title: Note: a method for estimating the resolution of nanopositioning systems.
abstract: This Note describes a new technique for estimating the resolution of nanopositioning systems. By recording the voltage applied to an actuator and performing a filtering operation, the position noise and resolution can be estimated. This technique is simple to apply in practice and does not require any additional sensors or specialized equipment.
authors.affiliation: School of Electrical Engineering and Computer Science, University of Newcastle, Callaghan, NSW 2308, Australia. Andrew.Fleming@Newcastle.edu.au
authors.forename: Andrew J
authors.initials: AJ
authors.lastname: Fleming