title: Optical beamsteering using an 8 × 8 MEMS phased array with closed-loop interferometric phase control.
abstract: We present a high-speed optical beamsteering system based on an 8x8 MEMS phased array. The system incorporates an in situ interferometer that provides a real-time, dynamic measure of the phase of each mirror in the array during beamsteering. A closed-loop phase-control algorithm results in <π/100 mirror phase accuracy and far field beam steering is shown. Stroboscopic measurement capabilities are demonstrated which allow us to show feedforward control to eliminate micromirror ringing.
authors.affiliation: Department of Mechanical and Aerospace Engineering, University of California, Davis, One Shields Ave., Davis, California 95616, USA. trechan@ucdavis.edu
authors.forename: Trevor K
authors.initials: TK
authors.lastname: Chan
authors.forename: Mischa
authors.initials: M
authors.lastname: Megens
authors.forename: Byung-Wook
authors.initials: BW
authors.lastname: Yoo
authors.forename: John
authors.initials: J
authors.lastname: Wyras
authors.forename: Connie J
authors.initials: CJ
authors.lastname: Chang-Hasnain
authors.forename: Ming C
authors.initials: MC
authors.lastname: Wu
authors.forename: David A
authors.initials: DA
authors.lastname: Horsley
mesh_terms: D000465:Algorithms; D004867:Equipment Design; D019544:Equipment Failure Analysis; D005246:Feedback; D007368:Interferometry / Q000295:instrumentation*; D007909:Lenses; D055617:Micro-Electrical-Mechanical Systems / Q000295:instrumentation*