title: Linear variable optical filter-based ultraviolet microspectrometer.
abstract: An IC-compatible linear variable optical filter (LVOF) for application in the UV spectral range between 310 and 400 nm has been fabricated using resist reflow and an optimized dry-etching. The LVOF is mounted on the top of a commercially available CMOS camera to result in a UV microspectrometer. A special calibration technique has been employed that is based on an initial spectral measurement on a xenon lamp. The image recorded on the camera during calibration is used in a signal processing algorithm to reconstruct the spectrum of the mercury lamp and the calibration data is subsequently used in UV spectral measurements. Experiments on a fabricated LVOF-based microspectrometer with this calibration approach implemented reveal a spectral resolution of 0.5 nm.
authors: Department of Microelectronics/Electronic Instrumentation, Delft University of Technology, Delft, The Netherlands. a.emadi@tudelft.nl
authors: Arvin
authors: A
authors: Emadi
authors: Huaiwen
authors: H
authors: Wu
authors: Ger
authors: G
authors: de Graaf
authors: Peter
authors: P
authors: Enoksson
authors: Jose Higino
authors: JH
authors: Correia
authors: Reinoud
authors: R
authors: Wolffenbuttel
mesh_terms: D000465:Algorithms; D002138:Calibration; D003198:Computer Simulation; D017076:Computer-Aided Design; D004867:Equipment Design; D015591:Microspectrophotometry / Q000295:instrumentation*; D008904:Miniaturization; D008962:Models, Theoretical; D055096:Optical Devices; D014466:Ultraviolet Rays