Fabrication of metal-oxide nano-hairs for effective index optical elements.
We present a method for fabricating high aspect ratio metal-oxide, sub-wavelength grating structures. These "nano-hair" structures are composed of alumina cylindrical pillars, partially embedded in a supporting fused silica substrate. The fabricated nano-hair structures demonstrate phase control of the transmitted beam while maintaining a peak transmitted power greater than 93% around a central wavelength of λ(o) = 1.55 µm. Based on this principle, discrete and continuous phase functions can be encoded by controlling the lithographic process.
Holcombe Department of Electrical and Computer Engineering, Center for Optical Materials Science and Engineering Technologies (COMSET), Clemson University, Clemson, South Carolina 29634, USA.
Indumathi Raghu
IR
Srimathi
Aaron J
AJ
Pung
Yuan
Y
Li
Raymond C
RC
Rumpf
Eric G
EG
Johnson