title: Performance and characterization of the prototype nm-scale spatial resolution scanning multilayer Laue lenses microscope.
abstract: Synchrotron based x-ray microscopy established itself as a prominent tool for noninvasive investigations in many areas of science and technology. Many facilities around the world routinely achieve sub-micrometer resolution with a few instruments capable of imaging with the spatial resolution better than 100 nm. With an ongoing effort to push the 2D/3D resolution down to 10 nm in the hard x-ray regime both fabrication of the nano-focusing optics and stability of a microscope become extremely challenging. In this work we present our approach to overcome technical challenges on the path towards high spatial resolution hard x-ray microscopy and demonstrate the performance of a scanning fluorescence microscope equipped with the multilayer Laue lenses focusing optics.
authors.affiliation: Brookhaven National Laboratory, Upton, New York 11973, USA.
authors.forename: E
authors.initials: E
authors.lastname: Nazaretski
authors.forename: Jungdae
authors.initials: J
authors.lastname: Kim
authors.forename: H
authors.initials: H
authors.lastname: Yan
authors.forename: K
authors.initials: K
authors.lastname: Lauer
authors.forename: D
authors.initials: D
authors.lastname: Eom
authors.forename: D
authors.initials: D
authors.lastname: Shu
authors.forename: J
authors.initials: J
authors.lastname: Maser
authors.forename: Z
authors.initials: Z
authors.lastname: Pešić
authors.forename: U
authors.initials: U
authors.lastname: Wagner
authors.forename: C
authors.initials: C
authors.lastname: Rau
authors.forename: Y S
authors.initials: YS
authors.lastname: Chu