title: Fast multiphoton microfabrication of freeform polymer microstructures by spatiotemporal focusing and patterned excitation.
abstract: One of the limits of conventional scanning multiphoton microfabrication is its low throughput due to point-by-point processing. In order to surpass this limit, a multiphoton microfabrication system based on spatiotemporal focusing and patterned excitation has been developed to quickly provide three-dimensional (3D) freeform polymer microstructures. 3D freeform polymer microstructures using Rose Bengal as the photoinitiator are created by sequentially stacking two-dimensional fabricating patterns. The size of each fabrication area can be larger than 300 × 170 μm2 (full width at half maximum). Compared to conventional scanning multiphoton excitation and fixed mask pattern generation, this approach offers freeform microstructures and a greater than three-order increase in fabrication speed. Furthermore, the system is capable of optically sectioning the fabricated microstructures for providing 3D inspection.
authors.affiliation: Department of Photonics, National Cheng Kung University, Tainan 701, Taiwan.
authors.forename: Yi-Cheng
authors.initials: YC
authors.lastname: Li
authors.forename: Li-Chung
authors.initials: LC
authors.lastname: Cheng
authors.forename: Chia-Yuan
authors.initials: CY
authors.lastname: Chang
authors.forename: Chi-Hsiang
authors.initials: CH
authors.lastname: Lien
authors.forename: Paul J
authors.initials: PJ
authors.lastname: Campagnola
authors.forename: Shean-Jen
authors.initials: SJ
authors.lastname: Chen
mesh_terms: D008420:Manufactured Materials / Q000032:analysis* / Q000528:radiation effects*; D017785:Photons; D011108:Polymers / Q000737:chemistry* / Q000528:radiation effects*; D011829:Radiation Dosage
chemical_list: D011108:Polymers