title: Nano- and microstructuring of graphene using UV-NIL.
abstract: In this work we demonstrate for the first time the micro- and nanostructuring of graphene by means of UV-nanoimprint lithography. Exfoliated graphene on SiO(2) substrates, as well as graphene deposited by chemical vapor deposition (CVD) on polycrystalline nickel and copper, and transferred CVD graphene on dielectric substrates, were used to demonstrate that our technique is suitable for large-area patterning (2 × 2 cm(2)) of graphene on various types of substrates. The demonstrated fabrication procedure of micrometer as well as nanometer-sized graphene structures with feature sizes down to 20 nm by a wafer-scale process opens up an avenue for the low-cost and high-throughput manufacturing of graphene-based optical and electronic applications. The processed graphene films show electron mobilities of up to 4.6 × 10(3) cm(2) V (-1) s(-1), which confirms them to exhibit state-of-the-art electronic quality with respect to the current literature.
authors.affiliation: Functional Surfaces and Nanostructures, PROFACTOR GmbH, Im Stadtgut A2, A-4407 Steyr-Gleink, Austria. iris.bergmair@profactor.at
authors.forename: Iris
authors.initials: I
authors.lastname: Bergmair
authors.forename: Wolfgang
authors.initials: W
authors.lastname: Hackl
authors.forename: Maria
authors.initials: M
authors.lastname: Losurdo
authors.forename: Christian
authors.initials: C
authors.lastname: Helgert
authors.forename: Goran
authors.initials: G
authors.lastname: Isic
authors.forename: Michael
authors.initials: M
authors.lastname: Rohn
authors.forename: Milka M
authors.initials: MM
authors.lastname: Jakovljevic
authors.forename: Thomas
authors.initials: T
authors.lastname: Mueller
authors.forename: Maria
authors.initials: M
authors.lastname: Giangregorio
authors.forename: Ernst-Bernhard
authors.initials: EB
authors.lastname: Kley
authors.forename: Thomas
authors.initials: T
authors.lastname: Fromherz
authors.forename: Rados
authors.initials: R
authors.lastname: Gajic
authors.forename: Thomas
authors.initials: T
authors.lastname: Pertsch
authors.forename: Giovanni
authors.initials: G
authors.lastname: Bruno
authors.forename: Michael
authors.initials: M
authors.lastname: Muehlberger