title: Simultaneous determination of optical constants, thickness, and surface roughness of thin film from spectrophotometric measurements.
abstract: A model taking into consideration the refractive index inhomogeneity and surface roughness of a film was proposed for the simultaneous determination of the optical constants, thickness, and surface roughness of a single-layer thin film from spectrophotometric measurements. In the model, the rough surface was treated as an effective absorbing layer. The model was applied to determine simultaneously the parameters of single-layer MgF(2) thin films deposited on fused silica substrates by the oblique-angle deposition technique. The film thicknesses and rms surface roughnesses extracted from spectrophotometric measurements with the proposed model were in good agreement with the values measured by a spectroscopic ellipsometer and an atomic force microscope, respectively.
authors.affiliation: Institute of Optics and Electronics, Chinese Academy of Sciences, Chengdu 610209, China.
authors.forename: Chun
authors.initials: C
authors.lastname: Guo
authors.forename: Mingdong
authors.initials: M
authors.lastname: Kong
authors.forename: Weidong
authors.initials: W
authors.lastname: Gao
authors.forename: Bincheng
authors.initials: B
authors.lastname: Li