title: Microstructure-related properties of magnesium fluoride films at 193nm by oblique-angle deposition.
abstract: Magnesium fluoride (MgF2) films deposited by resistive heating evaporation with oblique-angle deposition have been investigated in details. The optical and micro-structural properties of single-layer MgF2 films were characterized by UV-VIS and FTIR spectrophotometers, scanning electron microscope (SEM), atomic force microscope (AFM), and x-ray diffraction (XRD), respectively. The dependences of the optical and micro-structural parameters of the thin films on the deposition angle were analyzed. It was found that the MgF2 film in a columnar microstructure was negatively inhomogeneous of refractive index and polycrystalline. As the deposition angle increased, the optical loss, extinction coefficient, root-mean-square (rms) roughness, dislocation density and columnar angle of the MgF2 films increased, while the refractive index, packing density and grain size decreased. Furthermore, IR absorption of the MgF2 films depended on the columnar structured growth.
authors: Institute of Optics and Electronics, Chinese Academy of Sciences, Chengdu 610209, China.
authors: Chun
authors: C
authors: Guo
authors: Mingdong
authors: M
authors: Kong
authors: Dawei
authors: D
authors: Lin
authors: Cunding
authors: C
authors: Liu
authors: Bincheng
authors: B
authors: Li