title: A 30 nm-resolution hard X-ray microscope with X-ray fluorescence mapping capability at BSRF.
abstract: A full-field transmission X-ray microscope (TXM) operating continuously from 5 keV to 12 keV with fluorescence mapping capability has been designed and constructed at the Beijing Synchrotron Radiation Facility, a first-generation synchrotron radiation facility operating at 2.5 GeV. Spatial resolution better than 30 nm has been demonstrated using a Siemens star pattern in both absorption mode and Zernike phase-contrast mode. A scanning-probe mode fluorescence mapping capability integrated with the TXM has been shown to provide 50 p.p.m. sensitivity for trace elements with a spatial resolution (limited by probing beam spot size) of 20 µm. The optics design, testing of spatial resolution and fluorescence sensitivity are presented here, including performance measurement results.
authors.affiliation: Beijing Synchrotron Radiation Facility, Institute of High Energy Physics, Chinese Academy of Sciences, Beijing, People's Republic of China.
authors.forename: Qingxi
authors.initials: Q
authors.lastname: Yuan
authors.forename: Kai
authors.initials: K
authors.lastname: Zhang
authors.forename: Youli
authors.initials: Y
authors.lastname: Hong
authors.forename: Wanxia
authors.initials: W
authors.lastname: Huang
authors.forename: Kun
authors.initials: K
authors.lastname: Gao
authors.forename: Zhili
authors.initials: Z
authors.lastname: Wang
authors.forename: Peiping
authors.initials: P
authors.lastname: Zhu
authors.forename: Jeff
authors.initials: J
authors.lastname: Gelb
authors.forename: Andrei
authors.initials: A
authors.lastname: Tkachuk
authors.forename: Benjamin
authors.initials: B
authors.lastname: Hornberger
authors.forename: Michael
authors.initials: M
authors.lastname: Feser
authors.forename: Wenbing
authors.initials: W
authors.lastname: Yun
authors.forename: Ziyu
authors.initials: Z
authors.lastname: Wu