title: A scanning tunneling microscope with a scanning range from hundreds of micrometers down to nanometer resolution.
abstract: A beetle type stage and a flexure scanning stage are combined to form a two stages scanning tunneling microscope (STM). It operates at room temperature in ultrahigh vacuum and is capable of scanning areas up to 300 μm × 450 μm down to resolution on the nanometer scale. This multi-scale STM has been designed and constructed in order to investigate prestructured metallic or semiconducting micro- and nano-structures in real space from atomic-sized structures up to the large-scale environment. The principle of the instrument is demonstrated on two different systems. Gallium nitride based micropillars demonstrate scan areas up to hundreds of micrometers; a Au(111) surface demonstrates nanometer resolution.
authors.affiliation: Institut für Festkörperphysik, Abteilung ATMOS, Leibniz Universität Hannover, Appelstr. 2, D-30167 Hannover, Germany.
authors.forename: Fatih
authors.initials: F
authors.lastname: Kalkan
authors.forename: Christopher
authors.initials: C
authors.lastname: Zaum
authors.forename: Karina
authors.initials: K
authors.lastname: Morgenstern