title: n-type doping of germanium from phosphine: early stages resolved at the atomic level.
abstract: To understand the atomistic doping process of phosphorus in germanium, we present a combined scanning tunneling microscopy, temperature programed desorption, and density functional theory study of the reactions of phosphine with the Ge(001) surface. Combining experimental and theoretical results, we demonstrate that PH(2) + H with a footprint of one Ge dimer is the only product of room temperature chemisorption. Further dissociation requires thermal activation. At saturation coverage, PH(2) + H species self-assemble into ordered patterns leading to phosphorus coverages of up to 0.5 monolayers.
authors.affiliation: School of Physics, University of New South Wales, Sydney, Australia. giordano.scappucci@unsw.edu.au
authors.forename: G
authors.initials: G
authors.lastname: Scappucci
authors.forename: O
authors.initials: O
authors.lastname: Warschkow
authors.forename: G
authors.initials: G
authors.lastname: Capellini
authors.forename: W M
authors.initials: WM
authors.lastname: Klesse
authors.forename: D R
authors.initials: DR
authors.lastname: McKenzie
authors.forename: M Y
authors.initials: MY
authors.lastname: Simmons