title: Niobium-based superconducting nano-device fabrication using all-metal suspended masks.
abstract: We report a novel method for the fabrication of superconducting nano-devices based on niobium. The well-known difficulties of lithographic patterning of high-quality niobium are overcome by replacing the usual organic resist mask by a metallic one. The quality of the fabrication procedure is demonstrated by the realization and characterization of long and narrow superconducting lines and niobium-gold-niobium proximity SQUIDs.
authors: Institut Néel, CNRS, Université Joseph Fourier and Grenoble INP, 25 rue des Martyrs, Grenoble, France. sayanti.samaddar@grenoble.cnrs.fr
authors: S
authors: S
authors: Samaddar
authors: D
authors: D
authors: van Zanten
authors: A
authors: A
authors: Fay
authors: B
authors: B
authors: Sacépé
authors: H
authors: H
authors: Courtois
authors: C B
authors: CB
authors: Winkelmann