Improvement of diffraction efficiency of dielectric transmission gratings using anti-reflection coatings.
A novel method for increasing diffraction efficiency of transmission gratings is proposed. In this method, dielectric multilayers are inserted between a grating region and a substrate. These multilayers work as an anti-reflection coating for the transmission grating. It is presented that a grating with 1740 grooves/mm has the diffraction efficiency over 99% using this anti-reflection coating.
Quantum Beam Science Directorate, Japan Atomic Energy Agency, Kyoto 6190215, Japan. nagashima.keisuke@jaea.go.jp
K
K
Nagashima
A
A
Kosuge
Y
Y
Ochi
M
M
Tanaka