title: Replication of a thin polydimethylsiloxane stamp and its application to dual-nanoimprint lithography for 3D hybrid nano/micropatterns.
abstract: This paper presents the fabrication of a thin and flexible polydimethylsiloxane (PDMS) stamp with a thickness of a few tens of um and its application to nanoimprint lithography (NIL). The PDMS material generally has a low elastic modulus and high adhesive characteristics. Therefore, after being treated, the thin PDMS stamp is easily deformed and torn, adhering to itself and other materials. This paper introduces the use of a metal ring around the flange of a thin PDMS stamp to assist with the handling of this material. A PDMS stamp with a motheye pattern in nanometer scale was inserted between a substrate and a microstamp with concave patterns in micrometer scale. Subsequently, three-dimensional (3D) hybrid nano/micropatterns were fabricated by pressing these two stamps and curing the resist. The fabricated hybrid patterns were measured and verified in both the microscale and nanoscale. The process, termed "dual NIL," can be applied to the fabrication of optical components or bio-sensors that require repetitive nanopatterns on micropatterns.
authors.affiliation: Korea Institute of Machinery and Materials, 156 Gajeongbuk-Ro, Yuseong-Gu, Daejeon 305-343, South Korea.
authors.forename: Hyung Jun
authors.initials: HJ
authors.lastname: Lim
authors.forename: Jae Jong
authors.initials: JJ
authors.lastname: Lee
authors.forename: Sunggook
authors.initials: S
authors.lastname: Park
authors.forename: Kee-Bong
authors.initials: KB
authors.lastname: Choi
authors.forename: Gee Hong
authors.initials: GH
authors.lastname: Kim
authors.forename: Hyun Ha
authors.initials: HH
authors.lastname: Park
authors.forename: Ji Hyeong
authors.initials: JH
authors.lastname: Ryu