title: Conductive AFM for CNT characterization.
abstract: We report on and emphasize the versatility of conductive atomic force microscopy in characterizing vertically aligned carbon nanotubes (CNTs) aimed to be used in via interconnect technology. The study is conducted on multi-walled CNT arrays vertically grown on a copper-based metal line. Voltage-dependent current mapping and current-voltage characteristics recorded down to single CNT allow for a comprehensive insight into the electric behaviour of the hybrid structure.
authors: Solid Surfaces Analysis Group, Institute of Physics, Chemnitz University of Technology, Chemnitz 09107, Germany. marius.toader@physik.tu-chemnitz.de.
authors: Marius
authors: M
authors: Toader
authors: Holger
authors: H
authors: Fiedler
authors: Sascha
authors: S
authors: Hermann
authors: Stefan E
authors: SE
authors: Schulz
authors: Thomas
authors: T
authors: Gessner
authors: Michael
authors: M
authors: Hietschold