title: Improvement of the precision of lattice parameter determination by nano-beam electron diffraction.
abstract: A highly precise determination of lattice parameters using higher-order Laue zone (HOLZ) reflections observed in nano-beam electron diffraction is presented. The introduction of more than 40 HOLZ reflections, whose positions are corrected by considering the aberration of the electron optics and are determined with an accuracy of 0.04 nm⁻¹, allows us to achieve a remarkable high precision of a 0.02% error, which is four times higher than the precision without HOLZ reflections.
authors.affiliation: EcoTopia Science Institute, Nagoya University, Nagoya, Japan.
authors.forename: Koh
authors.initials: K
authors.lastname: Saitoh
authors.forename: Hirotaka
authors.initials: H
authors.lastname: Nakahara
authors.forename: Nobuo
authors.initials: N
authors.lastname: Tanaka
keywords: interface; lattice parameter determination; lattice strain; nano-beam electron diffraction; semiconductor