Thermal magnetic field noise limits resolution in transmission electron microscopy.
The resolving power of an electron microscope is determined by the optics and the stability of the instrument. Recently, progress has been obtained towards subångström resolution at beam energies of 80 kV and below but a discrepancy between the expected and achieved instrumental information limit has been observed. Here we show that magnetic field noise from thermally driven currents in the conductive parts of the instrument is the root cause for this hitherto unexplained decoherence phenomenon. We demonstrate that the deleterious effect depends on temperature and at least weakly on the type of material.
CEOS Corrected Electron Optical Systems GmbH, Englerstraße 28, 69126 Heidelberg, Germany. uhlemann@ceos-gmbh.de
Stephan
S
Uhlemann
Heiko
H
Müller
Peter
P
Hartel
Joachim
J
Zach
Max
M
Haider