title: Angle-resolved environmental X-ray photoelectron spectroscopy: a new laboratory setup for photoemission studies at pressures up to 0.4 Torr.
abstract: The paper presents the development and demonstrates the capabilities of a new laboratory-based environmental X-ray photoelectron spectroscopy system incorporating an electrostatic lens and able to acquire spectra up to 0.4 Torr. The incorporation of a two-dimensional detector provides imaging capabilities and allows the acquisition of angle-resolved data in parallel mode over an angular range of 14° without tilting the sample. The sensitivity and energy resolution of the spectrometer have been investigated by analyzing a standard Ag foil both under high vacuum (10(-8) Torr) conditions and at elevated pressures of N(2) (0.4 Torr). The possibility of acquiring angle-resolved data at different pressures has been demonstrated by analyzing a silicon/silicon dioxide (Si/SiO(2)) sample. The collected angle-resolved spectra could be effectively used for the determination of the thickness of the native silicon oxide layer.
authors.affiliation: Department of Mechanical Engineering and Applied Mechanics, University of Pennsylvania, 220 S. 33rd Street, Philadelphia, Pennsylvania 19104, USA.
authors.forename: F
authors.initials: F
authors.lastname: Mangolini
authors.forename: J
authors.initials: J
authors.lastname: Åhlund
authors.forename: G E
authors.initials: GE
authors.lastname: Wabiszewski
authors.forename: V P
authors.initials: VP
authors.lastname: Adiga
authors.forename: P
authors.initials: P
authors.lastname: Egberts
authors.forename: F
authors.initials: F
authors.lastname: Streller
authors.forename: K
authors.initials: K
authors.lastname: Backlund
authors.forename: P G
authors.initials: PG
authors.lastname: Karlsson
authors.forename: B
authors.initials: B
authors.lastname: Wannberg
authors.forename: R W
authors.initials: RW
authors.lastname: Carpick