title: Sensitized excited free-radical processes as read-write tools: impact on non-linear lithographic processes.
abstract: A prefluorescent radical probe in which a 2,2,6,6-tetramethylpiperidine-N-oxyl (TEMPO) unit is sensitized with visible light via energy transfer from a tethered coumarin dye has been synthesized. The excited TEMPO moiety undergoes hydrogen abstraction from a polymer with concomitant functionalization of the polymeric matrix; this writing process can be reversed thermally. The fluorescent probes can be bleached under high intensity illumination, making these new materials suitable for dual-tone lithography with potential applications in sub-diffraction lithographic imaging.
authors.affiliation: Department of Chemistry and Centre for Catalysis Research and Innovation, University of Ottawa, Ottawa, ON, Canada.
authors.forename: Stefania
authors.initials: S
authors.lastname: Impellizzeri
authors.forename: Kevin G
authors.initials: KG
authors.lastname: Stamplecoskie
authors.forename: Juan C
authors.initials: JC
authors.lastname: Scaiano