Electrochemical X-ray photolithography.
Department of Materials Science, Lomonosov Moscow State University, Moscow, 119991, Russia. eliseev@inorg.chem.msu.ru
Andrei A
AA
Eliseev
Nina A
NA
Sapoletova
Irina
I
Snigireva
Anatoly
A
Snigirev
Kirill S
KS
Napolskii