title: The use of PEEK nanorod arrays for the fabrication of nanoporous surfaces under high temperature: SiNx example.
abstract: Large area silicon nitride (SiN(x)) nanoporous surfaces are fabricated using poly(ether-ether-ketone) (PEEK) nanorod arrays as a template. The procedure involves manipulation of nanoporous anodic aluminum oxide (AAO) templates in order to form an ordered array of PEEK nanopillars with high temperature resistant characteristics. In this context, self-ordered AAO templates are infiltrated with PEEK melts via the "precursor film" method. Once the melts have been crystallized in the porous structure of AAO, the basis alumina layer is removed, yielding an ordered array of PEEK nanopillars. The resulting structure is a high temperature and chemical resistant polymeric nanomold, which can be utilized in the synthesis of nanoporous materials under aggressive conditions. Such conditions are high temperatures (up to 320 °C), vacuum, or extreme pH. For example, SiN(x) nanopore arrays have been grown by plasma enhanced chemical vapor deposition at 300 °C, which can be of interest as mold for nanoimprint lithography, due to its hardness and low surface energy. The SiN(x) nanopore array portrays the same characteristics as the original AAO template: 120 nm diameter pores and an interpore distance of 430 nm. Furthermore, the aspect ratio of the SiN(x) nanopores can be tuned by selecting an AAO template with appropriate conditions. The use of PEEK as a nanotemplate extends the applicability of polymeric nanopatterns into a temperature regime up to now not accessible and opens up the simple fabrication of novel nanoporous inorganic surfaces.
authors.affiliation: Instituto de Microelectrónica de Madrid (CNM-CSIC), Isaac Newton 8, PTM, Tres Cantos, E-28760, Madrid, Spain.
authors.forename: Jaime
authors.initials: J
authors.lastname: Martín
authors.forename: Marisol
authors.initials: M
authors.lastname: Martín-González