Sensing performance of precisely ordered TiO2 nanowire gas sensors fabricated by electron-beam lithography.
In this study, electron beam lithography, rather than the most popular method, chemical synthesis, is used to construct periodical TiO(2) nanowires for a gas sensor with both robust and rapid performance. The effects of temperature on the sensing response and reaction time are analyzed at various operation temperatures ranging from 200 to  350 °C. At the optimized temperature of 300 °C, the proposed sensor repeatedly obtained a rise/recovery time (ΔR: 0.9 R(0) to 0.1 R(0)) of 3.2/17.5 s and a corresponding sensor response (ΔR/R(0)) of 21.7% at an ethanol injection mass quantity of 0.2 μg.
Department of Electrical Engineering, National Taiwan University, Taipei 10617, Taiwan. wctian@cc.ee.ntu.edu.tw
Wei-Cheng
WC
Tian
Yu-Hsuan
YH
Ho
Chao-Hao
CH
Chen
Chun-Yen
CY
Kuo