title: Facile fabrication of single-crystal-diamond nanostructures with ultrahigh aspect ratio.
abstract: A robust and facile approach for making single-crystal-diamond MEMS and NEMS devices is presented. The approach relies entirely on commercial diamond material and standard cleanroom processes. As an example, batch fabrication of cantilever beams of thickness down to 45 nm and aspect ratios exceeding 2000:1 is demonstrated.
authors.affiliation: Department of Physics, ETH Zurich, Schafmattstrasse 16, 8093 Zurich, Switzerland.
authors.forename: Ye
authors.initials: Y
authors.lastname: Tao
authors.forename: Christian
authors.initials: C
authors.lastname: Degen
mesh_terms: D003460:Crystallization / Q000379:methods; D018130:Diamond / Q000737:chemistry*; D004867:Equipment Design; D019544:Equipment Failure Analysis; D008422:Materials Testing; D055617:Micro-Electrical-Mechanical Systems / Q000295:instrumentation*; D049329:Nanostructures / Q000737:chemistry* / Q000648:ultrastructure*; D036103:Nanotechnology / Q000295:instrumentation*; D010316:Particle Size
chemical_list: D018130:Diamond