An infrared radiation based thermal biosensor for enzymatic biochemical reactions.
In this paper, a thermal biosensor based on the infrared radiation energy is proposed for calorimetric measurement of biochemical reactions. Having a good structure design combined with MEMS technology as well as employing the Si /SiGe quantum well sensing material with a high TCR and low 1/f noise, the sensor shows potentials to be high sensitive and real-time. The urea enzymatic reaction was tested to verify the performance of sensor, which demonstrates a linear detection range from 0.5mM to 150mM and a relative standard deviation less than 1%. For the sensor fabrication, wafer-level transfer bonding is a key process, which makes the integration of quantum well material and a free standing structure possible. It reduces the heat loss from the sensor to the surrounding environment.
Department of Micro and Nano Systems Technology, Norwegian Center of Expertise on Micro- and Nanotechnology, Vestfold University College, Norway. Lei.Zhang@student.hive.no
Lei
L
Zhang
Tao
T
Dong
Xinyan
X
Zhao
Zhaochu
Z
Yang
Nuno M M
NM
Pires
D000818:Animals; D015374:Biosensing Techniques / Q000295:instrumentation*; D002151:Calorimetry / Q000295:instrumentation*; D004798:Enzymes / Q000378:metabolism*; D004867:Equipment Design; D006801:Humans; D007259:Infrared Rays; D007700:Kinetics; D008954:Models, Biological; D062125:Thermometry / Q000295:instrumentation*; D014510:Urease / Q000378:metabolism
D004798:Enzymes; D014510:Urease