title: Integration of Metallic Nanostructures in Fluidic Channels for Fluorescence and Raman Enhancement by Nanoimprint Lithography and Lift-off on Compositional Resist Stack.
abstract: We present and demonstrate a novel fabrication method to integrate metallic nanostructures into fluidic systems, using nanoimprint lithography and lift-off on a compositional resist stack, which consists of multi-layers of SiO(2) and polymer patterned from different fabrication steps. The lift-off of the stack allows the final nano-features precisely aligned in the proper locations inside fluidic channels. The method provides high-throughput low-cost patterning and compatibility with various fluidic channel designs, and will be useful for fluorescence and Raman scattering enhancement in nano-fluidic systems.
authors.affiliation: Nanostructure Laboratory, Department of Electrical Engineering, Princeton University.
authors.forename: Chao
authors.initials: C
authors.lastname: Wang
authors.forename: Stephen Y
authors.initials: SY
authors.lastname: Chou