title: Direct laser writing of sub-50 nm nanofluidic channels buried in glass for three-dimensional micro-nanofluidic integration.
abstract: We report on the fabrication of nanofluidic channels directly buried in silicate glass with transverse widths down to less than 50 nm using three-dimensional (3D) femtosecond laser direct writing. Using this technique, integrated micro-nanofluidic systems have been produced by simultaneously writing micro- and nanofluidic channels arranged into various 3D configurations in glass substrates. The fabricated micro- and nanofluidic systems have been used to demonstrate DNA analysis, e.g. stretching of DNA molecules. Our technique offers new opportunities to develop novel 3D micro-nanofluidic systems for a variety of lab-on-a-chip applications.
authors: State Key Laboratory of High Field Laser Physics, Shanghai Institute of Optics and Fine Mechanics, Chinese Academy of Sciences, Shanghai 201800, PR China.
authors: Yang
authors: Y
authors: Liao
authors: Ya
authors: Y
authors: Cheng
authors: Changning
authors: C
authors: Liu
authors: Jiangxin
authors: J
authors: Song
authors: Fei
authors: F
authors: He
authors: Yinglong
authors: Y
authors: Shen
authors: Danping
authors: D
authors: Chen
authors: Zhizhan
authors: Z
authors: Xu
authors: Zhichao
authors: Z
authors: Fan
authors: Xunbin
authors: X
authors: Wei
authors: Koji
authors: K
authors: Sugioka
authors: Katsumi
authors: K
authors: Midorikawa
mesh_terms: D004247:DNA / Q000032:analysis; D005456:Fluorescent Dyes / Q000737:chemistry; D005898:Glass / Q000737:chemistry*; D007834:Lasers; D046210:Microfluidic Analytical Techniques / Q000295:instrumentation / Q000379:methods*; D049329:Nanostructures / Q000737:chemistry*; D036103:Nanotechnology / Q000295:instrumentation* / Q000379:methods; D016062:Porosity; D017640:Silicates / Q000737:chemistry
chemical_list: D005456:Fluorescent Dyes; D017640:Silicates; D004247:DNA