title: Morphology control in block copolymer films using mixed solvent vapors.
abstract: Solvent vapor annealing of block copolymer thin films can produce a range of morphologies different from the equilibrium bulk morphology. By systematically varying the flow rate of two different solvent vapors (toluene and n-heptane) and an inert gas, phase maps showing the morphology versus vapor pressure of the solvents were constructed for 45 kg/mol polystyrene-block-polydimethylsiloxane diblock copolymer films of different thicknesses. The final morphology was correlated with the swelling of the block copolymer and homopolymer films and the solvent vapor annealing conditions. Self-consistent field theory is used to model the effects of solvent swelling. These results provide a framework for predicting the range of morphologies available under different solvent vapor conditions, which is important in lithographic applications where precise control of morphology and critical dimensions are essential.
authors.affiliation: Department of Materials Science and Engineering, Massachusetts Institute of Technology, 77 Massachusetts Avenue, Cambridge, Massachusetts 02139, United States.
authors.forename: Kevin W
authors.initials: KW
authors.lastname: Gotrik
authors.forename: Adam F
authors.initials: AF
authors.lastname: Hannon
authors.forename: Jeong Gon
authors.initials: JG
authors.lastname: Son
authors.forename: Brent
authors.initials: B
authors.lastname: Keller
authors.forename: Alfredo
authors.initials: A
authors.lastname: Alexander-Katz
authors.forename: Caroline A
authors.initials: CA
authors.lastname: Ross
mesh_terms: D000327:Adsorption; D003460:Crystallization / Q000379:methods*; D005740:Gases / Q000737:chemistry*; D046911:Macromolecular Substances / Q000737:chemistry; D008422:Materials Testing; D008567:Membranes, Artificial; D008956:Models, Chemical; D008968:Molecular Conformation; D049329:Nanostructures / Q000737:chemistry* / Q000648:ultrastructure*; D010316:Particle Size; D011108:Polymers / Q000737:chemistry*; D012997:Solvents / Q000737:chemistry*; D013499:Surface Properties
chemical_list: D005740:Gases; D046911:Macromolecular Substances; D008567:Membranes, Artificial; D011108:Polymers; D012997:Solvents