title: A novel offset cancellation based on parasitic-insensitive switched-capacitor sensing circuit for the out-of-plane single-Gimbaled decoupled CMOS-MEMS gyroscope.
abstract: This paper presents a novel parasitic-insensitive switched-capacitor (PISC) sensing circuit design in order to obtain high sensitivity and ultra linearity and reduce the parasitic effect for the out-of-plane single-gimbaled decoupled CMOS-MEMS gyroscope (SGDG). According to the simulation results, the proposed PISC circuit has better sensitivity and high linearity in a wide dynamic range. Experimental results also show a better performance. In addition, the PISC circuit can use signal processing to cancel the offset and noise. Thus, this circuit is very suitable for gyroscope measurement.
authors.affiliation: Department of Mechanical Engineering, National Taiwan University, Taipei 10617, Taiwan. d93522037@ntu.edu.tw
authors.forename: Ming-Hui
authors.initials: MH
authors.lastname: Chang
authors.forename: Han-Pang
authors.initials: HP
authors.lastname: Huang
mesh_terms: D004867:Equipment Design; D055617:Micro-Electrical-Mechanical Systems; D012666:Semiconductors