title: Direct prototyping of patterned nanoporous carbon: a route from materials to on-chip devices.
abstract: Prototyping of nanoporous carbon membranes with three-dimensional microscale patterns is significant for integration of such multifunctional materials into various miniaturized systems. Incorporating nano material synthesis into microelectronics technology, we present a novel approach to direct prototyping of carbon membranes with highly nanoporous structures inside. Membranes with significant thicknesses (1 ~ 40 μm) are rapidly prototyped at wafer level by combining nano templating method with readily available microfabrication techniques, which include photolithography, high-temperature annealing and etching. In particular, the high-surface-area membranes are specified as three-dimensional electrodes for micro supercapacitors and show high performance compared to reported ones. Improvements in scalability, compatibility and cost make the general strategy promising for batch fabrication of operational on-chip devices or full integration of three-dimensional nanoporous membranes with existing micro systems.
authors.affiliation: Tsinghua National Laboratory for Information Science and Technology, PR China.
authors.forename: Caiwei
authors.initials: C
authors.lastname: Shen
authors.forename: Xiaohong
authors.initials: X
authors.lastname: Wang
authors.forename: Wenfeng
authors.initials: W
authors.lastname: Zhang
authors.forename: Feiyu
authors.initials: F
authors.lastname: Kang
mesh_terms: D002244:Carbon / Q000737:chemistry*; D025802:Electric Capacitance; D004566:Electrodes; D004581:Electronics / Q000295:instrumentation; D049329:Nanostructures / Q000737:chemistry* / Q000648:ultrastructure; D009584:Nitrogen / Q000737:chemistry; D011108:Polymers / Q000737:chemistry; D016062:Porosity
chemical_list: D011108:Polymers; D002244:Carbon; D009584:Nitrogen