title: Tuning resistive switching on single-pulse doped multilayer memristors.
abstract: Short-period multilayers  containing ultrathin atomic layers of Al embedded in titanium dioxide (TiO(2)) film-here called single-pulse doped multilayers-are fabricated by atomic layer deposition (ALD) growth methods. The approach explored here is to use Al atoms through single-pulsed deposition to locally modify the chemical environment of TiO(2) films, establishing a chemical control over the resistive switching properties of metal/oxide/metal devices. We show that this simple methodology can be employed to produce well-defined and controlled electrical characteristics on oxide thin films without compound segregation. The increase in volume of the embedded Al(2)O(3) plays a crucial role in tuning the conductance of devices, as well as the switching bias. The stacking of these oxide compounds and their use in electrical devices is investigated with respect to possible crystalline phases and local compound formation via chemical recombination. It is shown that our method can be used to produce compounds that cannot be synthesized a priori by direct ALD growth procedures but are of interest due to specific properties such as thermal or chemical stability, electrical resistivity or electric field polarization possibilities. The monolayer doping discussed here impacts considerably on the broadening of the spectrum of performance and technological applications of ALD-based memristors, allowing for additional degrees of freedom in the engineering of oxide devices.
authors.affiliation: Institute for Integrative Nanosciences, IFW Dresden, Dresden, Germany. p.r.siles@ifw-dresden.de
authors.forename: Pablo F
authors.initials: PF
authors.lastname: Siles
authors.forename: Muriel
authors.initials: M
authors.lastname: de Pauli
authors.forename: Carlos Cesar
authors.initials: CC
authors.lastname: Bof Bufon
authors.forename: Sukarno O
authors.initials: SO
authors.lastname: Ferreira
authors.forename: Jefferson
authors.initials: J
authors.lastname: Bettini
authors.forename: Oliver G
authors.initials: OG
authors.lastname: Schmidt
authors.forename: Angelo
authors.initials: A
authors.lastname: Malachias