title: Nanostructure fabricated by nanosphere lithography assisted with O2 plasma treatment.
abstract: Nanosphere lithography is an efficient way to fabricate metallic nanostructures with large area. This paper presents the fabrication of metallic hexagonal nano-pyramid arrays by two dimensional nanospheres lithography assisted with O2 plasma treatment. By O2 plasma treatment, the gap and diameter of nanospheres can be modulated. After electron beam deposition, we can fabricate similar nanostructures with different pyramid gap distances. This method may be an easy way to modulate the geometric parameters of nanostructures.
authors.affiliation: Key Laboratory of Weak-Light Nonlinear Photonics, Ministry of Education, Teda Applied Physics School, Nankai University, Tianjin 300457, China.
authors.forename: Wei-Guo
authors.initials: WG
authors.lastname: Yan
authors.forename: Xiang-Tian
authors.initials: XT
authors.lastname: Kong
authors.forename: Zu-Bin
authors.initials: ZB
authors.lastname: Li
authors.forename: Jian-Guo
authors.initials: JG
authors.lastname: Tian