title: Self-aligned silicon fins in metallic slits as a platform for planar wavelength-selective nanoscale resonant photodetectors.
abstract: We propose and demonstrate a novel nanoscale resonant metal-semiconductor-metal (MSM) photodetector structure based on silicon fins self-aligned to metallic slits. This geometry allows the center wavelength of the photodetector's spectral response to be controlled by the silicon fin width, allowing multiple detectors, each sensitive to a different wavelength, to be fabricated in a single-step process. In addition, the detectors are highly efficient with simulations showing ~67% of the light (λ = 800 nm) incident on the silicon fin being absorbed in a region of thickness ~170 nm whereas the absorption length at the same wavelength is ~10 µm. This approach is promising for the development of multispectral imaging sensors and low-capacitance photodetectors for short-range optical interconnects.
authors.affiliation: Department of Electrical Engineering, Edward L. Ginzton Laboratory, Stanford University, California 94305, USA. kcbalram@stanford.edu
authors.forename: Krishna C
authors.initials: KC
authors.lastname: Balram
authors.forename: David A B
authors.initials: DA
authors.lastname: Miller
mesh_terms: D004867:Equipment Design; D019544:Equipment Failure Analysis; D008027:Light; D053768:Metal Nanoparticles / Q000737:chemistry* / Q000528:radiation effects*; D036103:Nanotechnology / Q000295:instrumentation*; D010783:Photometry / Q000295:instrumentation*; D012666:Semiconductors; D012825:Silicon / Q000737:chemistry*; D020349:Surface Plasmon Resonance / Q000295:instrumentation*
chemical_list: D012825:Silicon