Flexible multi-electrode array with integrated bendable CMOS-chip for implantable systems.
Micro-electrodes and micro-electrode arrays (MEAs) for stimulating neurons or recording action potentials are widely used in medical applications or biological research. For medical implants in many applications like brain implants or retinal implants there is a need for flexible MEAs with a large area and a large number of stimulation electrodes. In this work a flexible MEA with an embedded flexible silicon dummy CMOS-chip facing these challenges has been designed, manufactured and characterized. This approach offers the possibility by connecting and addressing several of these MEAs via a bus system, to increase the number and the density of electrodes significantly. This paper describes the design and fabrication process. Results on the mechanical and electrical behavior will be given and possible improvements for medical applications by this novel approach will be discussed.
RWTH Aachen University, Institute of Materials in Electrical Engineering 1, D-52074 Aachen, Germany. winkin@iwe1.rwth-aachen.de
N
N
Winkin
W
W
Mokwa
D017097:Electric Impedance; D004567:Electrodes, Implanted; D006046:Gold / Q000737:chemistry; D007094:Imides / Q000737:chemistry; D008839:Microelectrodes; D010087:Oxides / Q000737:chemistry*; D018583:Pliability; D012666:Semiconductors; D013499:Surface Properties
D007094:Imides; D010087:Oxides; D006046:Gold