title: Note: automatic mass-flow configuration method for evaluating turbomolecular pump performance.
abstract: An automatic mass-flow configuration method is presented for the evaluation of turbomolecular pump performance. This configuration method is used to obtain an effective mass-flow rate. In addition, the throughput, inlet pressure, and compression ratio are evaluated. The throughput increases with the mass-flow rate. Moreover, the compression ratio increases almost linearly with the outlet pressure for mass-flow rates from 2.97 × 10(-9) to 3.96 × 10(-7) kg/s. Finally, empirical correlations are proposed for the throughput and inlet pressure.
authors: Instrument Technology Research Center, National Applied Research Laboratories, Hsinchu 300, Taiwan. fchsieh@itrc.narl.org.tw
authors: Fan-Chun
authors: FC
authors: Hsieh
authors: Yu-Jen
authors: YJ
authors: Su
authors: Bing-Hong
authors: BH
authors: Lin
authors: Da-Ren
authors: DR
authors: Liu
authors: Fong-Zhi
authors: FZ
authors: Chen