title: Fabrication of three-dimensional nanostructured titania materials by prism holographic lithography and the sol-gel reaction.
abstract: We present a simple, easy method for fabricating high-quality titania inverted replicas of 3D holographically featured structures. A combination of single-prism holographic lithography and sol-gel chemistry was used to prepare 3D titania inverse structures with flat and completely open surfaces without the use of additional postprocessing steps, such as reactive ion etching, ion-beam milling, and/or polishing steps. A hydrophobic, stable liquid titania precursor facilitated the complete infiltration of the precursor into the hydrophobic 3D SU-8 polymer template, which produced very uniform high-quality titania inverse structures. Although the degree of film shrinkage during the calcination process was large (∼34%), the optical strength of the 3D titania inverse photonic crystals doubled because of the high-refractive-index contrast. Compared to titania inverse opal structures, the filling fraction (∼27%) of titania materials has been doubled. This is the first work to fabricate titania inverse photonic crystals with a high filling fraction by utilizing prism holographic lithography and the sol-gel chemistry reaction of a stable titania precursor. The X-ray diffraction patterns indicated the presence of a crystalline anatase or rutile phase depending on the calcination temperature.
authors.affiliation: Advanced Functional Thin Films Department, Korea Institute of Materials Science (KIMS), Changwon, Gyeongnam 641-831, Korea.
authors.forename: Sung-Gyu
authors.initials: SG
authors.lastname: Park
authors.forename: Tae Yoon
authors.initials: TY
authors.lastname: Jeon
authors.forename: Seung-Man
authors.initials: SM
authors.lastname: Yang
mesh_terms: D005782:Gels / Q000737:chemistry*; D057927:Hydrophobic and Hydrophilic Interactions; D049329:Nanostructures / Q000737:chemistry*; D010316:Particle Size; D011108:Polymers / Q000737:chemistry; D013499:Surface Properties; D014025:Titanium / Q000737:chemistry*; D014961:X-Ray Diffraction
chemical_list: D005782:Gels; D011108:Polymers; C009495:titanium dioxide; D014025:Titanium