title: Profile estimation for Pt submicron wire on rough Si substrate from experimental data.
abstract: An efficient forward scattering model is constructed for penetrable 2D submicron particles on rough substrates. The scattering and the particle-surface interaction are modeled using discrete sources with complex images. The substrate micro-roughness is described by a heuristic surface transfer function. The forward model is applied in the numerical estimation of the profile of a platinum (Pt) submicron wire on rough silicon (Si) substrate, based on experimental Bidirectional Reflectance Distribution Function (BRDF) data.
authors.affiliation: Department of Process and Chemical Engineering, University of Bremen, Badgasteiner Str. 3, D-28359 Bremen, Germany. mirza@iwt.uni-bremen.de
authors.forename: Mirza
authors.initials: M
authors.lastname: Karamehmedović
authors.forename: Poul-Erik
authors.initials: PE
authors.lastname: Hansen
authors.forename: Kai
authors.initials: K
authors.lastname: Dirscherl
authors.forename: Emir
authors.initials: E
authors.lastname: Karamehmedović
authors.forename: Thomas
authors.initials: T
authors.lastname: Wriedt