title: Graphene MEMS: AFM probe performance improvement.
abstract: We explore the feasibility of growing a continuous layer of graphene in prepatterned substrates, like an engineered silicon wafer, and we apply this as a mold for the fabrication of AFM probes. This fabrication method proves the fabrication of SU-8 devices coated with graphene in a full-wafer parallel technology and with high yield. It also demonstrates that graphene coating enhances the functionality of SU-8 probes, turning them conductive and more resistant to wear. Furthermore, it opens new experimental possibilities such as studying graphene-graphene interaction at the nanoscale with the precision of an AFM or the exploration of properties in nonplanar graphene layers.
authors.affiliation: Department of Chemistry and Biochemistry, University of California at Los Angeles, 607 Charles E Young Drive East, Los Angeles, California 90095, United States.
authors.forename: Cristina
authors.initials: C
authors.lastname: Martin-Olmos
authors.forename: Haider Imad
authors.initials: HI
authors.lastname: Rasool
authors.forename: Bruce H
authors.initials: BH
authors.lastname: Weiller
authors.forename: James K
authors.initials: JK
authors.lastname: Gimzewski
mesh_terms: D055615:Electrical Equipment and Supplies; D006108:Graphite / Q000737:chemistry*; D055595:Mechanical Phenomena; D018625:Microscopy, Atomic Force / Q000295:instrumentation / Q000379:methods*; D055616:Microtechnology / Q000295:instrumentation / Q000379:methods*; D011108:Polymers / Q000737:chemistry
chemical_list: D011108:Polymers; D006108:Graphite