title: Improved signal model for confocal sensors accounting for object depending artifacts.
abstract: The conventional signal model of confocal sensors is well established and has proven to be exceptionally robust especially when measuring rough surfaces. Its physical derivation however is explicitly based on plane surfaces or point like objects, respectively. Here we show experimental results of a confocal point sensor measurement of a surface standard. The results illustrate the rise of severe artifacts when measuring curved surfaces. On this basis, we present a systematic extension of the conventional signal model that is proven to be capable of qualitatively explaining these artifacts.
authors.affiliation: Institute for Technical Optics, Stuttgart Research Centre of Photonic Engineering (SCoPE), University Stuttgart, Pfaffenwaldring 9, 70569 Stuttgart, Germany. mauch@ito.uni-stuttgart.de
authors.forename: Florian
authors.initials: F
authors.lastname: Mauch
authors.forename: Wolfram
authors.initials: W
authors.lastname: Lyda
authors.forename: Marc
authors.initials: M
authors.lastname: Gronle
authors.forename: Wolfgang
authors.initials: W
authors.lastname: Osten
mesh_terms: D000465:Algorithms; D016477:Artifacts; D003198:Computer Simulation; D017076:Computer-Aided Design; D004867:Equipment Design; D019544:Equipment Failure Analysis; D007089:Image Enhancement / Q000379:methods*; D007090:Image Interpretation, Computer-Assisted / Q000379:methods*; D007909:Lenses; D018613:Microscopy, Confocal / Q000295:instrumentation*; D008962:Models, Theoretical; D015203:Reproducibility of Results; D012680:Sensitivity and Specificity