title: Programmable sub-nanometer sculpting of graphene with electron beams.
abstract: Electron beams in transmission electron microscopes are very attractive to engineer and pattern graphene toward all-carbon device fabrication. The use of condensed beams typically used for sequential raster imaging is particularly exciting since they potentially provide high degrees of precision. However, technical difficulties, such as the formation of electron beam induced deposits on sample surfaces, have hindered the development of this technique. We demonstrate how one can successfully use a condensed electron beam, either with or without C(s) correction, to structure graphene with sub-nanometer precision in a programmable manner. We further demonstrate the potential of the developed technique by combining it with an established route to engineer graphene nanoribbons to single-atom carbon chains.
authors.affiliation: IFW Dresden, PF 27 01 16, 01171 Dresden, Germany.
authors.forename: Felix
authors.initials: F
authors.lastname: Börrnert
authors.forename: Lei
authors.initials: L
authors.lastname: Fu
authors.forename: Sandeep
authors.initials: S
authors.lastname: Gorantla
authors.forename: Martin
authors.initials: M
authors.lastname: Knupfer
authors.forename: Bernd
authors.initials: B
authors.lastname: Büchner
authors.forename: Mark H
authors.initials: MH
authors.lastname: Rümmeli
mesh_terms: D003460:Crystallization / Q000379:methods*; D004583:Electrons; D006108:Graphite / Q000737:chemistry* / Q000528:radiation effects*; D046911:Macromolecular Substances / Q000737:chemistry / Q000528:radiation effects; D008422:Materials Testing; D008968:Molecular Conformation / Q000528:radiation effects; D054802:Molecular Imprinting / Q000379:methods*; D049329:Nanostructures / Q000737:chemistry* / Q000528:radiation effects / Q000648:ultrastructure*; D010316:Particle Size; D013499:Surface Properties / Q000528:radiation effects
chemical_list: D046911:Macromolecular Substances; D006108:Graphite