title: High throughput ultralong (20 cm) nanowire fabrication using a wafer-scale nanograting template.
abstract: Nanowires are being actively explored as promising nanostructured materials for high performance flexible electronics, biochemical sensors, photonic applications, solar cells, and secondary batteries. In particular, ultralong (centimeter-long) nanowires are highly attractive from the perspective of electronic performance, device throughput (or productivity), and the possibility of novel applications. However, most previous works on ultralong nanowires have issues related to limited length, productivity, difficult alignment, and deploying onto the planar substrate complying with well-matured device fabrication technologies. Here, we demonstrate a highly ordered ultralong (up to 20 cm) nanowire array, with a diameter of 50 nm (aspect ratio of up to 4,000,000:1), in an unprecedented large (8 in.) scale (2,000,000 strands on a wafer). We first devised a perfectly connected ultralong nanograting master template on the whole area of an 8 in. substrate using a top-down approach, with a density equivalent to that achieved with e-beam lithography (100 nm). Using this large-area, ultralong, high-density nanograting template, we developed a fast and effective method for fabricating up to 20 cm long nanowire arrays on a plastic substrate, composed of metal, dielectric, oxide, and ferroelectric materials. As a suggestion of practical application, a prototype of a large-area aluminum wire grid polarizer was demonstrated.
authors.affiliation: Department of Electrical Engineering, Korea Advanced Institute of Science and Technology (KAIST) , 291 Daehak-ro, Yuseong-gu, Daejeon, 305-701, Republic of Korea.
authors.forename: Jeongho
authors.initials: J
authors.lastname: Yeon
authors.forename: Young Jae
authors.initials: YJ
authors.lastname: Lee
authors.forename: Dong Eun
authors.initials: DE
authors.lastname: Yoo
authors.forename: Kyoung Jong
authors.initials: KJ
authors.lastname: Yoo
authors.forename: Jin Su
authors.initials: JS
authors.lastname: Kim
authors.forename: Jun
authors.initials: J
authors.lastname: Lee
authors.forename: Jeong Oen
authors.initials: JO
authors.lastname: Lee
authors.forename: Seon-Jin
authors.initials: SJ
authors.lastname: Choi
authors.forename: Gun-Wook
authors.initials: GW
authors.lastname: Yoon
authors.forename: Dong Wook
authors.initials: DW
authors.lastname: Lee
authors.forename: Gi Seong
authors.initials: GS
authors.lastname: Lee
authors.forename: Hae Chul
authors.initials: HC
authors.lastname: Hwang
authors.forename: Jun-Bo
authors.initials: JB
authors.lastname: Yoon