title: Properties of individually addressable ferroelectric nanocapacitor arrays fabricated by focused ion beam milling.
abstract: Well-ordered large-areas individual addressable ferroelectric nanocapacitor arrays with Pt top electrode and various lateral sizes down to below 100 nm have been fabricated by focused ion beam (FIB) milling on Nb-doped single-crystal SrTiO3(001) substrate. The well-shaped "butterfly" displacement-voltage loop is indicative of strong ferroelectricity of the nanocapacitor arrays. All cells in the arrays with a top to bottom polarization in the initial milled state. The as-grown state domain images with various contrasts illustrate that the cells have different domain structure. The dispersion of properties and size effects exist jointly in the arrays. The piezoresponse of same cell size are different, and the difference increases with increasing cell size. The piezoresponse properties of some individual cell don't exhibit size dependence, but the properties of all cells have an obvious size depended tendency that the piezoresponse values decreases statistically with decreasing cell size. The size effects were dominated by the ion damage owing to high damaged-layer-to-volume ratio in the smaller cells, while the dispersion of properties was dominated by the inhomogeneous texture and various domain structures of the cells.
authors.affiliation: State Key Laboratory of Advanced Technology for Materials Synthesis and Processing, Wuhan University of Technology, Wuhan 430070, China.
authors.forename: Ying
authors.initials: Y
authors.lastname: Dai
authors.forename: Lei
authors.initials: L
authors.lastname: Yang
authors.forename: Longhai
authors.initials: L
authors.lastname: Wang
authors.forename: Lianying
authors.initials: L
authors.lastname: Zou
authors.forename: Bin
authors.initials: B
authors.lastname: Tian
authors.forename: Sha
authors.initials: S
authors.lastname: Wu