title: Direct-write thermocapillary dewetting of polymer thin films by a laser-induced thermal gradient.
abstract: A positive-tone 2D direct-write technique that can achieve sub-wavelength patterning by non-linear overlap effects in a conventional polymer system is described. The technique involves relatively inexpensive free-space optics, skips the usual development step, and promises the possibility of a lithographic method that is solvent-free.
authors: Department of Materials Science and Engineering, Institute for Soldier Nanotechnologies, Massachusetts Institute of Technology, 77 Massachusetts Ave, Cambridge, MA, 02139, USA.
authors: Jonathan P
authors: JP
authors: Singer
authors: Pao-Tai
authors: PT
authors: Lin
authors: Steven E
authors: SE
authors: Kooi
authors: Lionel C
authors: LC
authors: Kimerling
authors: Jurgen
authors: J
authors: Michel
authors: Edwin L
authors: EL
authors: Thomas
keywords: dewetting; direct write; pattern transfer; thermocapillary effect