title: CMOS compatible integration of Si/SiO2 multilayer GRIN lens optical mode size converter to Si wire waveguide.
abstract: We present a CMOS compatible mass manufacturable, compact Si/SiO(2) multilayer GRIN lens mode size converter from standard single mode fiber to 300 nm-thick Si waveguide. The fiber-to-GRIN lens coupling loss is 2.6 ± 0.3 dB (coupling efficiency: 51~60%) with optimized focal length of 11.6~11.8 μm and Si/SiO(2) multilayer thickness of 7.4 μm.
authors: Data Storage Institute, 5 Engineering Drive-1, Singapore 117608, Singapore. loh_ter_hoe@dsi.a-star.edu.sg
authors: Ter-Hoe
authors: TH
authors: Loh
authors: Qian
authors: Q
authors: Wang
authors: Keh-Ting
authors: KT
authors: Ng
authors: Yi-Cheng
authors: YC
authors: Lai
authors: Seng-Tiong
authors: ST
authors: Ho