title: Ultrafast web inspection with hybrid dispersion laser scanner.
abstract: We report an ultrafast web inspector that operates at a 1000 times higher scan rate than conventional methods. This system is based on a hybrid dispersion laser scanner that performs line scans at nearly 100 MHz. Specifically, we demonstrate web inspection with detectable resolution of 48.6 μm/pixel (scan direction) × 23 μm (web flow direction) within a width of view of 6 mm at a record high scan rate of 90.9 MHz. We demonstrate the identification and evaluation of particles on silicon wafers. This method holds great promise for speeding up quality control and hence reducing manufacturing costs.
authors.affiliation: Department of Electrical Engineering, University of California, Los Angeles, California 90095, USA.
authors.forename: Hongwei
authors.initials: H
authors.lastname: Chen
authors.forename: Chao
authors.initials: C
authors.lastname: Wang
authors.forename: Akio
authors.initials: A
authors.lastname: Yazaki
authors.forename: Chanju
authors.initials: C
authors.lastname: Kim
authors.forename: Keisuke
authors.initials: K
authors.lastname: Goda
authors.forename: Bahram
authors.initials: B
authors.lastname: Jalali
mesh_terms: D004867:Equipment Design; D019544:Equipment Failure Analysis; D007089:Image Enhancement / Q000295:instrumentation*; D007221:Industry / Q000295:instrumentation*; D007834:Lasers; D008422:Materials Testing / Q000295:instrumentation*; D018613:Microscopy, Confocal / Q000295:instrumentation*; D010783:Photometry / Q000295:instrumentation*; D012031:Refractometry / Q000295:instrumentation*; D013499:Surface Properties