title: Plasma-enhanced chemical vapor deposition synthesis of vertically oriented graphene nanosheets.
abstract: Vertically oriented graphene (VG) nanosheets have attracted growing interest for a wide range of applications, from energy storage, catalysis and field emission to gas sensing, due to their unique orientation, exposed sharp edges, non-stacking morphology, and huge surface-to-volume ratio. Plasma-enhanced chemical vapor deposition (PECVD) has emerged as a key method for VG synthesis; however, controllable growth of VG with desirable characteristics for specific applications remains a challenge. This paper attempts to summarize the state-of-the-art research on PECVD growth of VG nanosheets to provide guidelines on the design of plasma sources and operation parameters, and to offer a perspective on outstanding challenges that need to be overcome to enable commercial applications of VG. The review starts with an overview of various types of existing PECVD processes for VG growth, and then moves on to research on the influences of feedstock gas, temperature, and pressure on VG growth, substrate pretreatment, the growth of VG patterns on planar substrates, and VG growth on cylindrical and carbon nanotube (CNT) substrates. The review ends with a discussion on challenges and future directions for PECVD growth of VG.
authors.affiliation: State Key Laboratory of Clean Energy Utilization, Institute for Thermal Power Engineering, Zhejiang University, Hangzhou, Zhejiang 310027, China. bozh@zju.edu.cn
authors.forename: Zheng
authors.initials: Z
authors.lastname: Bo
authors.forename: Yong
authors.initials: Y
authors.lastname: Yang
authors.forename: Junhong
authors.initials: J
authors.lastname: Chen
authors.forename: Kehan
authors.initials: K
authors.lastname: Yu
authors.forename: Jianhua
authors.initials: J
authors.lastname: Yan
authors.forename: Kefa
authors.initials: K
authors.lastname: Cen
mesh_terms: D005740:Gases / Q000737:chemistry*; D006108:Graphite / Q000737:chemistry*; D006838:Hydrocarbons / Q000737:chemistry; D008872:Microwaves; D037742:Nanotubes, Carbon / Q000737:chemistry* / Q000648:ultrastructure; D011312:Pressure; D013696:Temperature
chemical_list: D005740:Gases; D006838:Hydrocarbons; D037742:Nanotubes, Carbon; D006108:Graphite