title: Invited review article: high-speed flexure-guided nanopositioning: mechanical design and control issues.
abstract: Recent interest in high-speed scanning probe microscopy for high-throughput applications including video-rate atomic force microscopy and probe-based nanofabrication has sparked attention on the development of high-bandwidth flexure-guided nanopositioning systems (nanopositioners). Such nanopositioners are designed to move samples with sub-nanometer resolution with positioning bandwidth in the kilohertz range. State-of-the-art designs incorporate uniquely designed flexure mechanisms driven by compact and stiff piezoelectric actuators. This paper surveys key advances in mechanical design and control of dynamic effects and nonlinearities, in the context of high-speed nanopositioning. Future challenges and research topics are also discussed.
authors.affiliation: School of Electrical Engineering and Computer Science, The University of Newcastle, Callaghan, NSW 2308, Australia. yuenkuan.yong@newcastle.edu.au
authors.forename: Y K
authors.initials: YK
authors.lastname: Yong
authors.forename: S O R
authors.initials: SO
authors.lastname: Moheimani
authors.forename: B J
authors.initials: BJ
authors.lastname: Kenton
authors.forename: K K
authors.initials: KK
authors.lastname: Leang