title: Efficient perfectly vertical fiber-to-chip grating coupler for silicon horizontal multiple slot waveguides.
abstract: Horizontal multiple slot waveguides of polysilicon and silicon nanocrystalline oxide were grating coupled to a surface normal fiber array. Measurements yielded a coupling efficiency of 60% per grating. The fabrication-tolerant, four-stage grating design was genetically evolved from a random seed without starting from first-principle design. Theoretical coupling efficiency was 68% and was re-designed to 63% after accommodating all sources of fabrication error. To our knowledge, this is the first implementation of a purely polysilicon and silicon nanocrystalline oxide slot waveguide platform.
authors.affiliation: The University of Texas at Austin, 10100 Burnet Road Bldg 160 MER, Austin, Texas 78758, USA. john.covey@coveytech.com
authors.forename: John
authors.initials: J
authors.lastname: Covey
authors.forename: Ray T
authors.initials: RT
authors.lastname: Chen
mesh_terms: D004735:Energy Transfer; D004867:Equipment Design; D019544:Equipment Failure Analysis; D053758:Nanoparticles / Q000737:chemistry*; D036103:Nanotechnology / Q000295:instrumentation*; D012031:Refractometry / Q000295:instrumentation*; D012822:Silicon Dioxide / Q000737:chemistry*; D020349:Surface Plasmon Resonance / Q000295:instrumentation*
chemical_list: D012822:Silicon Dioxide