title: Large-scale roll-to-roll fabrication of vertically oriented block copolymer thin films.
abstract: Large-scale roll-to-roll (R2R) fabrication of vertically oriented nanostructures via directed self-assembly of cylindrical block copolymer (c-BCP) thin films is reported. Nearly 100% vertical orientation of cylinders in sub-100 nm c-BCP films under optimized processing via a dynamic sharp temperature gradient field termed Cold Zone Annealing-Sharp or 'CZA-S' is achieved, with successful scale-up on a prototype custom-built 70 ft × 1 ft R2R platform moving at 25 μm/s, with 9 consecutive CZA units. Static thermal annealing of identical films in a conventional vacuum oven fails to produce comparable results. As a potential for applications, we fabricate high-density silicon oxide nanodot arrays from the CZA-S annealed BCP thin film template.
authors: Department of Polymer Engineering, The University of Akron, Akron, Ohio 44325, USA.
authors: Gurpreet
authors: G
authors: Singh
authors: Saurabh
authors: S
authors: Batra
authors: Ren
authors: R
authors: Zhang
authors: Hongyi
authors: H
authors: Yuan
authors: Kevin G
authors: KG
authors: Yager
authors: Miko
authors: M
authors: Cakmak
authors: Brian
authors: B
authors: Berry
authors: Alamgir
authors: A
authors: Karim