title: Low-dose patterning of platinum nanoclusters on carbon nanotubes by focused-electron-beam-induced deposition as studied by TEM.
abstract: Focused-electron-beam-induced deposition (FEBID) is used as a direct-write approach to decorate ultrasmall Pt nanoclusters on carbon nanotubes at selected sites in a straightforward maskless manner. The as-deposited nanostructures are studied by transmission electron microscopy (TEM) in 2D and 3D, demonstrating that the Pt nanoclusters are well-dispersed, covering the selected areas of the CNT surface completely. The ability of FEBID to graft nanoclusters on multiple sides, through an electron-transparent target within one step, is unique as a physical deposition method. Using high-resolution TEM we have shown that the CNT structure can be well preserved thanks to the low dose used in FEBID. By tuning the electron-beam parameters, the density and distribution of the nanoclusters can be controlled. The purity of as-deposited nanoclusters can be improved by low-energy electron irradiation at room temperature.
authors: EMAT, University of Antwerp, Groenenborgerlaan 171, 2020 Antwerp, Belgium.
authors: Xiaoxing
authors: X
authors: Ke
authors: Carla
authors: C
authors: Bittencourt
authors: Sara
authors: S
authors: Bals
authors: Gustaaf
authors: G
authors: Van Tendeloo
keywords: FEBID; TEM; carbon nanotubes; nanocluster; patterning; platinum; radiation-induced nanostructures
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