A post silicon-on-insulator compatible smart tube technology.
This paper reports a technology to fabricate micro-parylene tubes with integrated sensors. The unique advantage of this new technology is its ability to incorporate high-temperature solid-state materials. Standard CMOS and MEMS devices can be fabricated first on the silicon wafers and then the smart tubes are formed by taking advantage of XeF(2) isotropic silicon etching and conformal parylene coating.
Department of Electrical and Computer Engineering, Wayne State University, Detroit, MI 48202, USA.
Hongen
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Tu
Yong
Y
Xu
D004566:Electrodes; D005459:Fluorides / Q000737:chemistry; D055617:Micro-Electrical-Mechanical Systems; D036103:Nanotechnology; D011108:Polymers / Q000737:chemistry; D012825:Silicon / Q000737:chemistry*; D013696:Temperature; D014978:Xenon / Q000737:chemistry; D014992:Xylenes / Q000737:chemistry
D011108:Polymers; D014992:Xylenes; C011055:parylene; D014978:Xenon; C048007:xenon fluoride; D005459:Fluorides; D012825:Silicon