title: Absolute surface figure testing by shift-rotation method using Zernike polynomials.
abstract: In surface figure testing, most of them are relative tests, and the reference surface usually limits the accuracy of test results. Absolute calibration is one of the most important and efficient techniques to reach subnanometer accuracy in surface figure testing. An absolute testing method, a shift-rotation method using Zernike polynomials, is presented, which can be used to calibrate both flat and spherical surfaces (concave or convex). Calibration contains at least three position measurements: one basic position, one rotation, and one lateral shift of the test surface. Experiments show that the repeatability of this method is 0.13 nm RMS, and pixel-to-pixel comparison with the two-sphere method is 0.2 nm RMS.
authors.affiliation: State Key Laboratory of Applied Optics, Changchun Institute of Optics, Fine Mechanics and Physics, Chinese Academy of Sciences, Changchun 130033, Jilin, China. dqsu@hotmail.com
authors.forename: Dongqi
authors.initials: D
authors.lastname: Su
authors.forename: Erlong
authors.initials: E
authors.lastname: Miao
authors.forename: Yongxin
authors.initials: Y
authors.lastname: Sui
authors.forename: Huaijiang
authors.initials: H
authors.lastname: Yang