title: Multifunctional TEM-specimen holder equipped with a piezodriving probe and an electron irradiation port.
abstract: The charging effect due to electron irradiation in an electron microscope has been studied so far with incident electrons. Here we report on a new specimen holder to control the charging effect by using electrons emitted from an irradiation port in the holder while maintaining a constant intensity of the incident electron beam. Details of the charging effect, such as electric field variation, are expected to be investigated by electron holography. The new specimen holder was developed by modifying a double-probe piezodriving specimen holder to introduce an electron irradiation port in one of its two arms. As a result, the new modified specimen holder consists of a piezodriving probe and an electron irradiation port, both of which can be controlled in three dimensions, using piezoelectric elements and micrometers. We demonstrate that variations in the charging effect for epoxy resin and surface contamination can be observed by electron holography.
authors.affiliation: Institute of Multidisciplinary Research for Advanced Materials, Tohoku University, Sendai 980-8577, Japan.
authors.forename: Daisuke
authors.initials: D
authors.lastname: Shindo
authors.forename: Satoshi
authors.initials: S
authors.lastname: Suzuki
authors.forename: Kuniaki
authors.initials: K
authors.lastname: Sato
authors.forename: Zentaro
authors.initials: Z
authors.lastname: Akase
authors.forename: Yasukazu
authors.initials: Y
authors.lastname: Murakami
authors.forename: Kazuya
authors.initials: K
authors.lastname: Yamazaki
authors.forename: Yuuta
authors.initials: Y
authors.lastname: Ikeda
authors.forename: Tomohisa
authors.initials: T
authors.lastname: Fukuda
keywords: charging effect; electron irradiation; piezodriving probe; specimen holder