title: Fabrication of high sensitivity carbon microcoil pressure sensors.
abstract: This work demonstrates a highly sensitive pressure sensor that was fabricated using carbon microcoils (CMCs) and polydimethylsiloxane (PDMS). CMCs were grown by chemical vapor deposition using various ratios of Fe-Sn catalytic solution. The pressure sensor has a sandwiched structure, in which the as-grown CMCs were inserted between two PDMS layers. The pressure sensor exhibits piezo-resistivity changes in response to mechanical loading using a load cell system. The yields of the growth of CMCs at a catalyst proportion of Fe:Sn = 95:5 reach 95%. Experimental results show that the sensor achieves a high sensitivity of 0.93%/kPa from the CMC yield of 95%. The sensitivity of the pressure sensor increases with increasing yield of CMCs. The demonstrated pressure sensor shows the advantage of high sensitivity and is suitable for mass production.
authors.affiliation: Department of Mechanical Engineering, National Taiwan University, Taipei 10617, Taiwan. r92522629@ntu.edu.tw
authors.forename: Chih-Chung
authors.initials: CC
authors.lastname: Su
authors.forename: Chen-Hung
authors.initials: CH
authors.lastname: Li
authors.forename: Neng-Kai
authors.initials: NK
authors.lastname: Chang
authors.forename: Feng
authors.initials: F
authors.lastname: Gao
authors.forename: Shuo-Hung
authors.initials: SH
authors.lastname: Chang
keywords: carbon microcoils; chemical vapor deposition; flexible sensor