title: Raster scan waveform compensation control for enhancing the orthogonality of images in SEM.
abstract: Electron microscopy is used to determine the form and size of samples from images. Consequently, distortion or error in the images produces incorrect data. This study developed an algorithm to enhance the scanner signal in order to improve the orthogonality of the image. The results of images with poor orthogonality, when observed from the central axis standard, are analogous to those of rotationally transformed images. Therefore, we believe that transmitting enhanced signals with rotationally transformed images will improve the quality of the data.
authors.affiliation: Korea Electronics-Machinery Convergence Technology Institute, Seoul, South Korea.
authors.forename: Seung Jae
authors.initials: SJ
authors.lastname: Kim
authors.forename: Wonjong
authors.initials: W
authors.lastname: Joo
authors.forename: Dong Hwan
authors.initials: DH
authors.lastname: Kim
keywords: orthogonality; raster scan; scan coil; scan line; scan skew; scanning electron microscope