title: Low-temperature, high-performance solution-processed thin-film transistors with peroxo-zirconium oxide dielectric.
abstract: We demonstrated solution-processed thin film transistors on a peroxo-zirconium oxide (ZrO(2)) dielectric with a maximum temperature of 350 °C. The formation of ZrO(2) films was investigated by TG-DTA, FT-IR, and XPS analyses at various temperatures. We synthesized a zirconium oxide solution by adding hydrogen peroxide (H(2)O(2)). The H(2)O(2) forms peroxo groups in the ZrO(2) film producing a dense-amorphous phase and a smooth surface film. Because of these characteristics, the ZrO(2) film successfully blocked leakage current even in annealing at 300 °C. Finally, to demonstrate that the ZrO(2) film is dielectric, we fabricated thin-film transistors (TFTs) with a solution-processed channel layer of indium zinc oxide (IZO) on ZrO(2) films at 350 °C. These TFTs had a mobility of 7.21 cm(2)/(V s), a threshold voltage (V(th)) of 3.22 V, and a V(th) shift of 1.6 V under positive gate bias stress.
authors.affiliation: Department of Materials Science and Engineering, Yonsei University, 50 Yonsei-ro, Seodaemun-gu, Seoul, 120-749, Korea.
authors.forename: Jee Ho
authors.initials: JH
authors.lastname: Park
authors.forename: Young Bum
authors.initials: YB
authors.lastname: Yoo
authors.forename: Keun Ho
authors.initials: KH
authors.lastname: Lee
authors.forename: Woo Soon
authors.initials: WS
authors.lastname: Jang
authors.forename: Jin Young
authors.initials: JY
authors.lastname: Oh
authors.forename: Soo Sang
authors.initials: SS
authors.lastname: Chae
authors.forename: Hong Koo
authors.initials: HK
authors.lastname: Baik