title: Optical phased array using high contrast gratings for two dimensional beamforming and beamsteering.
abstract: We have developed a microelectromechanical system (MEMS) optical phased array incorporating a high-index-contrast subwavelength grating (HCG) for beamforming and beamsteering in a range of ± 1.26° × 1.26°. Our approach needs only a thin single-layer HCG made of silicon, considerably improving its speed thanks to the low mass, and is suitable for high optical power applications. The measured resonant frequency of HCG is 0.32 MHz.
authors.affiliation: School of Electrical Engineering and Computer Sciences, University of California Berkeley, Berkeley, CA 94720, USA. yoo@eecs.berkeley.edu
authors.forename: Byung-Wook
authors.initials: BW
authors.lastname: Yoo
authors.forename: Mischa
authors.initials: M
authors.lastname: Megens
authors.forename: Trevor
authors.initials: T
authors.lastname: Chan
authors.forename: Tianbo
authors.initials: T
authors.lastname: Sun
authors.forename: Weijian
authors.initials: W
authors.lastname: Yang
authors.forename: Connie J
authors.initials: CJ
authors.lastname: Chang-Hasnain
authors.forename: David A
authors.initials: DA
authors.lastname: Horsley
authors.forename: Ming C
authors.initials: MC
authors.lastname: Wu
mesh_terms: D004867:Equipment Design; D019544:Equipment Failure Analysis; D008029:Lighting / Q000295:instrumentation*; D055617:Micro-Electrical-Mechanical Systems / Q000295:instrumentation*; D012031:Refractometry / Q000295:instrumentation*; D020349:Surface Plasmon Resonance / Q000295:instrumentation*