title: SU8 inverted-rib waveguide Bragg grating filter.
abstract: A polymeric SU8 inverted-rib waveguide Bragg grating filter fabricated using reactive ion etching (RIE) and solvent assisted microcontact molding (SAMIM) is presented. SAMIM is one kind of soft lithography. The technique is unique in that a composite hard-polydimethysiloxane/polydimethysiloxane stamp is used to transfer the grating pattern onto an inverted SU8 rib waveguide system. The composite grating stamp can be used repeatedly several times without degradation. Using this stamp and inverter-rib waveguide structure, the Bragg grating filter fabrication can be significantly simplified. The experiment result shows an attenuation dip in the transmission spectra, with a value of -7 dBm at 1550 nm for a grating with a period of 0.492 μm on an inverted-rib waveguide with 6.6 μm width and 4 μm height.
authors.affiliation: Department of Mechanical Engineering, University of Washington, Seattle, Washington 98195, USA.
authors.forename: Cheng-Sheng
authors.initials: CS
authors.lastname: Huang
authors.forename: Wei-Chih
authors.initials: WC
authors.lastname: Wang
mesh_terms: D004852:Epoxy Compounds / Q000737:chemistry*; D004867:Equipment Design; D019544:Equipment Failure Analysis; D005374:Filtration / Q000295:instrumentation*; D008422:Materials Testing; D011108:Polymers / Q000737:chemistry*; D012031:Refractometry / Q000295:instrumentation*; D020349:Surface Plasmon Resonance / Q000295:instrumentation*; D013499:Surface Properties
chemical_list: D004852:Epoxy Compounds; D011108:Polymers; C520895:SU-8 compound