title: Electromechanical piezoresistive sensing in suspended graphene membranes.
abstract: Monolayer graphene exhibits exceptional electronic and mechanical properties, making it a very promising material for nanoelectromechanical devices. Here, we conclusively demonstrate the piezoresistive effect in graphene in a nanoelectromechanical membrane configuration that provides direct electrical readout of pressure to strain transduction. This makes it highly relevant for an important class of nanoelectromechanical system (NEMS) transducers. This demonstration is consistent with our simulations and previously reported gauge factors and simulation values. The membrane in our experiment acts as a strain gauge independent of crystallographic orientation and allows for aggressive size scalability. When compared with conventional pressure sensors, the sensors have orders of magnitude higher sensitivity per unit area.
authors.affiliation: KTH Royal Institute of Technology , Isafjordsgatan 22, 16440 Kista, Sweden.
authors.forename: A D
authors.initials: AD
authors.lastname: Smith
authors.forename: F
authors.initials: F
authors.lastname: Niklaus
authors.forename: A
authors.initials: A
authors.lastname: Paussa
authors.forename: S
authors.initials: S
authors.lastname: Vaziri
authors.forename: A C
authors.initials: AC
authors.lastname: Fischer
authors.forename: M
authors.initials: M
authors.lastname: Sterner
authors.forename: F
authors.initials: F
authors.lastname: Forsberg
authors.forename: A
authors.initials: A
authors.lastname: Delin
authors.forename: D
authors.initials: D
authors.lastname: Esseni
authors.forename: P
authors.initials: P
authors.lastname: Palestri
authors.forename: M
authors.initials: M
authors.lastname: Östling
authors.forename: M C
authors.initials: MC
authors.lastname: Lemme
mesh_terms: D003217:Conductometry / Q000295:instrumentation*; D055119:Elastic Modulus; D004867:Equipment Design; D019544:Equipment Failure Analysis; D006108:Graphite / Q000737:chemistry*; D055617:Micro-Electrical-Mechanical Systems / Q000295:instrumentation*; D053758:Nanoparticles / Q000737:chemistry* / Q000648:ultrastructure; D036103:Nanotechnology / Q000295:instrumentation*; D011312:Pressure; D014160:Transducers, Pressure
chemical_list: D006108:Graphite