title: Towards a high-resolution flow camera using artificial hair sensor arrays for flow pattern observations.
abstract: Flow-sensor arrays uncover the potential to measure spatio-temporal flow patterns rather than flow measurements at just a single point. We present in this paper the developments in design, fabrication and interfacing of biomimetic flow-sensor arrays, inspired by flow-sensitive organs (cerci) of crickets. For the purpose of high-resolution flow field visualization by our artificial hair flow-sensor arrays, various array-interfacing schemes are discussed and compared. Frequency division multiplexing (FDM) is shown to be an attractive method for efficient interrogation of capacitive array sensors. Using silicon-on-insulator technology with deep trench isolation structures, hair-based flow-sensors with differential capacitive read-out, arranged in single-chip arrays, have been successfully fabricated. FDM is implemented and used to interrogate individual hair sensors providing simultaneous real-time flow measurements from multiple hairs. This powerful approach is demonstrated by reconstruction of the field of a harmonic dipole field at the position of the hairs and by localizing this dipole source relative to the array elements.
authors.affiliation: Transducers Science and Technology Group, MESA+ Research Institute, University of Twente, PO Box 217, 7500 AE, Enschede, The Netherlands. a.m.k.dagamseh@ewi.utwente.nl
authors.forename: A M K
authors.initials: AM
authors.lastname: Dagamseh
authors.forename: R J
authors.initials: RJ
authors.lastname: Wiegerink
authors.forename: T S J
authors.initials: TS
authors.lastname: Lammerink
authors.forename: G J M
authors.initials: GJ
authors.lastname: Krijnen
mesh_terms: D000818:Animals; D032701:Biomimetics / Q000295:instrumentation*; D003217:Conductometry / Q000295:instrumentation*; D025802:Electric Capacitance; D004867:Equipment Design; D019544:Equipment Failure Analysis; D006135:Gryllidae / Q000502:physiology*; D008465:Mechanoreceptors / Q000502:physiology*; D012212:Rheology / Q000295:instrumentation*; D012679:Sense Organs / Q000502:physiology*; D014159:Transducers