title: Achromatic elemental mapping beyond the nanoscale in the transmission electron microscope.
abstract: Newly developed achromatic electron optics allows the use of wide energy windows and makes feasible energy-filtered transmission electron microscopy (EFTEM) at atomic resolution. In this Letter we present EFTEM images formed using electrons that have undergone a silicon L(2,3) core-shell energy loss, exhibiting a resolution in EFTEM of 1.35 Å. This permits elemental mapping beyond the nanoscale provided that quantum mechanical calculations from first principles are done in tandem with the experiment to understand the physical information encoded in the images.
authors.affiliation: Peter Grünberg Institute and Ernst Ruska Centre for Microscopy and Spectroscopy with Electrons, ER-C, Research Centre Jülich, D-52425 Jülich, Germany. k.urban@fz-juelich.de
authors.forename: K W
authors.initials: KW
authors.lastname: Urban
authors.forename: J
authors.initials: J
authors.lastname: Mayer
authors.forename: J R
authors.initials: JR
authors.lastname: Jinschek
authors.forename: M J
authors.initials: MJ
authors.lastname: Neish
authors.forename: N R
authors.initials: NR
authors.lastname: Lugg
authors.forename: L J
authors.initials: LJ
authors.lastname: Allen
mesh_terms: D004583:Electrons; D046529:Microscopy, Electron, Transmission / Q000379:methods*; D008956:Models, Chemical; D036103:Nanotechnology / Q000379:methods*; D055095:Optics and Photonics / Q000379:methods*; D011789:Quantum Theory; D012825:Silicon / Q000737:chemistry; D013816:Thermodynamics
chemical_list: D012825:Silicon