title: A wireless passive pressure microsensor fabricated in HTCC MEMS technology for harsh environments.
abstract: A wireless passive high-temperature pressure sensor without evacuation channel fabricated in high-temperature co-fired ceramics (HTCC) technology is proposed. The properties of the HTCC material ensure the sensor can be applied in harsh environments. The sensor without evacuation channel can be completely gastight. The wireless data is obtained with a reader antenna by mutual inductance coupling. Experimental systems are designed to obtain the frequency-pressure characteristic, frequency-temperature characteristic and coupling distance. Experimental results show that the sensor can be coupled with an antenna at 600 °C and max distance of 2.8 cm at room temperature. The senor sensitivity is about 860 Hz/bar and hysteresis error and repeatability error are quite low.
authors.affiliation: Key Laboratory of Instrumentation Science & Dynamic Measurement, Ministry of Education, North University of China, Taiyuan 030051, China. tanqiulin@nuc.edu.cn
authors.forename: Qiulin
authors.initials: Q
authors.lastname: Tan
authors.forename: Hao
authors.initials: H
authors.lastname: Kang
authors.forename: Jijun
authors.initials: J
authors.lastname: Xiong
authors.forename: Li
authors.initials: L
authors.lastname: Qin
authors.forename: Wendong
authors.initials: W
authors.lastname: Zhang
authors.forename: Chen
authors.initials: C
authors.lastname: Li
authors.forename: Liqiong
authors.initials: L
authors.lastname: Ding
authors.forename: Xiansheng
authors.initials: X
authors.lastname: Zhang
authors.forename: Mingliang
authors.initials: M
authors.lastname: Yang
mesh_terms: D002516:Ceramics / Q000737:chemistry*; D017753:Ecosystem; D004784:Environmental Monitoring / Q000295:instrumentation*; D004867:Equipment Design; D019544:Equipment Failure Analysis; D055617:Micro-Electrical-Mechanical Systems / Q000295:instrumentation*; D008904:Miniaturization; D013696:Temperature; D014160:Transducers, Pressure; D059015:Wireless Technology / Q000295:instrumentation*
references.citation: Sensors (Basel). 2013 Feb 27;13(3):2719-34
references.pmid: 23447006