title: High-sensitivity Fabry-Perot interferometric pressure sensor based on a nanothick silver diaphragm.
abstract: We present a fiber-optic extrinsic Fabry-Perot interferometer pressure sensor based on a nanothick silver diaphragm. The sensing diaphragm, with a thickness measured in a few hundreds of nanometers, is fabricated by the electroless plating method, which provides a simple fabrication process involving a high-quality diaphragm at a low cost. The sensor exhibits a relatively linear response within the pressure variation range of 0-50 kPa, with a high pressure sensitivity of 70.5 nm/kPa. This sensor is expected to have potential applications in the field of highly sensitive pressure sensors.
authors.affiliation: School of Physics and Materials Science, Anhui University, Hefei 230039, China. fengx@ahu.edu.cn
authors.forename: Feng
authors.initials: F
authors.lastname: Xu
authors.forename: Dongxu
authors.initials: D
authors.lastname: Ren
authors.forename: Xiaolong
authors.initials: X
authors.lastname: Shi
authors.forename: Can
authors.initials: C
authors.lastname: Li
authors.forename: Weiwei
authors.initials: W
authors.lastname: Lu
authors.forename: Lu
authors.initials: L
authors.lastname: Lu
authors.forename: Liang
authors.initials: L
authors.lastname: Lu
authors.forename: Benli
authors.initials: B
authors.lastname: Yu