title: Self-biased 215 MHz magnetoelectric NEMS resonator for ultra-sensitive DC magnetic field detection.
abstract: High sensitivity magnetoelectric sensors with their electromechanical resonance frequencies < 200 kHz have been recently demonstrated using magnetostrictive/piezoelectric magnetoelectric heterostructures. In this work, we demonstrate a novel magnetoelectric nano-electromechanical systems (NEMS) resonator with an electromechanical resonance frequency of 215 MHz based on an AlN/(FeGaB/Al2O3) × 10 magnetoelectric heterostructure for detecting DC magnetic fields. This magnetoelectric NEMS resonator showed a high quality factor of 735, and strong magnetoelectric coupling with a large voltage tunable sensitivity. The admittance of the magnetoelectric NEMS resonator was very sensitive to DC magnetic fields at its electromechanical resonance, which led to a new detection mechanism for ultra-sensitive self-biased RF NEMS magnetoelectric sensor with a low limit of detection of DC magnetic fields of ~300 picoTelsa. The magnetic/piezoelectric heterostructure based RF NEMS magnetoelectric sensor is compact, power efficient and readily integrated with CMOS technology, which represents a new class of ultra-sensitive magnetometers for DC and low frequency AC magnetic fields.
authors.affiliation: Department of Electrical and Computer Engineering, Northeastern University, Boston, MA 02115, USA.
authors.forename: Tianxiang
authors.initials: T
authors.lastname: Nan
authors.forename: Yu
authors.initials: Y
authors.lastname: Hui
authors.forename: Matteo
authors.initials: M
authors.lastname: Rinaldi
authors.forename: Nian X
authors.initials: NX
authors.lastname: Sun