title: An ultra-high element density pMUT array with low crosstalk for 3-D medical imaging.
abstract: A ~1 MHz piezoelectric micromachined ultrasonic transducer (pMUT) array with ultra-high element density and low crosstalk is proposed for the first time. This novel pMUT array is based on a nano-layer spin-coating lead zirconium titanium film technique and can be fabricated with high element density using a relatively simple process. Accordingly, key fabrication processes such as thick piezoelectric film deposition, low-stress Si-SOI bonding and bulk silicon removal have been successfully developed. The novel fine-pitch 6 × 6 pMUT arrays can all work at the desired frequency (~1 MHz) with good uniformity, high performance and potential IC integration compatibility. The minimum interspace is ~20 μm, the smallest that has ever been achieved to the best of our knowledge. These arrays can be potentially used to steer ultrasound beams and implement high quality 3-D medical imaging applications.
authors.affiliation: Institute of Microelectronics, Tsinghua University, Beijing 100084, China. yiyang@tsinghua.edu.cn
authors.forename: Yi
authors.initials: Y
authors.lastname: Yang
authors.forename: He
authors.initials: H
authors.lastname: Tian
authors.forename: Yu-Feng
authors.initials: YF
authors.lastname: Wang
authors.forename: Yi
authors.initials: Y
authors.lastname: Shu
authors.forename: Chang-Jian
authors.initials: CJ
authors.lastname: Zhou
authors.forename: Hui
authors.initials: H
authors.lastname: Sun
authors.forename: Cang-Hai
authors.initials: CH
authors.lastname: Zhang
authors.forename: Hao
authors.initials: H
authors.lastname: Chen
authors.forename: Tian-Ling
authors.initials: TL
authors.lastname: Ren
mesh_terms: D004867:Equipment Design; D019544:Equipment Failure Analysis; D007089:Image Enhancement / Q000295:instrumentation*; D021621:Imaging, Three-Dimensional / Q000295:instrumentation*; D055617:Micro-Electrical-Mechanical Systems / Q000295:instrumentation*; D008904:Miniaturization; D015203:Reproducibility of Results; D012680:Sensitivity and Specificity; D059629:Signal-To-Noise Ratio; D014159:Transducers; D014463:Ultrasonography / Q000295:instrumentation*
references.citation: Bioinformatics. 2005 Jul 15;21(14):3176-8
references.pmid: 15879453
references.citation: Nanoscale. 2012 Apr 7;4(7):2272-7
references.pmid: 22214995
references.citation: IEEE Trans Ultrason Ferroelectr Freq Control. 1992;39(1):48-53
references.pmid: 18263118
references.citation: JAMA. 1991 May 8;265(18):2382-7
references.pmid: 2016836
references.citation: Ann Radiol (Paris). 1988;31(7-8):426-32
references.pmid: 3072909
references.citation: Nanoscale. 2012 Jun 7;4(11):3345-9
references.pmid: 22562717
references.citation: IEEE Trans Ultrason Ferroelectr Freq Control. 2008 Nov;55(11):2484-92
references.pmid: 19049928
references.citation: ACS Nano. 2011 Jun 28;5(6):4878-85
references.pmid: 21591811
references.citation: IEEE Trans Ultrason Ferroelectr Freq Control. 2010 Jun;57(6):1470-7
references.pmid: 20529722
references.citation: Sci Rep. 2012;2:523
references.pmid: 22826801
references.citation: JAMA. 1991 Apr 3;265(13):1726-31
references.pmid: 2002576
references.citation: Eur J Radiol. 1998 May;27 Suppl 2:S133-281
references.pmid: 9750065
references.citation: Sens Actuators A Phys. 2007 Jul 20;138(1):221-229
references.pmid: 18037982
references.citation: Clin Imaging. 1994 Jan-Mar;18(1):31-5
references.pmid: 8180857