title: Heterodyne laser Doppler vibrometers integrated on silicon-on-insulator based on serrodyne thermo-optic frequency shifters.
abstract: Miniaturized laser Doppler vibrometers (LDVs) have many advantages over conventional bulk LDVs. In this paper, the realization of a miniaturized heterodyne LDV integrated on silicon-on-insulator substrate is reported. The optical frequency shifters in these on-chip LDVs employ a serrodyne technique, and they generate a frequency shift at 2 kHz. Vibrations of a mirror for the frequency range between 1.1 and 123 Hz and the velocity range between 0.8 and 400 μm/s are measured by both an on-chip LDV and a commercial LDV. The measurement results agree well. A compensation method for the influence of on-chip spurious reflections is also demonstrated.
authors.affiliation: Photonics Research Group, Department of Information Technology, Ghent-University-Interuniversitair Micro-Elektronica Centrum, Ghent, Belgium. Yanlu.Li@intec.ugent.be
authors.forename: Yanlu
authors.initials: Y
authors.lastname: Li
authors.forename: Steven
authors.initials: S
authors.lastname: Verstuyft
authors.forename: Gunay
authors.initials: G
authors.lastname: Yurtsever
authors.forename: Shahram
authors.initials: S
authors.lastname: Keyvaninia
authors.forename: Gunther
authors.initials: G
authors.lastname: Roelkens
authors.forename: Dries
authors.initials: D
authors.lastname: Van Thourhout
authors.forename: Roel
authors.initials: R
authors.lastname: Baets