title: Demonstration of mid-infrared waveguide photonic crystal cavities.
abstract: We have demonstrated what we believe to be the first waveguide photonic crystal cavity operating in the mid-infrared. The devices were fabricated from Ge23Sb7S70 chalcogenide glass (ChG) on CaF2 substrates by combing photolithographic patterning and focused ion beam milling. The waveguide-coupled cavities were characterized using a fiber end fire coupling method at 5.2 μm wavelength, and a loaded quality factor of ~2000 was measured near the critical coupling regime.
authors.affiliation: Department of Materials Science & Engineering, University of Delaware, Newark, Delaware 19716, USA.
authors.forename: Hongtao
authors.initials: H
authors.lastname: Lin
authors.forename: Lan
authors.initials: L
authors.lastname: Li
authors.forename: Fei
authors.initials: F
authors.lastname: Deng
authors.forename: Chaoying
authors.initials: C
authors.lastname: Ni
authors.forename: Sylvain
authors.initials: S
authors.lastname: Danto
authors.forename: J David
authors.initials: JD
authors.lastname: Musgraves
authors.forename: Kathleen
authors.initials: K
authors.lastname: Richardson
authors.forename: Juejun
authors.initials: J
authors.lastname: Hu