title: Optimal laser positioning for laser-assisted atom probe tomography.
abstract: Laser-assisted atom probe tomography is a material analysis method based on field evaporating ions from a tip-shaped sample by a combination of a standing electric field and a short (pico- or femtosecond) laser pulse. The laser-pulse thereby acts as a starting signal for a time-of-flight mass analysis of the ions whereby the thermal energy deposited in the tip by the laser pulse temporarily enables the evaporation of ions from the surface of the tip. Here we will use simulations of the laser absorption on a silicon tip to find the optimal position of the laser spot in order to maximize the mass resolution achieved during the experiments. We will confirm our simulations by showing that the experimentally observed mass resolution indeed changes as predicted by the simulations.
authors.affiliation: Fraunhofer-CNT, Königsbrücker Str. 180, 01099 Dresden, Germany. Electronic address: sebastian.koelling@cnt.fraunhofer.de.
authors.forename: S
authors.initials: S
authors.lastname: Koelling
authors.forename: N
authors.initials: N
authors.lastname: Innocenti
authors.forename: J
authors.initials: J
authors.lastname: Bogdanowicz
authors.forename: W
authors.initials: W
authors.lastname: Vandervorst
keywords: Laser-assisted atom probe; Laser-tip interaction; Silicon