title: [Application progress of laser-induced breakdown spectroscopy for surface analysis in materials science field].
abstract: As a truly surface analytical tool, laser-induced breakdown spectroscopy (LIBS) was developed in recent ten years, and in this paper, fundamental theory, instrumentation and it's applications in material science are reviewed in detail. Application progress of elemental distribution and depth profile analysis are mainly discussed in the field of metallurgy, semiconductor and electronical materials at home and abroad. It is pointed out that the pulse energy, ambient gas and it's pressure, and energy distribution of laser beam strongly influence spatial and depth resolution, and meanwhile a approach to improving resolution considering analytical sensitivity is provided. Compared with traditional surface analytical methods, the advantage of LIBS is very large scanning area, high analytical speed, and that conducting materials or non-conducting materials both can be analyzed. It becomes a powerful complement of traditional surface analytical tool.
authors.affiliation: Central Iron & Steel Research Institute, Beijing 100081, China. chauchylan@163.com
authors.forename: Yong
authors.initials: Y
authors.lastname: Zhang
authors.forename: Yun-Hai
authors.initials: YH
authors.lastname: Jia
authors.forename: Ji-Wen
authors.initials: JW
authors.lastname: Chen
authors.forename: Ying
authors.initials: Y
authors.lastname: Liu
authors.forename: Xue-Jing
authors.initials: XJ
authors.lastname: Shen
authors.forename: Lei
authors.initials: L
authors.lastname: Zhao
authors.forename: Shu-Ming
authors.initials: SM
authors.lastname: Wang
authors.forename: Hong
authors.initials: H
authors.lastname: Yu
authors.forename: Peng-Cheng
authors.initials: PC
authors.lastname: Han
authors.forename: Hua-Yang
authors.initials: HY
authors.lastname: Qu
authors.forename: Shao-Zun
authors.initials: SZ
authors.lastname: Liu