title: Tilt-ellipsometry of object surface by specular reflection for three-dimensional shape measurement.
abstract: Ellipsometry by specular reflection has been reworked as a precise surface normal vector detection method for the geometrical shape study of a glossy object. When the object is illuminated by circularly polarized light, the surface normal vector defines the shape of the reflection polarization ellipse; the azimuth and ellipticity are determined by the angle of the incident plane and the angle of incidence, respectively. The tilt-ellipsometry principle of tilt detection is demonstrated experimentally with a metallic polygon and a cube sample.
authors.affiliation: Faculty of Education, Art and Science, Yamagata University 1-4-12 Kojirakawa-machi, Yamagata 990-8560, Japan. ttsuru@e.yamagata-u.ac.jp
authors.forename: Toshihide
authors.initials: T
authors.lastname: Tsuru