title: Profile measurement of transparent inclined surface with transmitted differential interference contrast shearing interferometer.
abstract: A quantitative phase shifting differential interference contrast (PS-DIC) shearing interferometer is adopted to measure the profile of transparent specimen with inclined surface. The effects of the incline angle on DIC measurement accuracy were studied. The optical model of the test system was constructed and the measurement of surface with various incline angles ranging from 5° to 60° was simulated. The experiments validate the simulation model and show the feasibility of profile reconstruction of inclined structure. It is interested to find that even with an inclined angle of 15°, unwrapping technique is required to make the measurement more accurate. In addition, the measurement can be further improved by taking into account the effects of the change in shear distance on the optical path difference. This study provides useful information that should be considered for complex geometry measurement with quantitative DIC technique.
authors.affiliation: Department of Power Mechanical Engineering, National Tsing Hua University, Hsinchu, Taiwan.
authors.forename: Sheng-Kang
authors.initials: SK
authors.lastname: Yu
authors.forename: Wei-Lun
authors.initials: WL
authors.lastname: Chen
authors.forename: Ting-Kun
authors.initials: TK
authors.lastname: Liu
authors.forename: Shih-Chieh
authors.initials: SC
authors.lastname: Lin
mesh_terms: D004867:Equipment Design; D019544:Equipment Failure Analysis; D007368:Interferometry / Q000295:instrumentation*; D008420:Manufactured Materials / Q000032:analysis*; D008422:Materials Testing / Q000295:instrumentation*; D012031:Refractometry / Q000295:instrumentation*; D013499:Surface Properties