title: Single-shot two-dimensional surface measurement based on spectrally resolved white-light interferometry.
abstract: By analyzing the spectral domain's phase information, one can use spectrally resolved white-light interferometry (SRWLI) to obtain the profile with a single frame of an interferogram. We present here a two-dimensional (2D) SRWLI method that can be applied to measure narrow rectangle areas. A frequency comb is produced by using a Fabry-Perot (F-P) etalon to filter the broadband source. With the filtered frequency comb illumination, the interference patterns under adjacent wavelengths would be separated by a little distance, which enables us to obtain a 2D profile with a small width. The experimental details of measurement on a step sample are discussed in this paper.
authors.affiliation: State Key Laboratory of Modern Optical Instrumentation, Zhejiang University, Hangzhou, China.
authors.forename: Pei
authors.initials: P
authors.lastname: Zhu
authors.forename: Kaiwei
authors.initials: K
authors.lastname: Wang