title: Complex refractive index variation in proton-damaged diamond.
abstract: An accurate control of the optical properties of single crystal diamond during microfabrication processes such as ion implantation plays a crucial role in the engineering of integrated photonic devices. In this work we present a systematic study of the variation of both real and imaginary parts of the refractive index of single crystal diamond, when damaged with 2 and 3 MeV protons at low-medium fluences (range: 10(15) - 10(17) cm(-2)). After implanting in 125 × 125 μm(2) areas with a scanning ion microbeam, the variation of optical pathlength of the implanted regions was measured with laser interferometric microscopy, while their optical transmission was studied using a spectrometric set-up with micrometric spatial resolution. On the basis of a model taking into account the strongly non-uniform damage profile in the bulk sample, the variation of the complex refractive index as a function of damage density was evaluated.
authors.affiliation: Energetics Department and INFN Sezione di Firenze, University of Firenze, Firenze, Italy. lagomarsino@fi.infn.it
authors.forename: S
authors.initials: S
authors.lastname: Lagomarsino
authors.forename: P
authors.initials: P
authors.lastname: Olivero
authors.forename: S
authors.initials: S
authors.lastname: Calusi
authors.forename: D Gatto
authors.initials: DG
authors.lastname: Monticone
authors.forename: L
authors.initials: L
authors.lastname: Giuntini
authors.forename: M
authors.initials: M
authors.lastname: Massi
authors.forename: S
authors.initials: S
authors.lastname: Sciortino
authors.forename: A
authors.initials: A
authors.lastname: Sytchkova
authors.forename: A
authors.initials: A
authors.lastname: Sordini
authors.forename: M
authors.initials: M
authors.lastname: Vannoni
mesh_terms: D003198:Computer Simulation; D018130:Diamond / Q000737:chemistry* / Q000528:radiation effects*; D008027:Light; D008956:Models, Chemical; D011522:Protons; D012031:Refractometry / Q000379:methods*; D012542:Scattering, Radiation
chemical_list: D011522:Protons; D018130:Diamond