title: Multichannel bandpass filters utilizing multilayer photonic crystal.
abstract: We demonstrate multichannel optical bandpass filters utilizing alternating dielectric multilayers stacked on a patterned substrate. A microstructured Si/SiO(2) multilayer was formed by rf biased magnetron sputtering process on a fused silica substrate with surface gratings. The bandwidths of each filter channel were measured to be 50~175 nm in the near infrared region. Control of center wavelength and bandwidth by the grating pitch was verified.
authors.affiliation: Graduate School of Engineering, Tohoku University, Sendai 980-8579 Japan. ohtera@ecei.tohoku.ac.jp
authors.forename: Yasuo
authors.initials: Y
authors.lastname: Ohtera
authors.forename: Hirohito
authors.initials: H
authors.lastname: Yamada