title: Narrowband multispectral filter set for visible band.
abstract: We design, fabricate and characterise a narrowband Fabry-Pérot multispectral filter set for the visible range (400-750 nm) that is suitable for integration onto complementary-metal oxide-semiconductor image sensors. We reduce the fabrication steps by fixing the physical cavity length and altering the effective optical length instead. Using electron-beam lithography, a sub-wavelength hole array is patterned in a silicon nitride cavity layer, backfilled with poly(methyl methacrylate), and bounded by aluminium mirrors to create 23 filters with full-width half-maximums of 22-46 nm. Additionally, for colourmetric reproduction applications, using as few as 10 filters gives a colour difference (CIEDE2000) of 0.072, better than trichromatic filters.
authors.affiliation: School of Engineering, University of Glasgow, Glasgow G12 8LT, UK.
authors.forename: K
authors.initials: K
authors.lastname: Walls
authors.forename: Q
authors.initials: Q
authors.lastname: Chen
authors.forename: J
authors.initials: J
authors.lastname: Grant
authors.forename: S
authors.initials: S
authors.lastname: Collins
authors.forename: D R S
authors.initials: DR
authors.lastname: Cumming
authors.forename: T D
authors.initials: TD
authors.lastname: Drysdale
mesh_terms: D003124:Colorimetry / Q000295:instrumentation*; D017076:Computer-Aided Design; D004867:Equipment Design; D019544:Equipment Failure Analysis; D005374:Filtration / Q000295:instrumentation*; D007368:Interferometry / Q000295:instrumentation*; D055096:Optical Devices