title: Low-loss optical waveguides and Y-branch splitters in lithium niobate fabricated by MeV oxygen ions with low dose.
abstract: Single-mode optical waveguides in LiNbO(3) substrate with loss as low as 0.17dB/cm were fabricated by a multi-energy low-dose ion implantation technology and cumulative annealing treatment. A waveguide Y-Branch splitter was demonstrated. Index profile in waveguide is described based on the ion implantation-induced damage profile, and propagation property in waveguide is simulated. Simulation results show a good consistence with the measured ones.
authors.affiliation: School of Physics, Shandong University, Jinan 250100, China.
authors.forename: Hui
authors.initials: H
authors.lastname: Hu
authors.forename: Fei
authors.initials: F
authors.lastname: Lu
authors.forename: Xue Lin
authors.initials: XL
authors.lastname: Wang
authors.forename: Feng
authors.initials: F
authors.lastname: Chen
authors.forename: Ke Ming
authors.initials: KM
authors.lastname: Wang