title: In situ doping of catalyst-free InAs nanowires.
abstract: We report on in situ doping of InAs nanowires grown by metal-organic vapor-phase epitaxy without any catalyst particles. The effects of various dopant precursors (Si(2)H(6), H(2)S, DETe, CBr(4)) on the nanowire morphology and the axial and radial growth rates are investigated to select dopants that enable control of the conductivity in a broad range and that concomitantly lead to favorable nanowire growth. In addition, the resistivity of individual wires was measured for different gas-phase concentrations of the dopants selected, and the doping density and mobility were extracted. We find that by using Si(2)H(6) axially and radially uniform doping densities up to 7 × 10(19) cm(-3) can be obtained without affecting the morphology or growth rates. For sulfur-doped InAs nanowires, we find that the distribution coefficient depends on the growth conditions, making S doping more difficult to control than Si doping. Moreover, above a critical sulfur gas-phase concentration, compensation takes place, limiting the maximum doping level to 2 × 10(19) cm(-3). Finally, we extract the specific contact resistivity as a function of doping concentration for Ti and Ni contacts.
authors.affiliation: IBM Research-Zürich, Säumerstrasse 4, 8803 Rüschlikon, Switzerland.
authors.forename: Hesham
authors.initials: H
authors.lastname: Ghoneim
authors.forename: Philipp
authors.initials: P
authors.lastname: Mensch
authors.forename: Heinz
authors.initials: H
authors.lastname: Schmid
authors.forename: Cedric D
authors.initials: CD
authors.lastname: Bessire
authors.forename: Reto
authors.initials: R
authors.lastname: Rhyner
authors.forename: Andreas
authors.initials: A
authors.lastname: Schenk
authors.forename: Charles
authors.initials: C
authors.lastname: Rettner
authors.forename: Siegfried
authors.initials: S
authors.lastname: Karg
authors.forename: Kirsten E
authors.initials: KE
authors.lastname: Moselund
authors.forename: Heike
authors.initials: H
authors.lastname: Riel
authors.forename: Mikael T
authors.initials: MT
authors.lastname: Björk