title: A MEMS electrochemical bellows actuator for fluid metering applications.
abstract: We present a high efficiency wireless MEMS electrochemical bellows actuator capable of rapid and repeatable delivery of boluses for fluid metering and drug delivery applications. Nafion®-coated Pt electrodes were combined with Parylene bellows filled with DI water to form the electrolysis-based actuator. The performance of actuators with several bellows configurations was compared for a range of applied currents (1-10 mA). Up to 75 boluses were delivered with an average pumping flow rate of 114.40 ± 1.63 μL/min. Recombination of gases into water, an important factor in repeatable and reliable actuation, was studied for uncoated and Nafion®-coated actuators. Real-time pressure measurements were conducted and the effects of temperature, physiological back pressure, and drug viscosity on delivery performance were investigated. Lastly, we present wireless powering of the actuator using a class D inductive powering system that allowed for repeatable delivery with less than 2 % variation in flow rate values.
authors: Department of Biomedical Engineering, Viterbi School of Engineering, University of Southern California, 1042 Downey Way, DRB-140, Los Angeles, CA 90089-1111, USA.
authors: Roya
authors: R
authors: Sheybani
authors: Heidi
authors: H
authors: Gensler
authors: Ellis
authors: E
authors: Meng
mesh_terms: D001831:Body Temperature; D016503:Drug Delivery Systems / Q000295:instrumentation*; D004566:Electrodes; D004572:Electrolysis / Q000295:instrumentation*; D004867:Equipment Design; D005465:Fluorocarbon Polymers; D057446:Hydrodynamics; D055617:Micro-Electrical-Mechanical Systems / Q000295:instrumentation*; D011312:Pressure; D014783:Viscosity; D059015:Wireless Technology / Q000295:instrumentation*
chemical_list: D005465:Fluorocarbon Polymers; C040402:perfluorosulfonic acid