title: Structural studies of aluminium nitride embedded in amorphous carbon.
abstract: Aluminum nitride containing diamond-like carbon was fabricated with pulsed laser deposition without post processing. The compositions of the targets used were varied at 1, 5, 10, 15 at.% and pure carbon was used as a reference. The films were comprehensively characterized with Atomic force microscope (AFM), X-ray photoelectron spectroscopy (XPS) and Transmission electron microscopy (TEM). Roughness analysis using AFM showed an increasing root-mean-square (RMS) roughness with increasing AIN content in target, while XPS analysis showed that the aluminum-nitrogen bonding was still present in the films after the fabrication process. Microstructural studies and selected area electron diffraction (SAED) pattern confirmed the presence of AIN crystals in DLC matrix. This nanostructured composite material is useful for luminescence applications.
authors.affiliation: Department of Material Science and Engineering, Faculty of Engineering, National University of Singapore, Blk E3A, 04-10, 7 Engineering Drive 1, 117574, Singapore.
authors.forename: A T T
authors.initials: AT
authors.lastname: Koh
authors.forename: Y M
authors.initials: YM
authors.lastname: Foong
authors.forename: B Z
authors.initials: BZ
authors.lastname: Phang
authors.forename: Daniel H C
authors.initials: DH
authors.lastname: Chua
authors.forename: M
authors.initials: M
authors.lastname: Tanemura