title: Note: micro-cantilevers with AlN actuators and PtSi tips for multi-frequency atomic force microscopy.
abstract: We report the design, fabrication, and characterization of cantilevers with integrated AlN actuators and conductive PtSi tips for multi-frequency atomic force microscopy. These cantilevers also possess a stepped-rectangular geometry. The excellent dynamic behavior of these cantilevers is investigated using both finite-element simulations and experimental methods. Several imaging experiments are presented to illustrate the efficacy and versatility of these cantilevers.
authors.affiliation: IBM Research-Zurich, 8803 Rüschlikon, Switzerland. ase@zurich.ibm.com
authors.forename: Abu
authors.initials: A
authors.lastname: Sebastian
authors.forename: Naveen
authors.initials: N
authors.lastname: Shamsudhin
authors.forename: Hugo
authors.initials: H
authors.lastname: Rothuizen
authors.forename: Ute
authors.initials: U
authors.lastname: Drechsler
authors.forename: Wabe W
authors.initials: WW
authors.lastname: Koelmans
authors.forename: Harish
authors.initials: H
authors.lastname: Bhaskaran
authors.forename: Hans Joachim
authors.initials: HJ
authors.lastname: Quenzer
authors.forename: Bernhard
authors.initials: B
authors.lastname: Wagner
authors.forename: Michel
authors.initials: M
authors.lastname: Despont