title: Fabrication of perforated micro/nanopore membranes via a combination of nanoimprint lithography and pressed self-perfection process for size reduction.
abstract: Artificial membranes with perforated nanopores in defined locations provide an important biomimicking platform for sensing and analysis of biomolecules. This study presents a simple and flexible method to fabricate a freestanding polymer membrane with perforated micro- and nanopores using a combination of nanoimprint lithography (NIL) and pressed self-perfection (PSP) process. NIL was used to define initial pores of a few micrometers in diameter in the SU-8 membrane layer, which was followed by the PSP process where the patterned SU-8 membrane is pressed with a blank silicon wafer at an elevated temperature. This PSP process results in a lateral flow of the SU-8 resist and consequently reduces the pore size in the membrane. With this method, we have demonstrated fabrication of a SU-8 membrane with perforated pores down to approximately 300 nm in diameter. The results indicate that by employing a pore reduction process nanopore membranes can be manufactured without requirements of having a stamp with nanoscale structures and high aspect ratio imprinting with the stamp.
authors.affiliation: Mechanical Engineering Department, Center for Bio-Modular Multiscale Systems, Louisiana State University, Baton Rouge, LA 70803, USA.
authors.forename: Junseo
authors.initials: J
authors.lastname: Choi
authors.forename: Bahador
authors.initials: B
authors.lastname: Farshchian
authors.forename: Jinsoo
authors.initials: J
authors.lastname: Kim
authors.forename: Sunggook
authors.initials: S
authors.lastname: Park