Super-resolution complex amplitude reconstruction of nanostructured binary data using an interference microscope with pattern matching.
We propose a new method of optically reconstructing binary data formed by nanostructures with an elemental size several tens of nanometers smaller than the diffraction limit, implemented with an interference microscope and a complex-amplitude image pattern matching method. We examine the size dependency of the data reconstruction capacity using a light propagation simulation based on the finite-difference time-domain (FDTD) method and the Fourier spatial frequency filtering method. We demonstrated that the readable size of the binary nanostructure depends on the magnitude of noise.
Center for Optical Research and Education (CORE), Utsunomiya University, Utsunomiya 321-8585, Japan.
Shinji
S
Ishikawa
Yoshio
Y
Hayasaki
D000465:Algorithms; D004867:Equipment Design; D019544:Equipment Failure Analysis; D007089:Image Enhancement / Q000295:instrumentation*; D016247:Information Storage and Retrieval / Q000379:methods*; D008857:Microscopy, Interference / Q000295:instrumentation*; D053758:Nanoparticles / Q000648:ultrastructure*; D010363:Pattern Recognition, Automated / Q000379:methods*