title: Chromatic confocal microscopy with a novel wavelength detection method using transmittance.
abstract: Chromatic confocal microscopy (CCM) is a promising technology that enables high-speed three-dimensional surface profiling without mechanical depth scanning. However, the spectrometer, which measures depth information encoded by axial color, limits the speed of three-dimensional imaging. We present a novel method for chromatic confocal microscopy with transmittance detection. Depth information can be instantaneously obtained by the ratio of intensity signals from two photomultiplier tubes by detecting a peak wavelength using transmittance of a color filter. This non-destructive and high-speed surface profiling method might be useful in many fields, including the semiconductor and flat panel display industries, and in material science.
authors.affiliation: Nanoscope Systems, Inc, Daejeon 305-509, South Korea.
authors.forename: Taejoong
authors.initials: T
authors.lastname: Kim
authors.forename: Sang Hoon
authors.initials: SH
authors.lastname: Kim
authors.forename: DukHo
authors.initials: D
authors.lastname: Do
authors.forename: Hongki
authors.initials: H
authors.lastname: Yoo
authors.forename: DaeGab
authors.initials: D
authors.lastname: Gweon