title: Electromechanical tuning of vertically-coupled photonic crystal nanobeams.
abstract: We present the design, the fabrication and the characterization of a tunable one-dimensional (1D) photonic crystal cavity (PCC) etched on two vertically-coupled GaAs nanobeams. A novel fabrication method which prevents their adhesion under capillary forces is introduced. We discuss a design to increase the flexibility of the structure and we demonstrate a large reversible and controllable electromechanical wavelength tuning (> 15 nm) of the cavity modes.
authors.affiliation: COBRA Research Institute, Eindhoven University of Technology, Eindhoven, The Netherlands. l.midolo@tue.nl
authors.forename: L
authors.initials: L
authors.lastname: Midolo
authors.forename: S N
authors.initials: SN
authors.lastname: Yoon
authors.forename: F
authors.initials: F
authors.lastname: Pagliano
authors.forename: T
authors.initials: T
authors.lastname: Xia
authors.forename: F W M
authors.initials: FW
authors.lastname: van Otten
authors.forename: M
authors.initials: M
authors.lastname: Lermer
authors.forename: S
authors.initials: S
authors.lastname: Höfling
authors.forename: A
authors.initials: A
authors.lastname: Fiore
mesh_terms: D017076:Computer-Aided Design; D004867:Equipment Design; D019544:Equipment Failure Analysis; D008027:Light; D055617:Micro-Electrical-Mechanical Systems / Q000295:instrumentation*; D036103:Nanotechnology / Q000295:instrumentation*; D017785:Photons; D020349:Surface Plasmon Resonance / Q000295:instrumentation*