title: Linearization and minimization of cyclic error with heterodyne laser interferometry.
abstract: We present a method for the linearization and minimization of interferometer cyclic error. We utilize a polynomial curve fitting and resampling algorithm to correct for nonlinear mirror displacement. In the frequency domain, this algorithm compresses cyclic error into a single-frequency component and enables the precise measurement of cyclic error in a noise-dominated environment. We have applied the technique to determine the cyclic error for a range of interferometer components. In addition, we have used these measurements to optimize interferometer configuration and performance such that we routinely achieve a cyclic error of ∼50 pm for our custom Glan-Laser interferometer and ∼100 pm for a commercial interferometer.
authors: National Measurement Institute Australia, Bradfield Road, Lindfield, New South Wales 2070, Australia. terry.mcrae@measurement.gov.au
authors: Terry G
authors: TG
authors: McRae
authors: Magnus T L
authors: MT
authors: Hsu
authors: Christopher H
authors: CH
authors: Freund
authors: Daniel A
authors: DA
authors: Shaddock
authors: Jan
authors: J
authors: Herrmann
authors: Malcolm B
authors: MB
authors: Gray