title: Ultra-sensitive nucleic acids detection with electrical nanosensors based on CMOS-compatible silicon nanowire field-effect transistors.
abstract: Silicon nanowire field-effect transistors (SiNW-FETs) have recently emerged as a type of powerful nanoelectronic biosensors due to their ultrahigh sensitivity, selectivity, label-free and real-time detection capabilities. Here, we present a protocol as well as guidelines for detecting DNA with complementary metal oxide semiconductor (CMOS) compatible SiNW-FET sensors. SiNWs with high surface-to-volume ratio and controllable sizes were fabricated with an anisotropic self-stop etching technique. Probe DNA molecules specific for the target DNA were covalently modified onto the surface of the SiNWs. The SiNW-FET nanosensors exhibited an ultrahigh sensitivity for detecting the target DNA as low as 1 fM and good selectivity for discrimination from one-base mismatched DNA.
authors.affiliation: State Key Laboratories of Transducer Technology and Science and Technology on Micro-system Laboratory, Shanghai Institute of Microsystem and Information Technology, Chinese Academy of Sciences, Shanghai 200050, China.
authors.forename: Na
authors.initials: N
authors.lastname: Lu
authors.forename: Anran
authors.initials: A
authors.lastname: Gao
authors.forename: Pengfei
authors.initials: P
authors.lastname: Dai
authors.forename: Tie
authors.initials: T
authors.lastname: Li
authors.forename: Yi
authors.initials: Y
authors.lastname: Wang
authors.forename: Xiuli
authors.initials: X
authors.lastname: Gao
authors.forename: Shiping
authors.initials: S
authors.lastname: Song
authors.forename: Chunhai
authors.initials: C
authors.lastname: Fan
authors.forename: Yuelin
authors.initials: Y
authors.lastname: Wang
mesh_terms: D015374:Biosensing Techniques / Q000379:methods*; D004247:DNA / Q000737:chemistry* / Q000302:isolation & purification; D015342:DNA Probes; D053770:Nanowires / Q000737:chemistry*; D012666:Semiconductors; D012825:Silicon / Q000737:chemistry*; D014173:Transistors, Electronic
chemical_list: D015342:DNA Probes; D004247:DNA; D012825:Silicon
keywords: (3-aminopropyl) triethoxysilane; APTES; Biosensor; CMOS; CMOS-compatible; CVD; I(DS); Nucleic acids; PCB; PECVD; SEM; SOI; SiNW-FETs; SiNWs; Silicon nanowire; TMAH; Ultra-sensitive; V(DS); V(GS); chemical vapor deposition; complementary metal oxide semiconductor; gate volotage; plasma enhanced chemical vapor deposition; printed circuit board; scanning electron microscopy; silicon nanowire field-effect transistors; silicon nanowires; silicon-on-insulator; source/drain current; source/drain voltage; tetramethylammonium hydroxide