title: Lead zirconate titanate nanoscale patterning by ultraviolet-based lithography lift-off technique for nano-electromechanical system applications.
abstract: The advantage of using lead zirconate titanate (PbZr(0.54)Ti(0.46)O(3)) ceramics as an active material in nanoelectromechanical systems (NEMS) comes from its relatively high piezoelectric coefficients. However, its integration within a technological process is limited by the difficulty of structuring this material with submicrometer resolution at the wafer scale. In this work, we develop a specific patterning method based on optical lithography coupled with a dual-layer resist process. The main objective is to obtain sub-micrometer features by lifting off a 100-nm-thick PZT layer while preserving the material's piezoelectric properties. A subsequent result of the developed method is the ability to stack several layers with a lateral resolution of few tens of nanometers, which is mandatory for the fabrication of NEMS with integrated actuation and read-out capabilities.
authors.affiliation: Laboratoire d’Analyse et d’Architecture des Systèmes–Centre National de la Recherche Scientifiqueu, Toulouse, France.
authors.forename: Samuel
authors.initials: S
authors.lastname: Guillon
authors.forename: Daisuke
authors.initials: D
authors.lastname: Saya
authors.forename: Laurent
authors.initials: L
authors.lastname: Mazenq
authors.forename: Jean
authors.initials: J
authors.lastname: Costecalde
authors.forename: Denis
authors.initials: D
authors.lastname: Rèmiens
authors.forename: Caroline
authors.initials: C
authors.lastname: Soyer
authors.forename: Liviu
authors.initials: L
authors.lastname: Nicu