title: Note: High-performance HeNe laser feedback interferometer with birefringence feedback cavity scanned by piezoelectric transducer.
abstract: We demonstrate a high-performance HeNe laser feedback interferometer (HLFI) based on a birefringence feedback cavity scanned by a piezoelectric transducer (PZT). The PZT scanning technique leads to a significant improvement in the HLFI's anti-jamming capability. The null drift under general laboratory conditions is approximately ±32 nm, corresponding to ±2 pulses. The phase difference between the two measurement signals does not vary when the feedback cavity length changes. This ensures a large measurement range for the HLFI. The HLFI presented here features a large measurement range (>1 m), nanometer-scale resolution (15.82 nm), a compact configuration, and low cost.
authors.affiliation: The State Key Laboratory of Precision Measurement Technology and Instruments, Department of Precision Instruments, Tsinghua University, Beijing 100084, China.
authors.forename: Yun
authors.initials: Y
authors.lastname: Wu
authors.forename: Yidong
authors.initials: Y
authors.lastname: Tan
authors.forename: Zhaoli
authors.initials: Z
authors.lastname: Zeng
authors.forename: Shulian
authors.initials: S
authors.lastname: Zhang