title: Interface characterization of B4C-based multilayers by X-ray grazing-incidence reflectivity and diffuse scattering.
abstract: B4C-based multilayers have important applications for soft to hard X-rays. In this paper, X-ray grazing-incidence reflectivity and diffuse scattering, combining various analysis methods, were used to characterize the structure of B4C-based multilayers including layer thickness, density, interfacial roughness, interdiffusion, correlation length, etc. Quantitative results for W/B4C, Mo/B4C and La/B4C multilayers were compared. W/B4C multilayers show the sharpest interfaces and most stable structures. The roughness replications of La/B4C and Mo/B4C multilayers are not strong, and oxidations and structure expansions are found in the aging process. This work provides guidance for future fabrication and characterization of B4C-based multilayers.
authors.affiliation: Shanghai Synchrotron Radiation Facility, Shanghai Institute of Applied Physics, Chinese Academy of Sciences, Zhangheng Road 239, Pudong District, Shanghai, People's Republic of China. jianghui@sinap.ac.cn
authors.forename: Hui
authors.initials: H
authors.lastname: Jiang
authors.forename: Zhanshan
authors.initials: Z
authors.lastname: Wang
authors.forename: Jingtao
authors.initials: J
authors.lastname: Zhu
mesh_terms: D001896:Boron Compounds / Q000737:chemistry* / Q000528:radiation effects; D002244:Carbon / Q000737:chemistry* / Q000528:radiation effects; D004867:Equipment Design; D019544:Equipment Failure Analysis; D007909:Lenses; D008422:Materials Testing; D012031:Refractometry / Q000295:instrumentation*; D012542:Scattering, Radiation; D014965:X-Rays
chemical_list: D001896:Boron Compounds; C488551:boron carbonitride; D002244:Carbon
keywords: X-ray reflectivity; aging; boron carbide; diffuse scattering; interface; multilayer