Integrative technology-based approach of microelectromechanical systems (MEMS) for biosensing applications.
In this work we simultaneously aim at addressing the design and fabrication of microelectromechanical systems (MEMS) for biological applications bearing actuation and readout capabilities together with adapted tools dedicated to surface functionalization at the microscale. The biosensing platform is based on arrays of silicon micromembranes with piezoelectric actuation and piezoresistive read-out capabilities. The detection of the cytochrome C protein using molecularly imprinted polymers (MIPs) as functional layer is demonstrated. The adapted functionalization tool specifically developed to match the micromembranes' platform is an array of silicon cantilevers incorporating precise force sensors for the trim and force measurements during deposition of biological materials onto the sensors' active area. In either case, associated analog electronics is specifically realized to deal with specific signals treatment fed through the MEMS-based devices.
Laboratory of Analysis and Architecture of Systems, Center of National Scientific Research, Toulouse, 31270 France. nicu@laas.fr
Liviu
L
Nicu
Thomas
T
Alava
Thierry
T
Leichle
Daisuke
D
Saya
Jean-Bernard
JB
Pourciel
Fabrice
F
Mathieu
Caroline
C
Soyer
Denis
D
Remiens
Cedric
C
Ayela
Karsten
K
Haupt
D015374:Biosensing Techniques / Q000295:instrumentation*; D045304:Cytochromes c / Q000032:analysis*; D004867:Equipment Design; D019544:Equipment Failure Analysis; D055617:Micro-Electrical-Mechanical Systems / Q000295:instrumentation*; D018511:Systems Integration
D045304:Cytochromes c