title: Hazard identification of powder generated from a chemical vapor deposition process in the semiconductor manufacturing industry.
authors.affiliation: Samsung Health Research Institute, Samsung Electronics Co. Ltd., Yongin-City, Gyeonggi-do, Republic of Korea.
authors.forename: Kwang-Min
authors.initials: KM
authors.lastname: Choi
authors.forename: Tai-Hyoung
authors.initials: TH
authors.lastname: Kim
authors.forename: Kwan-Sick
authors.initials: KS
authors.lastname: Kim
authors.forename: Soo-Geun
authors.initials: SG
authors.lastname: Kim
mesh_terms: D000395:Air Pollutants, Occupational / Q000032:analysis* / Q000737:chemistry*; D015386:Hazardous Substances / Q000032:analysis*; D006801:Humans; D011208:Powders / Q000737:chemistry / Q000302:isolation & purification; D056910:Republic of Korea; D012666:Semiconductors
chemical_list: D000395:Air Pollutants, Occupational; D015386:Hazardous Substances; D011208:Powders