title: Highly ordered large-area colloid templates for nanostructured TiO2 thin film gas sensors.
abstract: We report a novel process that uses highly ordered colloidal templating to fabricate nanostructured TiO2 thin film gas sensors. An O2 plasma treatment is used to decrease the contact angle of a water droplet on a SiO2/Si substrate from 46 degrees to 3 degrees. The formation of this hydrophilic surface enhances the adhesion of polystyrene microspheres to the substrate during the spin coating of the colloidal solution, leading to a large-area colloid template of closely packed monolayer microspheres on the substrates. Embossed TiO2 thin film gas sensors fabricated through highly ordered colloidal templating using O2 plasma exhibit substantially enhanced gas sensing performance as compared to those without surface treatments prior to colloidal templating.
authors: Electronic Materials Center, Korea Institute of Science and Technology (KIST), Seoul 136-791, Korea.
authors: Hi Gyu
authors: HG
authors: Moon
authors: Young-Seok
authors: YS
authors: Shim
authors: Do Hong
authors: DH
authors: Kim
authors: Ho Won
authors: HW
authors: Jang
authors: Seung-Hee
authors: SH
authors: Han
authors: Hyung-Ho
authors: HH
authors: Park
authors: Soek-Jin
authors: SJ
authors: Yoon