Stroboscopic white-light interferometry of vibrating microstructures.
We describe a LED-based stroboscopic white-light interferometer and a data analysis method that allow mapping out-of-plane surface vibration fields in electrically excited microstructures with sub-nm amplitude resolution for vibration frequencies ranging up to tens of MHz. The data analysis, which is performed entirely in the frequency domain, makes use of the high resolution available in the measured interferometric phase data. For demonstration, we image the surface vibration fields in a square-plate silicon MEMS resonator for three vibration modes ranging in frequency between 3 and 14 MHz. The minimum detectable vibration amplitude in this case was less than 100 pm.
Fiber Optics Group, Department of Micro and Nanosciences, Aalto University, PO Box 13500, FI-00076 Aalto, Finland.
Igor
I
Shavrin
Lauri
L
Lipiäinen
Kimmo
K
Kokkonen
Steffen
S
Novotny
Matti
M
Kaivola
Hanne
H
Ludvigsen
D004867:Equipment Design; D019544:Equipment Failure Analysis; D007368:Interferometry / Q000295:instrumentation*; D008029:Lighting / Q000295:instrumentation*; D008422:Materials Testing / Q000295:instrumentation*; D055617:Micro-Electrical-Mechanical Systems / Q000295:instrumentation*; D009991:Oscillometry / Q000295:instrumentation*; D061088:Photoacoustic Techniques / Q000295:instrumentation; D012666:Semiconductors; D049489:Stroboscopy / Q000295:instrumentation*; D014732:Vibration