title: Design and implementation of a versatile and variable-frequency piezoelectric coefficient measurement system.
abstract: We present a simple but versatile piezoelectric coefficient measurement system, which can measure the longitudinal and transverse piezoelectric coefficients in the pressing and bending modes, respectively, at different applied forces and a wide range of frequencies. The functionality of this measurement system has been demonstrated on three samples, including a PbZr(0.52)Ti(0.48)O(3) (PZT) piezoelectric ceramic bulk, a ZnO thin film, and a laminated piezoelectric film sensor. The static longitudinal piezoelectric coefficients of the PZT bulk and the ZnO film are estimated to be around 210 and 8.1 pC/N, respectively. The static transverse piezoelectric coefficients of the ZnO film and the piezoelectric film sensor are determined to be, respectively, -0.284 and -0.031 C/m(2).
authors.affiliation: Department of Electronics Engineering, National Changhua University of Education, Changhua 500, Taiwan.
authors.forename: J S
authors.initials: JS
authors.lastname: Wu
authors.forename: Y K
authors.initials: YK
authors.lastname: Huang
authors.forename: F L
authors.initials: FL
authors.lastname: Wu
authors.forename: D Y
authors.initials: DY
authors.lastname: Lin
mesh_terms: D002516:Ceramics / Q000737:chemistry; D055615:Electrical Equipment and Supplies; D004560:Electricity; D004867:Equipment Design; D013314:Stress, Mechanical; D015034:Zinc Oxide / Q000737:chemistry
chemical_list: D015034:Zinc Oxide