title: Design and sub-beam phase measurement of Dammann grating with three-phase array output.
abstract: An improved type of Dammann grating (DG) that could generate an equal-intensity spot array which has only three phases is proposed. Numerical solutions of 1×4 and 1×5 such DGs are given. A 4×4 two-phase DG manufactured by very-large-scale integration (VLSI) techniques is presented. A phase-shift-interferometry-based technique that measures the intensity and sub-beam phases of beam splitting gratings is proposed. The performance measurements of the manufactured 4×4 two-phase DG using the proposed technique is carried out.
authors.affiliation: Shanghai Institute of Optics and Fine Mechanics, Chinese Academy of Sciences, Shanghai, China.
authors.forename: Bing
authors.initials: B
authors.lastname: Li
authors.forename: Ya'nan
authors.initials: Y
authors.lastname: Zhi
authors.forename: Jianfeng
authors.initials: J
authors.lastname: Sun
authors.forename: Ning
authors.initials: N
authors.lastname: Zhang
authors.forename: Yu
authors.initials: Y
authors.lastname: Zhou
authors.forename: Lijuan
authors.initials: L
authors.lastname: Wang
authors.forename: Peipei
authors.initials: P
authors.lastname: Hou
authors.forename: Liren
authors.initials: L
authors.lastname: Liu