title: Highly precise micro-retroreflector array fabricated by the LIGA process and its application as tapped delay line filter.
abstract: We report on the fabrication of a one-dimensional micro-retroreflector array with a pitch of 100 μm. The array was fabricated by x-ray lithography and the lithographie, galvanik und abformung (LIGA) process in a 1 mm thick poly(methyl methacrylate) (PMMA) layer and subsequently covered with Au. The area of the array is 1 mm×10 mm. The high precision of the LIGA-based fabrication process allows one to use the element in spectrometers. Here, it is suggested to apply it to the implementation of a transversal filter for femtosecond pulses. We present a theoretical description of the performance of the retroreflector array as a filtering device and show experimental results.
authors.affiliation: University of Hagen, Chair of Micro- and Nanophotonics, Universitätsstr. 27, D-58097 Hagen, Germany.
authors.forename: Michael
authors.initials: M
authors.lastname: Bohling
authors.forename: Thomas
authors.initials: T
authors.lastname: Seiler
authors.forename: Boguslaw
authors.initials: B
authors.lastname: Wdowiak
authors.forename: Jürgen
authors.initials: J
authors.lastname: Jahns
authors.forename: Jürgen
authors.initials: J
authors.lastname: Mohr
authors.forename: Martin
authors.initials: M
authors.lastname: Börner