title: Multicomponent nanopatterns by directed block copolymer self-assembly.
abstract: Complex nanopatterns integrating diverse nanocomponents are crucial requirements for advanced photonics and electronics. Currently, such multicomponent nanopatterns are principally created by colloidal nanoparticle assembly, where large-area processing of highly ordered nanostructures raises significant challenge. We present multicomponent nanopatterns enabled by block copolymer (BCP) self-assembly, which offers device oriented sub-10-nm scale nanopatterns with arbitrary large-area scalability. In this approach, BCP nanopatterns direct the nanoscale lateral ordering of the overlaid second level BCP nanopatterns to create the superimposed multicomponent nanopatterns incorporating nanowires and nanodots. This approach introduces diverse chemical composition of metallic elements including Au, Pt, Fe, Pd, and Co into sub-10-nm scale nanopatterns. As immediate applications of multicomponent nanopatterns, we demonstrate multilevel charge-trap memory device with Pt-Au binary nanodot pattern and synergistic plasmonic properties of Au nanowire-Pt nanodot pattern.
authors.affiliation: Department of Materials Science and Engineering, Korea Advanced Institute of Science and Tehcnology (KAIST) , Daejeon 305-701, Republic of Korea.
authors.forename: Dong Ok
authors.initials: DO
authors.lastname: Shin
authors.forename: Jeong Ho
authors.initials: JH
authors.lastname: Mun
authors.forename: Geon-Tae
authors.initials: GT
authors.lastname: Hwang
authors.forename: Jong Moon
authors.initials: JM
authors.lastname: Yoon
authors.forename: Ju Young
authors.initials: JY
authors.lastname: Kim
authors.forename: Je Moon
authors.initials: JM
authors.lastname: Yun
authors.forename: Yong-Biao
authors.initials: YB
authors.lastname: Yang
authors.forename: Youngtak
authors.initials: Y
authors.lastname: Oh
authors.forename: Jeong Yong
authors.initials: JY
authors.lastname: Lee
authors.forename: Jonghwa
authors.initials: J
authors.lastname: Shin
authors.forename: Keon Jae
authors.initials: KJ
authors.lastname: Lee
authors.forename: Soojin
authors.initials: S
authors.lastname: Park
authors.forename: Jaeup U
authors.initials: JU
authors.lastname: Kim
authors.forename: Sang Ouk
authors.initials: SO
authors.lastname: Kim