Production of 70-nm Cr dots by laser-induced forward transfer.
The effect of donor film thickness and laser beam fluence on the size of laser-induced forward transfer (LIFT) spots is studied to achieve sub-100 nm features. A 130 fs, 800 nm laser is focused on ultrathin Cr films, and the transfer and ablation thresholds of these films at various thicknesses are determined. The minimum transfer spot size decreases with decreasing donor film thickness and incident laser fluence. Minimum LIFT spots of 70-450 nm diameter are obtained from films of 20-80 nm thickness, respectively. The 70 nm diameter transfer spots obtained from sputtered continuous films are the smallest to date.
Department of Electrical and Computer Engineering, University of Alberta, ECERF 2nd Floor, Edmonton, AB, T6G 2V4, Canada.
Vahit
V
Sametoglu
Vincent T K
VT
Sauer
Ying Y
YY
Tsui
D002857:Chromium / Q000737:chemistry* / Q000528:radiation effects*; D007834:Lasers; D008422:Materials Testing; D008567:Membranes, Artificial; D053758:Nanoparticles / Q000737:chemistry* / Q000528:radiation effects / Q000648:ultrastructure*; D010316:Particle Size; D011829:Radiation Dosage
D008567:Membranes, Artificial; D002857:Chromium