title: Plasma electron source for the generation of wide-aperture pulsed beam at forevacuum pressures.
abstract: This article reports on design and application of wide-aperture pulsed beam source, based on hollow cathode discharge. The source is intended for electron beam generation in pressure range 2-15 Pa. Multi-aperture extraction system, used in a source, provided beam cross-section uniformity of 10% on diameter 40 mm. The limiting values of the current density, pulse duration, and accelerating voltage are 350 mA∕cm(2), 250 μs, and 10 kV, respectively. These parameters are sufficient for surface modification of various materials, including non-conducting matters.
authors: Tomsk State University of Control Systems and Radioelectronics, Tomsk 634050, Russia.
authors: E
authors: E
authors: Oks
authors: V
authors: V
authors: Burdovitsin
authors: A
authors: A
authors: Medovnik
authors: Yu
authors: Y
authors: Yushkov