title: Waferscale nanophotonic circuits made from diamond-on-insulator substrates.
abstract: Wide bandgap dielectrics are attractive materials for the fabrication of photonic devices because they allow broadband optical operation and do not suffer from free-carrier absorption. Here we show that polycrystalline diamond thin films deposited by chemical vapor deposition provide a promising platform for the realization of large scale integrated photonic circuits. We present a full suite of photonic components required for the investigation of on-chip devices, including input grating couplers, millimeter long nanophotonic waveguides and microcavities. In microring resonators we measure loaded optical quality factors up to 11,000. Corresponding propagation loss of 5 dB/mm is also confirmed by measuring transmission through long waveguides.
authors.affiliation: Institute of Nanotechnology, Karlsruhe Institute of Technology, 76344 Eggenstein-Leopoldshafen, Germany.
authors.forename: P
authors.initials: P
authors.lastname: Rath
authors.forename: N
authors.initials: N
authors.lastname: Gruhler
authors.forename: S
authors.initials: S
authors.lastname: Khasminskaya
authors.forename: C
authors.initials: C
authors.lastname: Nebel
authors.forename: C
authors.initials: C
authors.lastname: Wild
authors.forename: W H P
authors.initials: WH
authors.lastname: Pernice
mesh_terms: D018130:Diamond / Q000737:chemistry*; D004553:Electric Conductivity; D004581:Electronics / Q000295:instrumentation*; D004867:Equipment Design; D019544:Equipment Failure Analysis; D053758:Nanoparticles / Q000737:chemistry*; D036103:Nanotechnology / Q000295:instrumentation*; D012031:Refractometry / Q000295:instrumentation*; D020349:Surface Plasmon Resonance / Q000295:instrumentation*
chemical_list: D018130:Diamond