title: Silicon carbide microdisk resonator.
abstract: We demonstrate a silicon carbide (SiC) microdisk resonator with an intrinsic optical quality factor of 6.19×10(3), fabricated on the 3C-SiC-on-Si platform. We characterize the temperature dependence of the cavity resonance and obtain a thermo-optic coefficient of 2.92×10(-5)/K for 3C-SiC. Our simulations show that the device exhibits great potential for cavity optomechanical applications.
authors.affiliation: Department of Physics and Astronomy, University of Rochester, Rochester, New York 14627, USA.
authors.forename: Xiyuan
authors.initials: X
authors.lastname: Lu
authors.forename: Jonathan Y
authors.initials: JY
authors.lastname: Lee
authors.forename: Philip X-L
authors.initials: PX
authors.lastname: Feng
authors.forename: Qiang
authors.initials: Q
authors.lastname: Lin