title: Fabrication and characterization of suspended SiO2 ridge optical waveguides and the devices.
abstract: Novel suspended SiO(2) ridge optical waveguides on silicon are fabricated and characterized. The present suspended SiO(2) ridge optical waveguide has a SiO(2) ridge core surrounded by air. The propagation loss and the bend loss measured are about 0.385dB/cm and 0.037dB/90° respectively for the fabricated 1 μm-wide waveguides with a bending radius of 100 μm when operating at the wavelength of 1550 nm. With the present suspended SiO(2) optical waveguides, a small racetrack resonator with a radius of 100 μm is also demonstrated and the measured Q-factor is about 3160.
authors.affiliation: Centre for Optical and Electromagnetic Research, State Key Laboratory for Modern Optical Instrumentation, Zhejiang Provincial Key Laboratory for Sensing Technologies, Zhejiang University, Zijingang Campus, Hangzhou 310058, China.
authors.forename: Pengxin
authors.initials: P
authors.lastname: Chen
authors.forename: Yunpeng
authors.initials: Y
authors.lastname: Zhu
authors.forename: Yaocheng
authors.initials: Y
authors.lastname: Shi
authors.forename: Daoxin
authors.initials: D
authors.lastname: Dai
authors.forename: Sailing
authors.initials: S
authors.lastname: He
mesh_terms: D004867:Equipment Design; D019544:Equipment Failure Analysis; D008027:Light; D012031:Refractometry / Q000295:instrumentation*; D012542:Scattering, Radiation; D012822:Silicon Dioxide / Q000737:chemistry*; D020349:Surface Plasmon Resonance / Q000295:instrumentation*
chemical_list: D012822:Silicon Dioxide