title: Non-ablative texturing of silicon surface with a continuous wave fiber laser.
abstract: Laser surface texturing based on ablation has been widely used, but hardly any reports can be found on non-ablative laser surface texturing. Silicon is highly transparent to the infrared wavelength of fiber laser (λ = 1090 nm) and thus regarded as an unsuitable tool for the purpose of surface texturing. However, we succeeded in using a continuous wave fiber laser to produce regular arrays of sub-micron bumps on silicon surface. The approach is shown to be based on laser-induced oxidation of silicon.
authors.affiliation: School of Mechanical and Aerospace Engineering, Nanyang Technological University, 50 Nanyang Avenue, 639798 Singapore.
authors.forename: H
authors.initials: H
authors.lastname: Farrokhi
authors.forename: Wei
authors.initials: W
authors.lastname: Zhou
authors.forename: H Y
authors.initials: HY
authors.lastname: Zheng
authors.forename: Z L
authors.initials: ZL
authors.lastname: Li
mesh_terms: D005336:Fiber Optic Technology / Q000379:methods*; D007834:Lasers; D049329:Nanostructures / Q000737:chemistry* / Q000528:radiation effects*; D012825:Silicon / Q000737:chemistry* / Q000528:radiation effects*; D013499:Surface Properties / Q000528:radiation effects
chemical_list: D012825:Silicon