title: A piezoelectric single-crystal ultrasonic microactuator for driving optics.
abstract: At the millimeter scale, the motions or force out puts generated by conventional piezoelectric, magnetostrictive, photostrictive, or electromagnetic actuators are very limited. Here, we report a piezoelectric ultrasonic microactuator (size: 1.5 × 1.5 × 5 mm, weight: 0.1 g) made of PIN-PMN-PT single crystal. The actuator converts its high-frequency microscopic displacements (nanometer to micrometer scale) into a macro scopic, centimeter-scale linear movement of a slider via frictional force, resulting in a speed up to 50 mm/s and a very high unit volume direct driving force of 26 mN/mm(3) (which is ~100 times higher than a voice coil motor and ~4 times higher than a piezoceramic ultrasonic motor). This work shows the feasibility of using piezoelectric single-crystal-based ultrasonic microactuator for miniature drive of optics in next-generation mobiles and cameras.
authors: Department of Advanced Materials and Nanotechnology, College of Engineering, Peking University, Beijing, China.
authors: Mingsen
authors: M
authors: Guo
authors: Shuxiang
authors: S
authors: Dong
authors: Bo
authors: B
authors: Ren
authors: Haosu
authors: H
authors: Luo
mesh_terms: D004867:Equipment Design; D019544:Equipment Failure Analysis; D055617:Micro-Electrical-Mechanical Systems / Q000295:instrumentation*; D008904:Miniaturization; D055096:Optical Devices; D014159:Transducers; D014465:Ultrasonics / Q000295:instrumentation*