Laser etching of groove structures with micro-optical fiber-enhanced irradiation.
A microfiber is used as a laser-focusing unit to fabricate a groove structure on TiAlSiN surfaces. After one laser pulse etching, a groove with the minimum width of 265 nm is manufactured at the area. This technique of microfabricating the groove in microscale is studied. Based on the near-field intensity enhancement at the contact area between the fiber and the surface during the laser irradiation, simulation results are also presented, which agree well with the experimental results.
State Key Laboratory of Tribology, Tsinghua University, Beijing, 100084, China. ldm@tsinghua.edu.cn.
Dameng
D
Liu
Jiachen
J
Liu
Hui
H
Wang
Tianmin
T
Shao