title: Nanomoulding of functional materials, a versatile complementary pattern replication method to nanoimprinting.
abstract: We describe a nanomoulding technique which allows low-cost nanoscale patterning of functional materials, materials stacks and full devices. Nanomoulding combined with layer transfer enables the replication of arbitrary surface patterns from a master structure onto the functional material. Nanomoulding can be performed on any nanoimprinting setup and can be applied to a wide range of materials and deposition processes. In particular we demonstrate the fabrication of patterned transparent zinc oxide electrodes for light trapping applications in solar cells.
authors: Institute of Microengineering, Photovoltaics and Thin Film Electronics Laboratory, Ecole Polytechnique Fédérale de Lausanne. cbattaglia@lbl.gov
authors: Corsin
authors: C
authors: Battaglia
authors: Karin
authors: K
authors: Söderström
authors: Jordi
authors: J
authors: Escarré
authors: Franz-Josef
authors: FJ
authors: Haug
authors: Matthieu
authors: M
authors: Despeisse
authors: Christophe
authors: C
authors: Ballif
mesh_terms: D054802:Molecular Imprinting / Q000295:instrumentation / Q000379:methods*; D036103:Nanotechnology / Q000295:instrumentation / Q000379:methods*; D015034:Zinc Oxide / Q000737:chemistry
chemical_list: D015034:Zinc Oxide
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