title: Sub-micrometer soft lithography of a bulk chalcogenide glass.
abstract: We demonstrate, for the first time, time- and cost-effective replication of sub-micrometer features from a soft PDMS mold onto a bulk chalcogenide glass over a large surface area. A periodic array of sub-micrometer lines (diffraction grating) with period 625 nm, amplitude 45 nm and surface roughness 3 nm was imprinted onto the surface of the chalcogenide AsSe(2) bulk glass at temperature 225°C, i.e. 5°C below the softening point of the glass. Sub-micrometer soft lithography into chalcogenide bulk glasses shows good reliability, reproducibility and promise for feasible fabrication of various dispersive optical elements, anti-reflection surfaces, 2D photonic structures and nano-structured surfaces for enhanced photonic properties and chemical sensing.
authors.affiliation: Centre for Materials and Nanotechnologies, Faculty of Chemical Technology, University of Pardubice, CS. Legion’s sq. 565, Pardubice 532 10, Czech Republic. tomas.kohoutek@upce.cz
authors.forename: Tomas
authors.initials: T
authors.lastname: Kohoutek
authors.forename: Jiri
authors.initials: J
authors.lastname: Orava
authors.forename: A Lindsay
authors.initials: AL
authors.lastname: Greer
authors.forename: Hiroshi
authors.initials: H
authors.lastname: Fudouzi
mesh_terms: D018011:Chalcogens / Q000737:chemistry* / Q000528:radiation effects; D005898:Glass / Q000737:chemistry*; D008027:Light; D008422:Materials Testing; D054802:Molecular Imprinting / Q000379:methods*; D053758:Nanoparticles / Q000737:chemistry* / Q000528:radiation effects / Q000648:ultrastructure*; D010316:Particle Size; D013499:Surface Properties / Q000528:radiation effects
chemical_list: D018011:Chalcogens