title: Enhanced white photoluminescence in silicon-rich oxide/SiO2 superlattices by low-energy ion-beam treatment.
abstract: This study presents the crystalline and luminescence properties of silicon-rich oxide (SRO)/SiO2 superlattices in which the SRO layers were prepared with a low-energy (<60 eV) argon ion-beam treatment. Experimental results evidenced that density of the Si nanocrystals (NCs) in the SRO layer was increased by ion-beam treatment after annealing, increasing the surface roughness. The stoichiometry of the as-prepared SRO layer was unchanged but the phase separation of the annealed SRO layer was enhanced by the ion-beam treatment, yielding visible white photoluminescence from the E' centers and Si NCs.
authors.affiliation: Department of Electrical Engineering, National Cheng Kung University, Tainan, 70101, Taiwan. cfshih@mail.ncku.edu.tw
authors.forename: Chuan-Feng
authors.initials: CF
authors.lastname: Shih
authors.forename: Chu-Yun
authors.initials: CY
authors.lastname: Hsiao
authors.forename: Kuan-Wei
authors.initials: KW
authors.lastname: Su