title: Biocompatible "click" wafer bonding for microfluidic devices.
abstract: We introduce a novel dry wafer bonding concept designed for permanent attachment of micromolded polymer structures to surface functionalized silicon substrates. The method, designed for simultaneous fabrication of many lab-on-chip devices, utilizes a chemically reactive polymer microfluidic structure, which rapidly bonds to a functionalized substrate via"click" chemistry reactions. The microfluidic structure consists of an off-stoichiometry thiol-ene (OSTE) polymer with a very high density of surface bound thiol groups and the substrate is a silicon wafer that has been functionalized with common bio-linker molecules. We demonstrate here void free, and low temperature (< 37 °C) bonding of a batch of OSTE microfluidic layers to a silane functionalized silicon wafer.
authors: Microsystem Technology, KTH Royal Institute of Technology, Osquldas väg 10, SE-100 44, Stockholm, Sweden. farizah.saharil@ee.kth.se
authors: Farizah
authors: F
authors: Saharil
authors: Carl Fredrik
authors: CF
authors: Carlborg
authors: Tommy
authors: T
authors: Haraldsson
authors: Wouter
authors: W
authors: van der Wijngaart
mesh_terms: D001672:Biocompatible Materials / Q000737:chemistry*; D057930:Click Chemistry; D046210:Microfluidic Analytical Techniques / Q000295:instrumentation*; D011108:Polymers / Q000737:chemistry; D012825:Silicon / Q000737:chemistry; D012997:Solvents / Q000737:chemistry; D013499:Surface Properties; D013696:Temperature; D014466:Ultraviolet Rays
chemical_list: D001672:Biocompatible Materials; D011108:Polymers; D012997:Solvents; D012825:Silicon