title: Cost-effective CMOS-compatible grating couplers with backside metal mirror and 69% coupling efficiency.
abstract: A highly efficient grating structure for the coupling between standard optical fibers and single-mode waveguides in the silicon-on-insulator platform realized in a CMOS fabrication process is presented. The cost-effective method introduces a backside metal mirror to the grating coupler without need of an extensive wafer-to-wafer bonding. A coupling efficiency of -1.6 dB (around 69%) near the telecommunication wavelength 1550 nm and a large 1 dB-bandwidth of 48 nm are achieved.
authors.affiliation: Institute of Electrical and Optical Communications Engineering, University of Stuttgart, Pfaffenwaldring 47, 70569 Stuttgart, Germany. wissem.sfarzaoui@int.uni-stuttgart.de
authors.forename: Wissem Sfar
authors.initials: WS
authors.lastname: Zaoui
authors.forename: María Félix
authors.initials: MF
authors.lastname: Rosa
authors.forename: Wolfgang
authors.initials: W
authors.lastname: Vogel
authors.forename: Manfred
authors.initials: M
authors.lastname: Berroth
authors.forename: Jörg
authors.initials: J
authors.lastname: Butschke
authors.forename: Florian
authors.initials: F
authors.lastname: Letzkus