title: Electrical biomolecule detection using nanopatterned silicon via block copolymer lithography.
abstract: An electrical biosensor exploiting a nanostructured semiconductor is a promising technology for the highly sensitive, label-free detection of biomolecules via a straightforward electronic signal. The facile and scalable production of a nanopatterned electrical silicon biosensor by block copolymer (BCP) nano-lithography is reported. A cost-effective and large-area nanofabrication, based on BCP self-assembly and single-step dry etching, is developed for the hexagonal nanohole patterning of thin silicon films. The resultant nanopatterned electrical channel modified with biotin molecules successfully detects the two proteins, streptavidin and avidin, down to nanoscale molarities (≈1 nm). The nanoscale pattern comparable to the Debye screening length and the large surface area of the three-dimensional silicon nanochannel enable excellent sensitivity and stability. A device simulation confirms that the nanopatterned structure used in this work is effective for biomolecule detection. This approach relying on the scalable self-assembly principle offers a high-throughput manufacturing process for clinical lab-on-a-chip diagnoses and relevant biomolecular studies.
authors.affiliation: Department of Materials Science and Engineering, Korea Advanced Institute of Science and Technology (KAIST), 291 Daehak-ro, Yuseong-gu, Daejeon, 305-701, Republic of Korea.
authors.forename: Chang Kyu
authors.initials: CK
authors.lastname: Jeong
authors.forename: Hyeong Min
authors.initials: HM
authors.lastname: Jin
authors.forename: Jae-Hyuk
authors.initials: JH
authors.lastname: Ahn
authors.forename: Tae Jung
authors.initials: TJ
authors.lastname: Park
authors.forename: Hyeon Gyun
authors.initials: HG
authors.lastname: Yoo
authors.forename: Min
authors.initials: M
authors.lastname: Koo
authors.forename: Yang-Kyu
authors.initials: YK
authors.lastname: Choi
authors.forename: Sang Ouk
authors.initials: SO
authors.lastname: Kim
authors.forename: Keon Jae
authors.initials: KJ
authors.lastname: Lee
mesh_terms: D015374:Biosensing Techniques; D008855:Microscopy, Electron, Scanning; D049329:Nanostructures; D011108:Polymers / Q000737:chemistry*; D012825:Silicon / Q000737:chemistry*
chemical_list: D011108:Polymers; D012825:Silicon
keywords: biosensors; block copolymers; nanopattern; proteins; self-assembly