title: Multi-interferometric displacement measurement system with variable measurement mirrors.
abstract: Laser interferometers have been widely implemented for the displacement sensing and positioning calibration of the precision mechanical industry, due to their excellent measuring features and direct traceability to the dimensional definition. Currently some kinds of modified Fabry-Perot interferometers with a planar mirror or a corner cube prism as the measurement mirror have been proposed. Each optical structure of both models has the individual particularity and performance for measuring applications. In this investigation, a multi-interferometric displacement system has been proposed whose measurement mirror can be quickly and conveniently altered with a planar mirror or a corner cube reflector depending on the measuring demand. Some experimental results and analyses about the interpolation error and displacement measurements with both reflectors have been demonstrated. According to the results, suggestions about the choice of a measuring reflector and interpolation model have been presented. With the measuring verifications, the developed system with a maximum standard deviation less than 0.2081 μm in measuring range of 300 mm would be a compact and robust tool for sensing or calibrating the linear displacement of mechanical equipment.
authors.affiliation: Department of Mechanical Engineering, National Central University, Taoyuan, Taiwan.
authors.forename: Chung-Ping
authors.initials: CP
authors.lastname: Chang
authors.forename: Pi-Cheng
authors.initials: PC
authors.lastname: Tung
authors.forename: Lih-Horng
authors.initials: LH
authors.lastname: Shyu
authors.forename: Yung-Cheng
authors.initials: YC
authors.lastname: Wang
authors.forename: Eberhard
authors.initials: E
authors.lastname: Manske