title: Absolute flatness measurements of silicon mirrors by a three-intersection method by near-infrared interferometry.
abstract: Absolute flatness of three silicon plane mirrors have been measured by a three-intersection method based on the three-flat method using a near-infrared interferometer. The interferometer was constructed using a near-infrared laser diode with a 1,310-nm wavelength light where the silicon plane mirror is transparent. The height differences at the coordinate values between the absolute line profiles by the three-intersection method have been evaluated. The height differences of the three flats were 4.5 nm or less. The three-intersection method using the near-infrared interferometer was useful for measuring the absolute flatness of the silicon plane mirrors.
authors.affiliation: Department of Precision Science and Technology, Graduate School of Engineering, Osaka University, 2-1 Yamada-oka, Suita, Osaka 565-0871, Japan. morita@prec.eng.osaka-u.ac.jp.
authors.forename: Junichi
authors.initials: J
authors.lastname: Uchikoshi
authors.forename: Yoshinori
authors.initials: Y
authors.lastname: Hayashi
authors.forename: Noritaka
authors.initials: N
authors.lastname: Ajari
authors.forename: Kentaro
authors.initials: K
authors.lastname: Kawai
authors.forename: Kenta
authors.initials: K
authors.lastname: Arima
authors.forename: Mizuho
authors.initials: M
authors.lastname: Morita