Silicon nanotubes from sacrificial silicon nanowires: fabrication and manipulation via embedding in flexible polymers.
In the present work we report a simple method to fabricate Si nanotubes (NTs) starting from the growth of self-assembled sacrificial Si nanowires that, at the same time, embeds them into a polyimide matrix, allowing a very easy manipulation of these nano-objects, including removal, transfer and positioning. Our all-silicon fabrication method is completely compatible with the Si technology platform and is therefore implementable using the existing technology. Transferred NTs show good electrical contact with underlying electrodes, and relatively low resistance values have been measured. All these features demonstrate the effectiveness of the transfer method and the potentiality of the NTs in electronics. Finally, optical reflectivity of the NTs has been measured in the near UV-near IR spectral range.
IMM-CNR, via del Fosso del Cavaliere 100, 00133 Roma, Italy.
Annalisa
A
Convertino
Massimo
M
Cuscunà
Faustino
F
Martelli