title: Direct nanopatterning of 100 nm metal oxide periodic structures by Deep-UV immersion lithography.
abstract: Deep-UV lithography using high-efficiency phase mask has been developed to print 100 nm period grating on sol-gel based thin layer. High efficiency phase mask has been designed to produce a high-contrast interferogram (periodic fringes) under water immersion conditions for 244 nm laser. The demonstration has been applied to a new developed immersion-compatible sol-gel layer. A sol-gel photoresist prepared from zirconium alkoxides caped with methacrylic acids was developed to achieve 50 nm resolution in a single step exposure. The nanostructures can be thermally annealed into ZrO(2). Such route considerably simplifies the process for elaborating nanopatterned surfaces of transition metal oxides, and opens new routes for integrating materials of interest for applications in the field of photocatalysis, photovoltaic, optics, photonics or microelectronics.
authors.affiliation: Institut de Science des Matériaux de Mulhouse (IS2M), CNRS ‐ LRC 7228, Université de Haute Alsace, 15 rue Jean Starcky, Mulhouse, France.
authors.forename: Fabrice
authors.initials: F
authors.lastname: Stehlin
authors.forename: Yannick
authors.initials: Y
authors.lastname: Bourgin
authors.forename: Arnaud
authors.initials: A
authors.lastname: Spangenberg
authors.forename: Yves
authors.initials: Y
authors.lastname: Jourlin
authors.forename: Olivier
authors.initials: O
authors.lastname: Parriaux
authors.forename: Stéphanie
authors.initials: S
authors.lastname: Reynaud
authors.forename: Fernand
authors.initials: F
authors.lastname: Wieder
authors.forename: Olivier
authors.initials: O
authors.lastname: Soppera
mesh_terms: D000433:1-Propanol / Q000737:chemistry*; D007368:Interferometry; D036103:Nanotechnology / Q000379:methods*; D010087:Oxides / Q000737:chemistry*; D011327:Printing / Q000379:methods*; D014466:Ultraviolet Rays; D015040:Zirconium / Q000737:chemistry*
chemical_list: D010087:Oxides; D000433:1-Propanol; D015040:Zirconium; C028541:zirconium oxide