title: Highly efficient color filter array using resonant Si3N4 gratings.
abstract: We demonstrate the design and fabrication of a highly efficient guided-mode resonant color filter array. The device is designed using numerical methods based on rigorous coupled-wave analysis and is patterned using UV-laser interferometric lithography. It consists of a 60-nm-thick subwavelength silicon nitride grating along with a 105-nm-thick homogeneous silicon nitride waveguide on a glass substrate. The fabricated device exhibits blue, green, and red color response for grating periods of 274, 327, and 369 nm, respectively. The pixels have a spectral bandwidth of ~12 nm with efficiencies of 94%, 96%, and 99% at the center wavelength of blue, green, and red color filter, respectively. These are higher efficiencies than reported in the literature previously.
authors.affiliation: Department of Electrical Engineering, University of Texas at Arlington, Box 19016, Arlington, Texas 76019, USA.
authors.forename: Mohammad Jalal
authors.initials: MJ
authors.lastname: Uddin
authors.forename: Robert
authors.initials: R
authors.lastname: Magnusson
mesh_terms: D003116:Color; D003124:Colorimetry / Q000295:instrumentation*; D004867:Equipment Design; D019544:Equipment Failure Analysis; D005374:Filtration / Q000295:instrumentation*; D012031:Refractometry / Q000295:instrumentation*; D017655:Silicon Compounds / Q000737:chemistry*
chemical_list: D017655:Silicon Compounds; C032734:silicon nitride