title: Temperature effects on the propagation characteristics of Love waves along multi-guide layers of Sio2/Su-8 on St-90°X quartz.
abstract: Theoretical calculations have been performed on the temperature effects on the propagation characteristics of Love waves in layered structures by solving the coupled electromechanical field equations, and the optimal design parameters were extracted for temperature stability improvement. Based on the theoretical analysis, excellent temperature coefficient of frequency (Tcf) of the fabricated Love wave devices with guide layers of SU-8/SiO(2) on ST-90°X quartz substrate is evaluated experimentally as only 2.16 ppm.
authors.affiliation: Zhejiang University of Media and Communications, Hangzhou 310018, China. xufangqian2005@163.com
authors.forename: Fangqian
authors.initials: F
authors.lastname: Xu
authors.forename: Wen
authors.initials: W
authors.lastname: Wang
authors.forename: Jiaoli
authors.initials: J
authors.lastname: Hou
authors.forename: Minghua
authors.initials: M
authors.lastname: Liu