title: Displacement interferometry with stabilization of wavelength in air.
abstract: We present a concept of suppression of the influence of variations of the refractive index of air in displacement measuring interferometry. The principle is based on referencing of wavelength of the coherent laser source in atmospheric conditions instead of traditional stabilization of the optical frequency and indirect evaluation of the refractive index of air. The key advantage is in identical beam paths of the position measuring interferometers and the interferometer used for the wavelength stabilization. Design of the optical arrangement presented here to verify the concept is suitable for real interferometric position sensing in technical practice especially where a high resolution measurement within some limited range in atmospheric conditions is needed, e.g. in nanometrology.
authors.affiliation: Institute of Scientific Instruments, Academy of Sciences of the Czech Republic, Brno, Czech Republic. joe@isibrno.cz
authors.forename: Josef
authors.initials: J
authors.lastname: Lazar
authors.forename: Miroslava
authors.initials: M
authors.lastname: Holá
authors.forename: Ondřej
authors.initials: O
authors.lastname: Cíp
authors.forename: Martin
authors.initials: M
authors.lastname: Cížek
authors.forename: Jan
authors.initials: J
authors.lastname: Hrabina
authors.forename: Zdeněk
authors.initials: Z
authors.lastname: Buchta
mesh_terms: D000388:Air; D001272:Atmosphere; D004867:Equipment Design; D007368:Interferometry / Q000295:instrumentation / Q000379:methods* / Q000592:standards; D007834:Lasers; D008962:Models, Theoretical; D036103:Nanotechnology / Q000295:instrumentation / Q000379:methods* / Q000592:standards; D012031:Refractometry / Q000295:instrumentation / Q000379:methods* / Q000592:standards