title: A physically transient form of silicon electronics.
abstract: A remarkable feature of modern silicon electronics is its ability to remain physically invariant, almost indefinitely for practical purposes. Although this characteristic is a hallmark of applications of integrated circuits that exist today, there might be opportunities for systems that offer the opposite behavior, such as implantable devices that function for medically useful time frames but then completely disappear via resorption by the body. We report a set of materials, manufacturing schemes, device components, and theoretical design tools for a silicon-based complementary metal oxide semiconductor (CMOS) technology that has this type of transient behavior, together with integrated sensors, actuators, power supply systems, and wireless control strategies. An implantable transient device that acts as a programmable nonantibiotic bacteriocide provides a system-level example.
authors.affiliation: Department of Materials Science and Engineering, University of Illinois at Urbana-Champaign, Urbana, IL 61801, USA.
authors.forename: Suk-Won
authors.initials: SW
authors.lastname: Hwang
authors.forename: Hu
authors.initials: H
authors.lastname: Tao
authors.forename: Dae-Hyeong
authors.initials: DH
authors.lastname: Kim
authors.forename: Huanyu
authors.initials: H
authors.lastname: Cheng
authors.forename: Jun-Kyul
authors.initials: JK
authors.lastname: Song
authors.forename: Elliott
authors.initials: E
authors.lastname: Rill
authors.forename: Mark A
authors.initials: MA
authors.lastname: Brenckle
authors.forename: Bruce
authors.initials: B
authors.lastname: Panilaitis
authors.forename: Sang Min
authors.initials: SM
authors.lastname: Won
authors.forename: Yun-Soung
authors.initials: YS
authors.lastname: Kim
authors.forename: Young Min
authors.initials: YM
authors.lastname: Song
authors.forename: Ki Jun
authors.initials: KJ
authors.lastname: Yu
authors.forename: Abid
authors.initials: A
authors.lastname: Ameen
authors.forename: Rui
authors.initials: R
authors.lastname: Li
authors.forename: Yewang
authors.initials: Y
authors.lastname: Su
authors.forename: Miaomiao
authors.initials: M
authors.lastname: Yang
authors.forename: David L
authors.initials: DL
authors.lastname: Kaplan
authors.forename: Mitchell R
authors.initials: MR
authors.lastname: Zakin
authors.forename: Marvin J
authors.initials: MJ
authors.lastname: Slepian
authors.forename: Yonggang
authors.initials: Y
authors.lastname: Huang
authors.forename: Fiorenzo G
authors.initials: FG
authors.lastname: Omenetto
authors.forename: John A
authors.initials: JA
authors.lastname: Rogers
mesh_terms: D020341:Absorbable Implants; D000818:Animals; D000900:Anti-Bacterial Agents; D011211:Electric Power Supplies; D004581:Electronics; D008670:Metals; D051379:Mice; D008807:Mice, Inbred BALB C; D010087:Oxides; D012666:Semiconductors; D012825:Silicon; D014173:Transistors, Electronic; D059015:Wireless Technology
chemical_list: D000900:Anti-Bacterial Agents; D008670:Metals; D010087:Oxides; D012825:Silicon