title: A new grating X-ray spectrometer for 2-4 keV enabling a separate observation of In-Lβ and Sn-Lα emissions of indium tin oxide.
abstract: A new multilayer-coated varied line-spaced grating, JS4000, was fabricated and tested for extending the upper limit of a grating X-ray spectrometer for electron microscopy. This grating was designed for 2-3.8 keV at a grazing incidence angle of 1.35°. It was revealed that this new multilayer structure enables us to take soft-X-ray emission spectra continuously from 1.5 to 4.3 keV at the same optical setting. The full-width at half maximum of Te-L(α1,2) (3.8 keV) emission peak was 27 eV. This spectrometer was applied to indium tin oxide particles and clearly resolved Sn-L(α) (3444 eV) and In-L(β1) (3487 eV) peaks, which could not be resolved by a widely used energy-dispersive X-ray spectrometer.
authors: IMRAM, Tohoku University, 2-1-1 Katahira, Aoba-ku, Sendai 980-8577, Japan. terauchi@tagen.tohoku.ac.jp
authors: Masami
authors: M
authors: Terauchi
authors: Hideyuki
authors: H
authors: Takahashi
authors: Nobuo
authors: N
authors: Handa
authors: Takanori
authors: T
authors: Murano
authors: Masato
authors: M
authors: Koike
authors: Tetsuya
authors: T
authors: Kawachi
authors: Takashi
authors: T
authors: Imazono
authors: Noboru
authors: N
authors: Hasegawa
authors: Masaru
authors: M
authors: Koeda
authors: Tetsuya
authors: T
authors: Nagano
authors: Hiroyuki
authors: H
authors: Sasai
authors: Yuki
authors: Y
authors: Oue
authors: Zeno
authors: Z
authors: Yonezawa
authors: Satoshi
authors: S
authors: Kuramoto
mesh_terms: D004867:Equipment Design; D019544:Equipment Failure Analysis; D013052:Spectrometry, X-Ray Emission / Q000295:instrumentation*; D017971:Tin Compounds / Q000032:analysis*
chemical_list: D017971:Tin Compounds; C109984:indium tin oxide
keywords: indium tin oxide; multilayer coated grating; soft-X-ray emission spectroscopy; wavelength-dispersive spectroscopy