title: Frequency noise properties of lasers for interferometry  in nanometrology.
abstract: In this contribution we focus on laser frequency noise properties and their influence on the interferometric displacement measurements. A setup for measurement of laser frequency noise is proposed and tested together with simultaneous measurement of fluctuations in displacement in the Michelson interferometer. Several laser sources, including traditional He-Ne and solid-state lasers, and their noise properties are evaluated and compared. The contribution of the laser frequency noise to the displacement measurement is discussed in the context of other sources of uncertainty associated with the interferometric setup, such as, mechanics, resolution of analog-to-digital conversion, frequency bandwidth of the detection chain, and variations of the refractive index of air.
authors: Institute of Scientific Instruments, vvi, Academy of Sciences of the Czech Republic, Brno 61264, Czech Republic. hrabina@isibrno.cz
authors: Jan
authors: J
authors: Hrabina
authors: Josef
authors: J
authors: Lazar
authors: Miroslava
authors: M
authors: Holá
authors: Ondřej
authors: O
authors: Cíp