title: Micromachined piezoelectric microphones with in-plane directivity.
abstract: Micromachined piezoelectric microphones with in-plane directivity are introduced. A beam rotates about center torsional pivots and is attached to piezoelectrically active end-springs. Rotation of the beam in response to sound pressure gradients produces spring deflections, which, in turn, produce an open-circuit voltage at the piezoelectric films. Prototypes are presented that contain a 20-μm-thick silicon beam and end-springs with 900-nm-thick chemical solution deposited lead zirconate titanate atop the surface of the end-springs. Acoustic directivity measurements are presented that confirm device functionality.
authors: Department of Electrical and Computer Engineering, The University of Texas at Austin, Austin, Texas 78712, USA.
authors: Michael L
authors: ML
authors: Kuntzman
authors: Jia
authors: J
authors: Gloria Lee
authors: Nishshanka N
authors: NN
authors: Hewa-Kasakarage
authors: Donghwan
authors: D
authors: Kim
authors: Neal A
authors: NA
authors: Hall