title: Development of advanced electron holographic techniques and application to industrial materials and devices.
abstract: The development of a transmission electron microscope equipped with a field emission gun paved the way for electron holography to be put to practical use in various fields. In this paper, we review three advanced electron holography techniques: on-line real-time electron holography, three-dimensional (3D) tomographic holography and phase-shifting electron holography, which are becoming important techniques for materials science and device engineering. We also describe some applications of electron holography to the analysis of industrial materials and devices: GaAs compound semiconductors, solid oxide fuel cells and all-solid-state lithium ion batteries.
authors.affiliation: Nanostructures Research Laboratory, Japan Fine Ceramics Center, 2-4-1 Mutsuno, Atsuta-ku, Nagoya 456-8587, Japan. k-yamamoto@jfcc.or.jp
authors.forename: Kazuo
authors.initials: K
authors.lastname: Yamamoto
authors.forename: Tsukasa
authors.initials: T
authors.lastname: Hirayama
authors.forename: Takayoshi
authors.initials: T
authors.lastname: Tanji
mesh_terms: D004560:Electricity; D004583:Electrons; D006696:Holography / Q000379:methods*; D021621:Imaging, Three-Dimensional / Q000379:methods*; D008094:Lithium / Q000737:chemistry; D060526:Magnetic Fields; D008280:Magnetics; D046529:Microscopy, Electron, Transmission / Q000379:methods*; D055095:Optics and Photonics
chemical_list: D008094:Lithium
keywords: 3D tomographic holography; dopant profiling; lithium ion battery; phase-shifting electron holography; real-time electron holography; solid oxide fuel cell