title: Polarization-independent dual-band terahertz metamaterial absorbers based on gold/parylene-C/silicide structure.
abstract: We design, fabricate, and characterize dual-band terahertz (THz) metamaterial absorbers with high absorption based on structures consisting of a cobalt silicide (Co-Si) ground plane, a parylene-C dielectric spacer, and a metal top layer. By combining two periodic metal resonators that couple separately within a single unit cell, a polarization-independent absorber with two distinct absorption peaks was obtained. By varying the thickness of the dielectric layer, we obtain absorptivity of 0.76 at 0.76 THz and 0.97 at 2.30 THz, which indicates the Co-Si ground plane absorbers present good performance.
authors.affiliation: National Key Laboratory of Science and Technology on Micro/Nano Fabrication, Institute of Microelectronics, Peking University, Beijing 100871, China.
authors.forename: Yongzheng
authors.initials: Y
authors.lastname: Wen
authors.forename: Wei
authors.initials: W
authors.lastname: Ma
authors.forename: Joe
authors.initials: J
authors.lastname: Bailey
authors.forename: Guy
authors.initials: G
authors.lastname: Matmon
authors.forename: Xiaomei
authors.initials: X
authors.lastname: Yu
authors.forename: Gabriel
authors.initials: G
authors.lastname: Aeppli
mesh_terms: D000042:Absorption; D001672:Biocompatible Materials / Q000737:chemistry; D003035:Cobalt / Q000737:chemistry; D003198:Computer Simulation; D004867:Equipment Design; D006046:Gold / Q000737:chemistry*; D011108:Polymers / Q000737:chemistry*; D012825:Silicon / Q000737:chemistry*; D013499:Surface Properties; D055068:Terahertz Spectroscopy / Q000295:instrumentation* / Q000379:methods; D014992:Xylenes / Q000737:chemistry*
chemical_list: D001672:Biocompatible Materials; D011108:Polymers; D014992:Xylenes; C011055:parylene; D003035:Cobalt; D006046:Gold; D012825:Silicon