title: Porous silicon bulk acoustic wave resonator with integrated transducer.
abstract: : We report that porous silicon acoustic Bragg reflectors and AlN-based transducers can be successfully combined and processed in a commercial solidly mounted resonator production line. The resulting device takes advantage of the unique acoustic properties of porous silicon in order to form a monolithically integrated bulk acoustic wave resonator.
authors: Department of Physics, University of Bath, UK. g.aliev@bath.ac.uk.
authors: Gazi N
authors: GN
authors: Aliev
authors: Bernhard
authors: B
authors: Goller
authors: Paul A
authors: PA
authors: Snow
authors: Helge
authors: H
authors: Heinrich
authors: Biao
authors: B
authors: Yuan
authors: Robert
authors: R
authors: Aigner