title: Improved response of ZnO films for pyroelectric devices.
abstract: Increasing the temperature variation rate is a useful method for enhancing the response of pyroelectric devices. A three-dimensional ZnO film was fabricated by the aerosol deposition (AD) rapid process using the shadow mask method, which induces lateral temperature gradients on the sidewalls of the responsive element, thereby increasing the temperature variation rate. To enhance the quality of the film and reduce the concentration of defects, the film was further treated by laser annealing, and the integration of a comb-like top electrode enhanced the voltage response and reduced the response time of the resulting ZnO pyroelectric devices.
authors.affiliation: Department of Mechanical Design Engineering, National Formosa University, No. 64, Wunhua Rd., Huwei Township, Yunlin County 632, Taiwan. cchsiao@nfu.edu.tw
authors.forename: Chun-Ching
authors.initials: CC
authors.lastname: Hsiao
authors.forename: Shih-Yuan
authors.initials: SY
authors.lastname: Yu
mesh_terms: D000336:Aerosols / Q000737:chemistry; D003460:Crystallization; D004566:Electrodes; D049329:Nanostructures / Q000737:chemistry*; D013499:Surface Properties; D015034:Zinc Oxide / Q000737:chemistry*
chemical_list: D000336:Aerosols; D015034:Zinc Oxide