title: Waveguide based compact silicon Schottky photodetector with enhanced responsivity in the telecom spectral band.
abstract: We experimentally demonstrate an on-chip compact and simple to fabricate silicon Schottky photodetector for telecom wavelengths operating on the basis of internal photoemission process. The device is realized using CMOS compatible approach of local-oxidation of silicon, which enables the realization of the photodetector and low-loss bus photonic waveguide at the same fabrication step. The photodetector demonstrates enhanced internal responsivity of 12.5mA/W for operation wavelength of 1.55µm corresponding to an internal quantum efficiency of 1%, about two orders of magnitude higher than our previously demonstrated results [22]. We attribute this improved detection efficiency to the presence of surface roughness at the boundary between the materials forming the Schottky contact. The combination of enhanced quantum efficiency together with a simple fabrication process provides a promising platform for the realization of all silicon photodetectors and their integration with other nanophotonic and nanoplasmonic structures towards the construction of monolithic silicon opto-electronic circuitry on-chip.
authors.affiliation: Department of Applied Physics, The Benin School of Engineering and Computer Science, The Center for Nanoscience and Nanotechnology, The Hebrew University of Jerusalem, Jerusalem, 91904, Israel.
authors.forename: Ilya
authors.initials: I
authors.lastname: Goykhman
authors.forename: Boris
authors.initials: B
authors.lastname: Desiatov
authors.forename: Jacob
authors.initials: J
authors.lastname: Khurgin
authors.forename: Joseph
authors.initials: J
authors.lastname: Shappir
authors.forename: Uriel
authors.initials: U
authors.lastname: Levy
mesh_terms: D004867:Equipment Design; D019544:Equipment Failure Analysis; D008904:Miniaturization; D010783:Photometry / Q000295:instrumentation*; D012666:Semiconductors; D012825:Silicon / Q000737:chemistry*; D020349:Surface Plasmon Resonance / Q000295:instrumentation*; D013685:Telecommunications / Q000295:instrumentation*
chemical_list: D012825:Silicon