title: Collecting optical coherence elastography depth profiles with a micromachined cantilever probe.
abstract: We present an experimental setup that combines optical coherence elastography depth sensing with atomic force microscope indentation. The instrument relies on a miniaturized cantilever probe that compresses a sample with a small footprint force and simultaneously collects an optical coherence tomography (OCT) depth profile underneath the indenting point. The deflection of the cantilever can be monitored via optical fiber interferometry with a resolution of 2 nm. The OCT readout then provides depth profiles of the subsurface layer deformation with 15 nm resolution and depth range of a few millimeters.
authors: Department of Physics and Astronomy and LaserLaB, VU Amsterdam, Amsterdam, The Netherlands.
authors: Dhwajal
authors: D
authors: Chavan
authors: Jianhua
authors: J
authors: Mo
authors: Mattijs
authors: M
authors: de Groot
authors: Anna
authors: A
authors: Meijering
authors: Johannes F
authors: JF
authors: de Boer
authors: Davide
authors: D
authors: Iannuzzi