title: Tunable bulk acoustic wave resonators based on Ba0.25Sr0.75TiO3 thin films and a HfO2/SiO2 bragg reflector.
abstract: A switchable and tunable bulk acoustic wave resonator based on a paraelectric phase Ba(0.25)Sr(0.75)TiO(3) thin film and an all-dielectric HfO(2)/SiO(2) Bragg reflector is presented. The achieved tuning range (3.8%) and effective electromechanical coupling coefficient (7.1%) are the highest reported for solidly mounted tunable bulk acoustic wave resonators. The non-conductive Bragg reflector stack provides excellent integration possibilities.
authors: John
authors: J
authors: Berge
authors: Spartak
authors: S
authors: Gevorgian
mesh_terms: D000162:Acoustics / Q000295:instrumentation*; D002516:Ceramics / Q000737:chemistry*; D004867:Equipment Design; D019544:Equipment Failure Analysis; D007909:Lenses; D008567:Membranes, Artificial; D055617:Micro-Electrical-Mechanical Systems / Q000295:instrumentation*; D012031:Refractometry / Q000295:instrumentation*; D013016:Sound; D014159:Transducers
chemical_list: D008567:Membranes, Artificial