title: Adhesion and Moisture Barrier Characteristics of Roller-Cast Polydimethylsiloxane Encapsulants for Implantable Microsystems.
abstract: Poly-dimethylsiloxane (PDMS) is a highly attractive polymer to encapsulate implantable micro-electromechanical systems (MEMS) due to its biocompatibility, simplicity in processing, and low Young's Modulus. However, conventional deposition processes introduce defects that prevent the use of PDMS as a long term packaging material. In order to address these issues, we have developed a novel roller-casting process for depositing PDMS. This paper presents the findings of a study to simultaneously investigate the adhesion properties and moisture barrier characteristics of roller-cast, multilayered PDMS encapsulants subjected to testing in saline at 85°C.
authors: Department of Electrical Engineering and Computer Science, Case Western Reserve University, Cleveland, OH USA.
authors: Shem B
authors: SB
authors: Lachhman
authors: Christian A
authors: CA
authors: Zorman
authors: Wen H
authors: WH
authors: Ko