Adam F
AF
Hannon
Kevin W
KW
Gotrik
Alfredo
A
Alexander-Katz
Caroline A
CA
Ross
Karl K
KK
Berggren
D004129:Dimethylpolysiloxanes / Q000737:chemistry; D036103:Nanotechnology; D011108:Polymers / Q000737:chemistry*; D011137:Polystyrenes / Q000737:chemistry; D012822:Silicon Dioxide / Q000737:chemistry
D004129:Dimethylpolysiloxanes; D011108:Polymers; D011137:Polystyrenes; C013830:baysilon; D012822:Silicon Dioxide