title: Nanoscale growth and patterning of inorganic oxides using DNA nanostructure templates.
abstract: We describe a method to form custom-shaped inorganic oxide nanostructures by using DNA nanostructure templates. We show that a DNA nanostructure can modulate the rate of chemical vapor deposition of SiO2 and TiO2 with nanometer-scale spatial resolution. The resulting oxide nanostructure inherits its shape from the DNA template. This method generates both positive-tone and negative-tone patterns on a wide range of substrates and is compatible with conventional silicon nanofabrication processes. Our result opens the door to the use of DNA nanostructures as general-purpose templates for high-resolution nanofabrication.
authors.affiliation: Department of Chemistry, University of Pittsburgh, Pittsburgh, Pennsylvania 15260, United States.
authors.forename: Sumedh P
authors.initials: SP
authors.lastname: Surwade
authors.forename: Feng
authors.initials: F
authors.lastname: Zhou
authors.forename: Bryan
authors.initials: B
authors.lastname: Wei
authors.forename: Wei
authors.initials: W
authors.lastname: Sun
authors.forename: Anna
authors.initials: A
authors.lastname: Powell
authors.forename: Christina
authors.initials: C
authors.lastname: O'Donnell
authors.forename: Peng
authors.initials: P
authors.lastname: Yin
authors.forename: Haitao
authors.initials: H
authors.lastname: Liu
mesh_terms: D004247:DNA / Q000737:chemistry*; D049329:Nanostructures / Q000737:chemistry*; D012822:Silicon Dioxide / Q000737:chemistry*; D014025:Titanium / Q000737:chemistry*
chemical_list: C009495:titanium dioxide; D012822:Silicon Dioxide; D004247:DNA; D014025:Titanium