Interfacial structure and electrical properties of transparent conducting ZnO thin films on polymer substrates.
The effects of polymer substrates on the interfacial structure and the thermal stability of Ga-doped ZnO (GZO) thin films were investigated. The GZO thin films were deposited on polyethylene terephthalate (PET) and polyethylene naphthalate (PEN) substrates by rf-magnetron sputtering at room temperature, and thermal stability tests of the GZO thin films on the polymer substrates were performed at 150°C up to 8 h in air. Electrical and structural characterizations of the GZO thin films on the PET and the PEN substrates were carried out, and the origins of the stable interfacial structure and the improved thermal stability of the GZO thin film on the PEN substrate were discussed.
Energy and Environmental Division, Korea Institute of Ceramic Engineering and Technology, 233-5 Gasan-dong, Geumcheon-gu, Seoul 153-801, Korea.
Young Soo
YS
Lim
Dae Wook
DW
Kim
Jong-Ho
JH
Kang
Seul Gi
SG
Seo
Bo Bae
BB
Kim
Hyoung-Seuk
HS
Choi
Won-Seon
WS
Seo
Yong Soo
YS
Cho
Hyung-Ho
HH
Park