title: Black silicon: substrate for laser 3D micro/nano-polymerization.
abstract: We demonstrate that black silicon (b-Si) made by dry plasma etching is a promising substrate for laser three-dimensional (3D) micro/nano-polymerization. High aspect ratio Si-needles, working as sacrificial support structures, have flexibility required to relax interface stresses between substrate and the polymerized micro-/nano- objects. Surface of b-Si can be made electrically conductive by metal deposition and, at the same time, can preserve low optical reflectivity beneficial for polymerization by direct laser writing. 3D laser polymerization usually performed at the irradiation conditions close to the dielectric breakdown is possible on non-reflective and not metallic surfaces. Here we show that low reflectivity and high metallic conductivity are not counter- exclusive properties for laser polymerization. Electrical conductivity of substrate and its permeability in liquids are promising for bio- and electroplating applications.
authors.affiliation: Laser Nanophotonics Group, Laser Research Center, Department of Quantum Electronics, Physics Faculty, Vilnius University, Saulėtekio 9, LT-10222 Vilnius, Lithuania.
authors.forename: Albertas
authors.initials: A
authors.lastname: Žukauskas
authors.forename: Mangirdas
authors.initials: M
authors.lastname: Malinauskas
authors.forename: Arūnas
authors.initials: A
authors.lastname: Kadys
authors.forename: Gediminas
authors.initials: G
authors.lastname: Gervinskas
authors.forename: Gediminas
authors.initials: G
authors.lastname: Seniutinas
authors.forename: Sasikaran
authors.initials: S
authors.lastname: Kandasamy
authors.forename: Saulius
authors.initials: S
authors.lastname: Juodkazis
mesh_terms: D007834:Lasers; D008422:Materials Testing; D054802:Molecular Imprinting / Q000379:methods*; D053758:Nanoparticles / Q000737:chemistry* / Q000528:radiation effects* / Q000648:ultrastructure; D011108:Polymers / Q000737:chemistry* / Q000528:radiation effects*; D012825:Silicon / Q000737:chemistry* / Q000528:radiation effects*
chemical_list: D011108:Polymers; D012825:Silicon