title: CMOS-integrated geometrically tunable optical filters.
abstract: We present a method for producing monolithically integrated complementary metal-oxide-semiconductor (CMOS) optical filters with different and customer-specific responses. The filters are constituted by a Fabry-Perot resonator formed by two Bragg mirrors separated by a patterned cavity. The filter response can be tuned by changing the geometric parameters of the patterning, and consequently the cavity effective refractive index. In this way, many different filters can be produced at once on a single chip, allowing multichanneling. The filter has been designed, produced, and characterized. The results for a chip with 24 filters are presented.
authors.affiliation: X-FAB Semiconductor Foundries AG, Erfurt, Germany. damianalerose@gmail.com
authors.forename: Damiana
authors.initials: D
authors.lastname: Lerose
authors.forename: Evie Kho Siaw
authors.initials: EK
authors.lastname: Hei
authors.forename: Bong Ching
authors.initials: BC
authors.lastname: Ching
authors.forename: Martin
authors.initials: M
authors.lastname: Sterger
authors.forename: Liau Chu
authors.initials: LC
authors.lastname: Yaw
authors.forename: Frank Michael
authors.initials: FM
authors.lastname: Schulze
authors.forename: Frank
authors.initials: F
authors.lastname: Schmidt
authors.forename: Andrei
authors.initials: A
authors.lastname: Schmidt
authors.forename: Konrad
authors.initials: K
authors.lastname: Bach