title: Methane as an effective hydrogen source for single-layer graphene synthesis on Cu foil by plasma enhanced chemical vapor deposition.
abstract: A single-layer graphene is synthesized on Cu foil in the absence of H(2) flow by plasma enhanced chemical vapor deposition (PECVD). In lieu of an explicit H(2) flow, hydrogen species are produced during the methane decomposition process into their active species (CH(x<4)), assisted with the plasma. Notably, the early stage of growth depends strongly on the plasma power. The resulting grain size (the nucleation density) has a maximum (minimum) at 50 W and saturates when the plasma power is higher than 120 W because hydrogen partial pressures are effectively tuned by a simple control of the plasma power. Raman spectroscopy and transport measurements show that decomposed methane alone can provide a sufficient amount of hydrogen species for high-quality graphene synthesis by PECVD.
authors.affiliation: Graphene Research Institute, Sejong University, Seoul 143-747, Korea.
authors.forename: Yong Seung
authors.initials: YS
authors.lastname: Kim
authors.forename: Jae Hong
authors.initials: JH
authors.lastname: Lee
authors.forename: Young Duck
authors.initials: YD
authors.lastname: Kim
authors.forename: Sahng-Kyoon
authors.initials: SK
authors.lastname: Jerng
authors.forename: Kisu
authors.initials: K
authors.lastname: Joo
authors.forename: Eunho
authors.initials: E
authors.lastname: Kim
authors.forename: Jongwan
authors.initials: J
authors.lastname: Jung
authors.forename: Euijoon
authors.initials: E
authors.lastname: Yoon
authors.forename: Yun Daniel
authors.initials: YD
authors.lastname: Park
authors.forename: Sunae
authors.initials: S
authors.lastname: Seo
authors.forename: Seung-Hyun
authors.initials: SH
authors.lastname: Chun
mesh_terms: D003300:Copper / Q000737:chemistry*; D006108:Graphite / Q000737:chemistry*; D006859:Hydrogen / Q000737:chemistry*; D008422:Materials Testing; D008567:Membranes, Artificial; D053768:Metal Nanoparticles / Q000737:chemistry* / Q000648:ultrastructure; D008697:Methane / Q000737:chemistry*; D058626:Plasma Gases / Q000737:chemistry*; D013499:Surface Properties
chemical_list: D008567:Membranes, Artificial; D058626:Plasma Gases; D006108:Graphite; D003300:Copper; D006859:Hydrogen; D008697:Methane