Ultralow-loss, high-density SOI optical waveguide routing for macrochip interconnects.
We report optical waveguides up to one meter long with 0.026 dB/cm loss fabricated in a 300nm thick SOI CMOS process. Combined with tight bends and compact interlayer grating couplers, we demonstrate a complete toolbox for ultralow-loss, high-density waveguide routing for macrochip interconnects.
Oracle Labs, Oracle, San Diego, CA 92121, USA. glenn.li@oracle.com
Guoliang
G
Li
Jin
J
Yao
Hiren
H
Thacker
Attila
A
Mekis
Xuezhe
X
Zheng
Ivan
I
Shubin
Ying
Y
Luo
Jin-Hyoung
JH
Lee
Kannan
K
Raj
John E
JE
Cunningham
Ashok V
AV
Krishnamoorthy
D004867:Equipment Design; D019544:Equipment Failure Analysis; D012666:Semiconductors; D020349:Surface Plasmon Resonance / Q000295:instrumentation*; D013685:Telecommunications / Q000295:instrumentation*