Single-shot parallel four-step phase shifting using on-axis Fizeau interferometry.
The purposes of the paper are threefold: (1) to show the possibility to perform parallel phase-shifting Fizeau interferometry by using a quarter waveplate with high flatness as a reference, (2) to present a comparative study between the phase-shifting algorithm and the off-axis geometry in surface microtopography measurement, and (3) to show the advantages of using the proposed common path Fizeau interferometry over the quasi-common path Michelson interferometry in terms of accuracy in measurement. The compelling advantage of the proposed parallel phase-shifting Fizeau interferometric technique is the long-term stability that leads to measuring objects with a high degree of accuracy.
State Key Laboratory of Transient Optics and Photonics, Xi’an Institute of Optics and Precision Mechanics, Chinese Academy of Sciences, Xi’an 710119, China.
D G
DG
Abdelsalam
Baoli
B
Yao
Peng
P
Gao
Junwei
J
Min
Rongli
R
Guo