title: Atomic layer deposition of high-density Pt nanodots on Al2O3 film using (MeCp)Pt(Me)3 and O2 precursors for nonvolatile memory applications.
abstract: Pt nanodots have been grown on Al2O3 film via atomic layer deposition (ALD) using (MeCp)Pt(Me)3 and O2 precursors. Influence of the substrate temperature, pulse time of (MeCp)Pt(Me)3, and deposition cycles on ALD Pt has been studied comprehensively by scanning electron microscopy, transmission electron microscopy, and X-ray photoelectron spectroscopy. Therefore, Pt nanodots with a high density of approximately 2 × 1012 cm-2 have been achieved under optimized conditions: 300°C substrate temperature, 1 s pulse time of (MeCp)Pt(Me)3, and 70 deposition cycles. Further, metal-oxide-semiconductor capacitors with Pt nanodots embedded in ALD Al2O3 dielectric have been fabricated and characterized electrically, indicating noticeable electron trapping capacity, efficient programmable and erasable characteristics, and good charge retention.
authors: State Key Laboratory of ASIC and System, School of Microelectronics, Fudan University, Shanghai, 200433, China. sjding@fudan.edu.cn.
authors: Shi-Jin
authors: SJ
authors: Ding
authors: Hong-Bing
authors: HB
authors: Chen
authors: Xing-Mei
authors: XM
authors: Cui
authors: Sun
authors: S
authors: Chen
authors: Qing-Qing
authors: QQ
authors: Sun
authors: Peng
authors: P
authors: Zhou
authors: Hong-Liang
authors: HL
authors: Lu
authors: David Wei
authors: DW
authors: Zhang
authors: Chen
authors: C
authors: Shen