title: Comprehensive nanostructure and defect analysis using a simple 3D light-scatter sensor.
abstract: Light scattering measurement and analysis is a powerful tool for the characterization of optical and nonoptical surfaces. A new 3D scatter measurement system based on a detector matrix is presented. A compact light-scatter sensor is used to characterize the scattering and nanostructures of surfaces and to identify the origins of anisotropic scattering features. The results from the scatter sensor are directly compared with white light interferometry to analyze surface defects as well as surface roughness and the corresponding scattering distributions. The scattering of surface defects is modeled based on the Kirchhoff integral equation and the approach of Beckmann for rough surfaces.
authors.affiliation: Fraunhofer Institute for Applied Optics and Precision Engineering IOF, Albert-Einstein-Strasse 7, Jena 07745, Germany. tobias.herffurth@iof.fraunhofer.de
authors.forename: Tobias
authors.initials: T
authors.lastname: Herffurth
authors.forename: Sven
authors.initials: S
authors.lastname: Schröder
authors.forename: Marcus
authors.initials: M
authors.lastname: Trost
authors.forename: Angela
authors.initials: A
authors.lastname: Duparré
authors.forename: Andreas
authors.initials: A
authors.lastname: Tünnermann