Selective and reversible ammonia gas detection with nanoporous film functionalized silicon photonic micro-ring resonator.
Portable, low cost and real-time gas sensors have a considerable potential in various biomedical and industrial applications. For such applications, nano-photonic gas sensors based on standard silicon fabrication technology offer attractive opportunities. Deposition of high surface area nano-porous coatings on silicon photonic sensors is a means to achieve selective, highly sensitive and multiplexed gas detection on an optical chip. Here we demonstrate selective and reversible ammonia gas detection with functionalized silicon-on-insulator optical micro-ring resonators. The micro-ring resonators are coated with acidic nano-porous aluminosilicate films for specific ammonia sensing, which results in a reversible response to NH(3)with selectivity relative to CO(2). The ammonia detection limit is estimated at about 5 ppm. The detectors reach a steady response to NH(3) within 30 and return to their base level within 60 to 90 seconds. The work opens perspectives on development of nano-photonic sensors for real-time, non-invasive, low cost and light weight biomedical and industrial sensing applications.
Ghent University-IMEC, Photonics Research group, INTEC, Sint-Pietersnieuwstraat 41, 9000 Gent, Belgium. nyebo@intec.ugent.be
Nebiyu A
NA
Yebo
Sreeprasanth Pulinthanathu
SP
Sree
Elisabeth
E
Levrau
Christophe
C
Detavernier
Zeger
Z
Hens
Johan A
JA
Martens
Roel
R
Baets
D000641:Ammonia / Q000032:analysis*; D004867:Equipment Design; D019544:Equipment Failure Analysis; D005740:Gases / Q000032:analysis*; D008567:Membranes, Artificial; D008904:Miniaturization; D049329:Nanostructures / Q000737:chemistry* / Q000648:ultrastructure; D036103:Nanotechnology / Q000295:instrumentation*; D010783:Photometry / Q000295:instrumentation*; D012825:Silicon / Q000737:chemistry*; D014159:Transducers
D005740:Gases; D008567:Membranes, Artificial; D000641:Ammonia; D012825:Silicon