title: Power-efficient oscillator-based readout circuit for multichannel resonant volatile sensors.
abstract: This work presents a multichannel electronic nose system that enables a range of novel applications owing to high sensitivity, low form factor and low power consumption. Each channel is based on a combination of doubly-clamped piezoelectric MEMS resonators and CMOS oscillator-based readout designed in TSMC 0.25 μm technology. Using "application specific" polymer coatings, the individual resonators can be tuned to detect mixtures of volatile organic compounds (VOCs). This system achieves ppm-level theoretical limit of detection for ethanol which paves the way towards a broad range of applications such as personalized health and environment air quality.
authors.affiliation: Holst Centre/imec, 5605 KN Eindhoven, The Netherlands. julia.pettine@imec-nl.nl
authors.forename: Julia
authors.initials: J
authors.lastname: Pettine
authors.forename: Violeta
authors.initials: V
authors.lastname: Petrescu
authors.forename: Devrez Mehmet
authors.initials: DM
authors.lastname: Karabacak
authors.forename: Marianne
authors.initials: M
authors.lastname: Vandecasteele
authors.forename: Mercedes
authors.initials: M
authors.lastname: Crego-Calama
authors.forename: Chris
authors.initials: C
authors.lastname: Van Hoof
mesh_terms: D015415:Biomarkers / Q000032:analysis; D001698:Biomedical Engineering; D001944:Breath Tests / Q000295:instrumentation; D017097:Electric Impedance; D011211:Electric Power Supplies; D062609:Electronic Nose / Q000706:statistics & numerical data; D004867:Equipment Design; D000431:Ethanol / Q000032:analysis; D006801:Humans; D057230:Limit of Detection; D009991:Oscillometry / Q000295:instrumentation; D055549:Volatile Organic Compounds / Q000032:analysis*
chemical_list: D015415:Biomarkers; D055549:Volatile Organic Compounds; D000431:Ethanol