title: Correction of nonlinear lateral distortions of scanning probe microscopy images.
abstract: A methodology for the correction of scanning probe microscopy image distortions is demonstrated. It is based on the determination of displacement vectors from the measurement of a calibration sample. By moving the pixels of the distorted scanning probe microscopy image along the displacement vectors an almost complete correction of the nonlinear, time independent distortions is achieved.
authors.affiliation: Peter Grünberg Institut, Forschungszentrum Jülich GmbH, 52425 Jülich, Germany.
authors.forename: M
authors.initials: M
authors.lastname: Schnedler
authors.forename: P H
authors.initials: PH
authors.lastname: Weidlich
authors.forename: V
authors.initials: V
authors.lastname: Portz
authors.forename: D
authors.initials: D
authors.lastname: Weber
authors.forename: R E
authors.initials: RE
authors.lastname: Dunin-Borkowski
authors.forename: Ph
authors.initials: P
authors.lastname: Ebert
keywords: Calibration; Correction algorithm; Image distortions; Scanning probe microscopy