Integrated temperature sensor based on an enhanced pyroelectric photonic crystal.
In this paper, temperature variations are detected thanks to an enhanced nano-optical pyroelectric sensor. Sensing is obtained with the pyroelectric effect of lithium niobate (LN) in which, a suitable air-membrane photonic crystal cavity has been fabricated. The wavelength position of the cavity mode is tuned 11.5 nm for a temperature variation of only 32 °C. These results agree quite well with 3D-FDTD simulations that predict tunability of 12.5 nm for 32 °C. This photonic crystal temperature sensor shows a sensitivity of 0.359 nm/°C for an active length of only ~5.2 μm.
Institut FEMTO-ST, UMR CNRS 6174, Université de Franche-Comté, 25030 Besançon, France.
Huihui
H
Lu
Benattou
B
Sadani
Gwenn
G
Ulliac
Clement
C
Guyot
Nadège
N
Courjal
Manuel
M
Collet
Fadi Issam
FI
Baida
Maria-Pilar
MP
Bernal
D003217:Conductometry / Q000295:instrumentation*; D004867:Equipment Design; D019544:Equipment Failure Analysis; D036103:Nanotechnology / Q000295:instrumentation*; D012031:Refractometry / Q000295:instrumentation*; D020349:Surface Plasmon Resonance / Q000295:instrumentation*; D018511:Systems Integration; D013817:Thermography / Q000295:instrumentation*