title: Scalable fabrication of high-power graphene micro-supercapacitors for flexible and on-chip energy storage.
abstract: The rapid development of miniaturized electronic devices has increased the demand for compact on-chip energy storage. Microscale supercapacitors have great potential to complement or replace batteries and electrolytic capacitors in a variety of applications. However, conventional micro-fabrication techniques have proven to be cumbersome in building cost-effective micro-devices, thus limiting their widespread application. Here we demonstrate a scalable fabrication of graphene micro-supercapacitors over large areas by direct laser writing on graphite oxide films using a standard LightScribe DVD burner. More than 100 micro-supercapacitors can be produced on a single disc in 30 min or less. The devices are built on flexible substrates for flexible electronics and on-chip uses that can be integrated with MEMS or CMOS in a single chip. Remarkably, miniaturizing the devices to the microscale results in enhanced charge-storage capacity and rate capability. These micro-supercapacitors demonstrate a power density of ~200 W cm-3, which is among the highest values achieved for any supercapacitor.
authors: Department of Chemistry and Biochemistry and California NanoSystems Institute, University of California, Los Angeles, Los Angeles, California 90095, USA.
authors: Maher F
authors: MF
authors: El-Kady
authors: Richard B
authors: RB
authors: Kaner
mesh_terms: D025802:Electric Capacitance; D004563:Electrochemistry; D004573:Electrolytes / Q000737:chemistry; D004581:Electronics / Q000295:instrumentation*; D006108:Graphite / Q000737:chemistry*; D007834:Lasers; D055616:Microtechnology / Q000295:instrumentation*; D010087:Oxides; D013314:Stress, Mechanical
chemical_list: D004573:Electrolytes; D010087:Oxides; D006108:Graphite
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