Use of a columnar metal thin film as a nanosieve with sub-10 nm pores.
A columnar-structured nanosieve is unique in the sense that it is a general thin film formed by physical vapor deposition (PVD). Instead of additional processes to make nanopores, the numerous voids naturally formed among columnar grains during PVD are used as nanopores. Since the thin film formed by PVD has vertically grown columnar grains, the fabricated nanosieve has numerous straight-opened nanopores, which is an ideal structure for a nanosieve.
Department of Electrical Engineering, Korea Advanced Institute of Science and Technology (KAIST), 291 Daehak-ro, Yuseong-gu, Daejeon, 305-701, Republic of Korea.
Dong-Hoon
DH
Choi
Yong Duk
YD
Han
Byung-Kee
BK
Lee
Seon-Jin
SJ
Choi
Hyun C
HC
Yoon
Dae-Sik
DS
Lee
Jun-Bo
JB
Yoon
D005740:Gases / Q000737:chemistry; D008670:Metals / Q000737:chemistry*; D058608:Nanopores / Q000648:ultrastructure*; D016062:Porosity
D005740:Gases; D008670:Metals