title: Profile measurement of glass sheet using multiple wavelength backpropagation interferometry.
abstract: Multiple-wavelength backpropagation interferometry based on a spectral interferometer is proposed for measuring thin glass sheets with nanometer accuracy. The multiwavelength backpropagation method introduced to the spectral interferometer eliminates time-encoded wavelength sweeping and mechanical scanning, which enables high-speed profile measurements. The applicability of the proposed method is experimentally demonstrated through cross-sectional profile and vibrating surface displacement measurements of a glass sheet.
authors.affiliation: Department of Electrical and Electronics Engineering, Niigata University, Niigata, Japan. schoi@eng.niigata-u.ac.jp
authors.forename: Samuel
authors.initials: S
authors.lastname: Choi
authors.forename: Kohei
authors.initials: K
authors.lastname: Otsuki
authors.forename: Osami
authors.initials: O
authors.lastname: Sasaki
authors.forename: Takamasa
authors.initials: T
authors.lastname: Suzuki