title: Laser heterodyne interferometric signal processing method based on rising edge locking with high frequency clock signal.
abstract: A novel phase measurement method composed of the rising-edge locked signal processing and the digital frequency mixing is proposed for laser heterodyne interferometer. The rising-edge locked signal processing, which employs a high frequency clock signal to lock the rising-edges of the reference and measurement signals, not only can improve the steepness of the rising-edge, but also can eliminate the error counting caused by multi-rising-edge phenomenon in fringe counting. The digital frequency mixing is realized by mixing the digital interference signal with a digital base signal that is different from conventional frequency mixing with analogue signals. These signal processing can improve the measurement accuracy and enhance anti-interference and measurement stability. The principle and implementation of the method are described in detail. An experimental setup was constructed and a series of experiments verified the feasibility of the method in large displacement measurement with high speed and nanometer resolution.
authors.affiliation: School of Optoelectronics, Beijing Institute of Technology, Beijing 100081, China.
authors.forename: Enzheng
authors.initials: E
authors.lastname: Zhang
authors.forename: Benyong
authors.initials: B
authors.lastname: Chen
authors.forename: Liping
authors.initials: L
authors.lastname: Yan
authors.forename: Tao
authors.initials: T
authors.lastname: Yang
authors.forename: Qun
authors.initials: Q
authors.lastname: Hao
authors.forename: Wenjun
authors.initials: W
authors.lastname: Dong
authors.forename: Chaorong
authors.initials: C
authors.lastname: Li
mesh_terms: D004867:Equipment Design; D019544:Equipment Failure Analysis; D007368:Interferometry / Q000295:instrumentation*; D007834:Lasers; D012815:Signal Processing, Computer-Assisted / Q000295:instrumentation*; D013685:Telecommunications / Q000295:instrumentation*