title: Two-axis MEMS scanner with transfer-printed high-reflectivity, broadband monolithic silicon photonic crystal mirrors.
abstract: We present a two-axis electrostatic MEMS scanner with high-reflectivity monolithic single-crystal-silicon photonic crystal (PC) mirrors suitable for applications in harsh environments. The reflective surfaces of the MEMS scanner are transfer-printed PC mirrors with low polarization dependence, low angular dependence, and reflectivity over 85% in the wavelength range of 1490nm~1505nm and above 90% over the wavelength band of 1550~1570nm. In static mode, the scanner has total scan range of 10.2° on one rotation axis and 7.8° on the other. Dynamic operation on resonance increase the scan range to 21° at 608Hz around the outer rotation axis and 9.5° at 1.73kHz about the inner rotation axis.
authors.affiliation: E L Ginzton Laboratory, Department of Electrical Engineering, Stanford University, Stanford, CA 94305, USA. jwjeong1@illinois.edu
authors.forename: Jae-Woong
authors.initials: JW
authors.lastname: Jeong
authors.forename: Bryan
authors.initials: B
authors.lastname: Park
authors.forename: Hohyun
authors.initials: H
authors.lastname: Keum
authors.forename: Seok
authors.initials: S
authors.lastname: Kim
authors.forename: John A
authors.initials: JA
authors.lastname: Rogers
authors.forename: Olav
authors.initials: O
authors.lastname: Solgaard