title: New approach for multilayered microstructures fabrication based on a water-soluble backing substrate.
abstract: We demonstrate a new approach for woodpile microstructure fabrication. The method involves the use of polyvinyl alcohol (PVA) as a sacrificial substrate for the transfer of SU-8 films to prepatterned structures. The surface activated PVA substrate allows good wettability of SU-8 film and its solubility in water eliminates the need of delaminating SU-8 structures from the substrate. This makes the fabrication process much simplified and we successfully demonstrate eight-layer stacking of gratings. Fourier transform infrared spectra of single-layer and four-layer grating structures show a broader transmission dip spectrum compared to their film counterparts, indicating their potential use as broadband terahertz (THz) absorbers.
authors.forename: Eunice Sok Ping
authors.initials: ES
authors.lastname: Leong
authors.forename: Sok Yee
authors.initials: SY
authors.lastname: Yew
authors.forename: Tanu Suryadi
authors.initials: TS
authors.lastname: Kustandi
authors.forename: Yan Jun
authors.initials: YJ
authors.lastname: Liu
authors.forename: Hendrix
authors.initials: H
authors.lastname: Tanoto
authors.forename: Qing Yang
authors.initials: QY
authors.lastname: Wu
authors.forename: Wei Wei
authors.initials: WW
authors.lastname: Loh
authors.forename: Siew Lang
authors.initials: SL
authors.lastname: Teo
authors.forename: Jinghua
authors.initials: J
authors.lastname: Teng