title: An instrument for 3D x-ray nano-imaging.
abstract: We present an instrument dedicated to 3D scanning x-ray microscopy, allowing a sample to be precisely scanned through a beam while the angle of x-ray incidence can be changed. The position of the sample is controlled with respect to the beam-defining optics by laser interferometry. The instrument achieves a position stability better than 10 nm standard deviation. The instrument performance is assessed using scanning x-ray diffraction microscopy and we demonstrate a resolution of 18 nm in 2D imaging of a lithographic test pattern while the beam was defined by a pinhole of 3 μm in diameter. In 3D on a test object of copper interconnects of a microprocessor, a resolution of 53 nm is achieved.
authors.affiliation: Paul Scherrer Institut, 5232 Villigen PSI, Switzerland. mirko.holler@psi.ch
authors.forename: M
authors.initials: M
authors.lastname: Holler
authors.forename: J
authors.initials: J
authors.lastname: Raabe
authors.forename: A
authors.initials: A
authors.lastname: Diaz
authors.forename: M
authors.initials: M
authors.lastname: Guizar-Sicairos
authors.forename: C
authors.initials: C
authors.lastname: Quitmann
authors.forename: A
authors.initials: A
authors.lastname: Menzel
authors.forename: O
authors.initials: O
authors.lastname: Bunk