title: Large-area fabrication of periodic sub-15 nm-width single-layer graphene nanorings.
abstract: A periodically aligned array of graphene nanorings (GRNRs) with a sub-15 nm linewidth at a pitch of 450 nm is fabricated with a large area, 9 cm(2) , through conventional nanoimprint lithography coupled with sophisticated metal deposition and plasma-etching processes. The existence of the single-layer GRNRs is verified by various techniques.
authors.affiliation: School of Materials Science and Engineering, Gwangju Institute of Science and Technology (GIST), 261 Cheomdan-gwagiro, Buk-gu, Gwangju 500-712, Republic of Korea.
authors.forename: Yusin
authors.initials: Y
authors.lastname: Pak
authors.forename: Huisu
authors.initials: H
authors.lastname: Jeong
authors.forename: Kwang-Ho
authors.initials: KH
authors.lastname: Lee
authors.forename: Hui
authors.initials: H
authors.lastname: Song
authors.forename: Taehyeon
authors.initials: T
authors.lastname: Kwon
authors.forename: Jungsu
authors.initials: J
authors.lastname: Park
authors.forename: Woojin
authors.initials: W
authors.lastname: Park
authors.forename: Mun-Seok
authors.initials: MS
authors.lastname: Jeong
authors.forename: Takhee
authors.initials: T
authors.lastname: Lee
authors.forename: Sunae
authors.initials: S
authors.lastname: Seo
authors.forename: Gun-Young
authors.initials: GY
authors.lastname: Jung
mesh_terms: D006108:Graphite / Q000737:chemistry*; D053758:Nanoparticles / Q000737:chemistry*; D036103:Nanotechnology; D010316:Particle Size; D013499:Surface Properties
chemical_list: D006108:Graphite