title: Active aberration- and point-spread-function control in direct laser writing.
abstract: We control the point-spread-function of high numerical aperture objectives used for direct laser writing with a spatial light modulator. Combining aberration correction with different types of amplitude filters to reduce the aspect ratio of the point-spread-function enhances the structural and optical quality of woodpile photonic crystals. Here, aberration correction is crucial to ensure the functionality of the filters. Measured point-spread-functions compare well with numerical calculations and with structures generated by direct laser writing. The shaped point-spread-function not only influences the maximum achievable three-dimensional resolution but also proximity effect and optical performance of woodpile photonic crystals.
authors.affiliation: Physics department and research center OPTIMAS, University of Kaiserslautern, 67663 Kaiserslautern, Germany. erik.waller@physik.uni-kl.de
authors.forename: Erik H
authors.initials: EH
authors.lastname: Waller
authors.forename: Michael
authors.initials: M
authors.lastname: Renner
authors.forename: Georg
authors.initials: G
authors.lastname: von Freymann