title: Demonstration of high-Q mid-infrared chalcogenide glass-on-silicon resonators.
abstract: We demonstrated high-index-contrast, waveguide-coupled As2Se3 chalcogenide glass resonators monolithically integrated on silicon fabricated using optical lithography and a lift-off process. The resonators exhibited a high intrinsic quality factor of 2×10(5) at 5.2 μm wavelength, which is among the highest values reported in on-chip mid-infrared (mid-IR) photonic devices. The resonator can serve as a key building block for mid-IR planar photonic circuits.
authors: Department of Materials Science and Engineering, University of Delaware, Newark, Delaware 19716, USA.
authors: Hongtao
authors: H
authors: Lin
authors: Lan
authors: L
authors: Li
authors: Yi
authors: Y
authors: Zou
authors: Sylvain
authors: S
authors: Danto
authors: J David
authors: JD
authors: Musgraves
authors: Kathleen
authors: K
authors: Richardson
authors: Stephen
authors: S
authors: Kozacik
authors: Maciej
authors: M
authors: Murakowski
authors: Dennis
authors: D
authors: Prather
authors: Pao T
authors: PT
authors: Lin
authors: Vivek
authors: V
authors: Singh
authors: Anu
authors: A
authors: Agarwal
authors: Lionel C
authors: LC
authors: Kimerling
authors: Juejun
authors: J
authors: Hu