title: Toughening thin-film structures with ceramic-like amorphous silicon carbide films.
abstract: A significant improvement of adhesion in thin-film structures is demonstrated using embedded ceramic-like amorphous silicon carbide films (a-SiC:H films). a-SiC:H films exhibit plasticity at the nanoscale and outstanding chemical and thermal stability unlike most materials. The multi-functionality and the ease of processing of the films have potential to offer a new toughening strategy for reliability of nanoscale device structures.
authors.affiliation: Stanford University, Stanford, CA, 94305, USA.
authors.forename: Yusuke
authors.initials: Y
authors.lastname: Matsuda
authors.forename: Ill
authors.initials: I
authors.lastname: Ryu
authors.forename: Sean W
authors.initials: SW
authors.lastname: King
authors.forename: Jeff
authors.initials: J
authors.lastname: Bielefeld
authors.forename: Reinhold H
authors.initials: RH
authors.lastname: Dauskardt
keywords: a-SiC:H; adhesion; fracture; plasticity; thin-film structure