title: Impact of parameter variation in fabrication of nanostructure by atomic force microscopy nanolithography.
abstract: In this letter, we investigate the fabrication of Silicon nanostructure patterned on lightly doped (10(15) cm(-3)) p-type silicon-on-insulator by atomic force microscope nanolithography technique. The local anodic oxidation followed by two wet etching steps, potassium hydroxide etching for silicon removal and hydrofluoric etching for oxide removal, are implemented to reach the structures. The impact of contributing parameters in oxidation such as tip materials, applying voltage on the tip, relative humidity and exposure time are studied. The effect of the etchant concentration (10% to 30% wt) of potassium hydroxide and its mixture with isopropyl alcohol (10%vol. IPA ) at different temperatures on silicon surface are expressed. For different KOH concentrations, the effect of etching with the IPA admixture and the effect of the immersing time in the etching process on the structure are investigated. The etching processes are accurately optimized by 30%wt. KOH +10%vol. IPA in appropriate time, temperature, and humidity.
authors.affiliation: Institute of Microengineering and Nanoelectronics, Universiti Kebangsaan Malaysia, Bangi, Selangor, Malaysia. mrsabar@eng.usm.my
authors.forename: Arash
authors.initials: A
authors.lastname: Dehzangi
authors.forename: Farhad
authors.initials: F
authors.lastname: Larki
authors.forename: Sabar D
authors.initials: SD
authors.lastname: Hutagalung
authors.forename: Mahmood
authors.initials: M
authors.lastname: Goodarz Naseri
authors.forename: Burhanuddin Y
authors.initials: BY
authors.lastname: Majlis
authors.forename: Manizheh
authors.initials: M
authors.lastname: Navasery
authors.forename: Norihan Abdul
authors.initials: NA
authors.lastname: Hamid
authors.forename: Mimiwaty Mohd
authors.initials: MM
authors.lastname: Noor
mesh_terms: D019840:2-Propanol / Q000737:chemistry; D006878:Hydroxides / Q000737:chemistry; D018625:Microscopy, Atomic Force / Q000379:methods*; D049329:Nanostructures / Q000737:chemistry; D036103:Nanotechnology; D017680:Potassium Compounds / Q000737:chemistry
chemical_list: D006878:Hydroxides; D017680:Potassium Compounds; D019840:2-Propanol; C029943:potassium hydroxide