title: Note: Alignment/focus dependent core-line sensitivity for quantitative chemical analysis in hard x-ray photoelectron spectroscopy using a hemispherical electron analyzer.
abstract: X-ray photoelectron spectroscopy is an established technique for quantitative chemical analysis requiring accurate peak intensity analysis. We present evidence of focus∕alignment dependence of relative peak intensities for peaks over a broad kinetic energy range with a hemispherical electron analyzer operated in a position imaging mode. A decrease of over 50% in the Ag 2p₃/₂ to Ag 3d ratio is observed in a Ag specimen. No focus∕alignment dependence is observed when using an angular imaging mode, necessitating the use of angular mode for quantitative chemical analysis.
authors.affiliation: Material Measurement Laboratory, National Institute of Standards and Technology, Gaithersburg, Maryland 20899, USA.
authors.forename: Conan
authors.initials: C
authors.lastname: Weiland
authors.forename: Raymond
authors.initials: R
authors.lastname: Browning
authors.forename: Barry A
authors.initials: BA
authors.lastname: Karlin
authors.forename: Daniel A
authors.initials: DA
authors.lastname: Fischer
authors.forename: Joseph C
authors.initials: JC
authors.lastname: Woicik