title: PMN-PT-PZT composite films for high frequency ultrasonic transducer applications.
abstract: We have successfully fabricatedx(0.65PMN-0.35PT)-(1 -x)PZT (xPMN-PT-(1 -x)PZT), wherexis 0.1, 0.3, 0.5, 0.7 and 0.9, thick films with a thickness of approximately 9 µm on platinized silicon substrate by employing a composite sol-gel technique. X-ray diffraction analysis and scanning electron microscopy revealed that these films are dense and creak-free with well-crystallized perovskite phase in the whole composition range. The dielectric constant can be controllably adjusted by using different compositions. Higher PZT content ofxPMN-PT-(1 -x)PZT films show better ferroelectric properties. A representative 0.9PMN-PT-0.1PZT thick film transducer is built. It has 200 MHz center frequency with a -6 dB bandwidth of 38% (76 MHz). The measured two-way insertion loss is 65 dB.
authors.affiliation: Department of Biomedical Engineering and NIH Transducer Resource Center, University of Southern California, Los Angeles, CA 90089, USA ; Mork Family Department of Chemical Engineering and Materials Science, University of Southern California, Los Angeles, CA 90089, USA.
authors.forename: Hsiu-Sheng
authors.initials: HS
authors.lastname: Hsu
authors.forename: Vatcharee
authors.initials: V
authors.lastname: Benjauthrit
authors.forename: Fan
authors.initials: F
authors.lastname: Zheng
authors.forename: Rumin
authors.initials: R
authors.lastname: Chen
authors.forename: Yuhong
authors.initials: Y
authors.lastname: Huang
authors.forename: Qifa
authors.initials: Q
authors.lastname: Zhou
authors.forename: K Kirk
authors.initials: KK
authors.lastname: Shung
keywords: Composite films; PMN-PT; PZT; Ultrasonic transducer