title: Bi-material terahertz sensors using metamaterial structures.
abstract: In this paper we report on the design, fabrication and characterization of terahertz (THz) bi-material sensors with metamaterial absorbers. MEMS fabrication-friendly SiOx and Al are used to maximize the bimetallic effect and metamaterial absorption at 3.8 THz, the frequency of a quantum cascade laser illumination source. Sensors with different configurations were fabricated and the measured absorption is near 100% and responsivity is around 1.2 deg/μW, which agree well with finite element simulations. The results indicate the potential of using these detectors to fabricate focal plane arrays for real time THz imaging.
authors.affiliation: Department of Physics, Naval Postgraduate School, Monterey, CA 93943, USA. fdalves@nps.edu
authors.forename: Fabio
authors.initials: F
authors.lastname: Alves
authors.forename: Dragoslav
authors.initials: D
authors.lastname: Grbovic
authors.forename: Brian
authors.initials: B
authors.lastname: Kearney
authors.forename: Nickolay V
authors.initials: NV
authors.lastname: Lavrik
authors.forename: Gamani
authors.initials: G
authors.lastname: Karunasiri