title: Development of 2D Microdisplay Using an Integrated Microresonating Waveguide Scanning System.
abstract: Our research team has developed a 2D micro image display device that can potentially overcome the size reduction limits while maintaining the high-image resolution and field of view obtained by mirror-based display systems. The basic design of the optical scanner includes a microfabricated SU-8 cantilever waveguide that is electromechanically deflected by a piezoelectric actuator. From the distal tip of the cantilever waveguide, a light beam is emitted and the direction of propagation is displaced along two orthogonal directions. The waveforms for the actuator and the LED light modulation are generated and controlled using a field programmable gate array. Our recent study is an update to the previously-reported mechanical scanner, replacing the hand-built PZT scanner and fiber waveguide with a microfabricated system incorporating aerosol-deposited PZT thin film and a polymeric SU-8 wave guide. In this article, we report on the design and fabrication of a prototype miniaturized 2D scanner, discuss optical and mechanical the modeling of the system's properties and present the experimental results.
authors.affiliation: Department of Engineering Science and Ocean Engineering, National Taiwan University, Taipei, Taiwan.
authors.forename: Wei-Shu
authors.initials: WS
authors.lastname: Hua
authors.forename: Wei-Chih
authors.initials: WC
authors.lastname: Wang
authors.forename: Wen-Jong
authors.initials: WJ
authors.lastname: Wu
authors.forename: Chi Leung
authors.initials: CL
authors.lastname: Tsui
authors.forename: Wei
authors.initials: W
authors.lastname: Cui
authors.forename: Wen-Pin
authors.initials: WP
authors.lastname: Shih