Vibration modulated subaperture stitching interferometry.
A novel subaperture stitching interferometry is developed to measure the surface deformation of the lens by utilizing the mechanical vibration induced from a motorized stage. The interferograms of different subapertures are acquired on the fly while the tested optics is rotating against its symmetrical axis. The measurement throughput and the subaperture positioning accuracy are improved simultaneously by adopting both the synchronous rotational scanning mechanism and the non-uniform phase shifting algorithm. The experimental measurement shows the stitched phase RMS error of 0.0037 waves proving the feasibility of the proposed phase acquisition method.
Department of Optics and Photonics, National Central University, 300 Chungda Rd., Chungli 32001, Taiwan.
Chao-Wen
CW
Liang
Hung-Sheng
HS
Chang
Po-Chih
PC
Lin
Cheng-Chung
CC
Lee
Yi-Chun
YC
Chen
D003198:Computer Simulation; D017076:Computer-Aided Design; D004867:Equipment Design; D019544:Equipment Failure Analysis; D005240:Feasibility Studies; D007368:Interferometry / Q000295:instrumentation*; D007909:Lenses; D008027:Light; D055617:Micro-Electrical-Mechanical Systems / Q000295:instrumentation*; D008962:Models, Theoretical; D012542:Scattering, Radiation