Multi-layered poly-dimethylsiloxane as a non-hermetic packaging material for medical MEMS.
Poly-dimethylsiloxane (PDMS) is an attractive material for packaging implantable biomedical microdevices owing to its biocompatibility, ease in application, and bio-friendly mechanical properties. Unfortunately, devices encapsulated solely by PDMS lack the longevity for use in chronic implant applications due to defect-related moisture penetration through the packaging layer caused by conventional deposition processes such as spin coating. This paper describes an effort to improve the performance of PDMS as a packaging material by constructing the encapsulant from multiple, thin roller casted layers of PDMS as a part of a polymeric multi-material package.
Department of Electrical Engineering and Computer Science, Case Western Reserve University, Cleveland, OH 44106, USA. Shem.Lachhman@case.edu
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D004129:Dimethylpolysiloxanes / Q000737:chemistry*; D004560:Electricity; D004582:Electronics, Medical; D006801:Humans; D055617:Micro-Electrical-Mechanical Systems; D019064:Product Packaging; D013499:Surface Properties; D013686:Telemetry; D013997:Time Factors
D004129:Dimethylpolysiloxanes