title: Note: a real-time beam current density meter.
abstract: We have developed a real-time beam current density meter for charged particle beams. It measures the mean current density by collimating a uniform and large diameter primary beam. The suppression of the secondary electrons and the deflection of the beam were simulated, and it was tested with a 105 keV Ar(7+) ion beam.
authors.affiliation: Institute of Modern Physics, Chinese Academy of Sciences, Lanzhou 730000, China.
authors.forename: Junliang
authors.initials: J
authors.lastname: Liu
authors.forename: Deyang
authors.initials: D
authors.lastname: Yu
authors.forename: Fangfang
authors.initials: F
authors.lastname: Ruan
authors.forename: Yingli
authors.initials: Y
authors.lastname: Xue
authors.forename: Wei
authors.initials: W
authors.lastname: Wang