title: Analogy among microfluidics, micromechanics, and microelectronics.
abstract: We wish to illuminate the analogous link between microfluidic-based devices, and the already established pairing of micromechanics and microelectronics to create a triangular/three-way scientific relationship as a means of interlinking familial disciplines and accomplishing two primary goals: (1) to facilitate the modeling of multidisciplinary domains; and, (2) to enable us to co-simulate the entire system within a compact circuit simulator (e.g., Cadence or SPICE). A microfluidic channel-like structure embedded in a micro-electro-mechanical resonator via our proposed CMOS-MEMS technology is used to illustrate the connections among microfluidics, micromechanics, and microelectronics.
authors: Institute of Nanoengineering and Microsystems, National Tsing Hua University, Hsinchu 300, Taiwan. chaomin@mx.nthu.edu.tw.
authors: Sheng-Shian
authors: SS
authors: Li
authors: Chao-Min
authors: CM
authors: Cheng