title: Optical characterization of fully programmable MEMS diffraction gratings.
abstract: We have fabricated and characterized fully programmable diffraction gratings consisting of 64 silicon micro-mirrors. The mirrors are 700µm long and 50µm wide with a fill factor of 90%. They are actuated electrostatically and move down by 1.25μm while showing negligible cross-talk and bowing as small as 0.14μm over 700μm. Extinction ratio up to 100 has been achieved by adjusting only 3 adjacent micro-mirrors. The gratings could operate either as light modulators up to 5μm or spectra generators up to 2.5μm.
authors.affiliation: Laboratoire d’Astrophysique de Marseille- LAM, Université Aix-Marseille & CNRS, UMR7326, 38 rue Frederic Joliot-Curie, 13388, Marseille Cedex 13, France. frederic.zamkotsian@oamp.fr
authors.forename: F
authors.initials: F
authors.lastname: Zamkotsian
authors.forename: B
authors.initials: B
authors.lastname: Timotijevic
authors.forename: R
authors.initials: R
authors.lastname: Lockhart
authors.forename: R P
authors.initials: RP
authors.lastname: Stanley
authors.forename: P
authors.initials: P
authors.lastname: Lanzoni
authors.forename: M
authors.initials: M
authors.lastname: Luetzelschwab
authors.forename: M
authors.initials: M
authors.lastname: Canonica
authors.forename: W
authors.initials: W
authors.lastname: Noell
authors.forename: M
authors.initials: M
authors.lastname: Tormen