title: Separation of ion components produced by plasma-assisted catalytic ionization.
abstract: Positive and negative hydrogen ions are produced by plasma-assisted catalytic ionization using a porous nickel plate, where the irradiation current density and energy of positive ions produced by discharge to the porous plate are controlled. The ion energy distributions are analyzed from the properties of current densities of positive and negative ions extracted from the porous surface. Positive ions passing through fine pores of the porous plate and positive and negative ions produced on the porous surface are observed. It is clarified that the produced fluxes of positive and negative ions and the flux balance between them are controlled by the irradiation current density and energy, respectively.
authors.affiliation: Department of Electronic Device Engineering, Yamaguchi University, Ube 755-8611, Japan.
authors.forename: W
authors.initials: W
authors.lastname: Oohara
authors.forename: T
authors.initials: T
authors.lastname: Hibino
authors.forename: T
authors.initials: T
authors.lastname: Higuchi
authors.forename: T
authors.initials: T
authors.lastname: Ohta