title: Spatial resolution of confocal XRF technique using capillary optics.
abstract: XRF (X-ray fluorescence) is a powerful technique for elemental analysis with a high sensitivity. The resolution is presently limited by the size of the primary excitation X-ray beam. A test-bed for confocal-type XRF has been developed to estimate the ultimate lateral resolution which could be reached in chemical mapping using this technique. A polycapillary lens is used to tightly focus the primary X-ray beam of a low power rhodium X-ray source, while the fluorescence signal is collected by a SDD detector through a cylindrical monocapillary. This system was used to characterize the geometry of the fluorescent zone. Capillary radii ranging from 50 μm down to 5 μm were used to investigate the fluorescence signal maximum level This study allows to estimate the ultimate resolution which could be reached in-lab or on a synchrotron beamline. A new tool combining local XRF and scanning probe microscopy is finally proposed.
authors.affiliation: CNRS, UMR7325, Aix-Marseille Univ,, CINaM, Marseille 13288, France. didier.tonneau@univ-amu.fr.
authors.forename: Maël
authors.initials: M
authors.lastname: Dehlinger
authors.forename: Carole
authors.initials: C
authors.lastname: Fauquet
authors.forename: Sebastien
authors.initials: S
authors.lastname: Lavandier
authors.forename: Orawan
authors.initials: O
authors.lastname: Aumporn
authors.forename: Franck
authors.initials: F
authors.lastname: Jandard
authors.forename: Vladimir
authors.initials: V
authors.lastname: Arkadiev
authors.forename: Aniouar
authors.initials: A
authors.lastname: Bjeoumikhov
authors.forename: Didier
authors.initials: D
authors.lastname: Tonneau